Methods for fabricating microstructures
First Claim
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1. A method of making a microstructured object, the method comprising the steps of:
- providing a semiconductor wafer;
patterning the semiconductor wafer with a preselected pattern of microfeatures;
molding an uncured first polymer to the patterned semiconductor wafer;
curing the first polymer, thereby forming a microstructured flexible polymer having the preselected pattern of microfeatures on a surface of the microstructured flexible polymer;
removing the microstructured flexible polymer from the patterned semiconductor wafer;
providing a macro mold having one or more macro scale features, wherein the macro scale feature of the macro mold is one of a recessed feature and a relief feature;
deforming at least a portion of the microstructured flexible polymer so as to conform the microstructured flexible polymer to at least a portion of the surface of the one or more macro scale features of the macro mold wherein the microstructured flexible polymer is placed so that a surface of the microstructured flexible polymer opposite to the surface having the preselected pattern of microfeatures faces the portion of the surface of the one or more macro scale features of the macro mold;
providing a large-area prototype having one or more macro scale features, wherein the macro scale feature of the large-area prototype is the other of a recessed feature and a relief feature;
depositing an uncured second polymer onto at least a portion of a surface of the one or more macro scale features of the prototype;
molding the uncured second polymer by bringing the macro mold and microstructured flexible polymer into contact with the prototype and the uncured second polymer;
curing the uncured second polymer, thereby making a microstructured second polymer having the preselected pattern of microfeatures;
releasing the macro mold and microstructured flexible polymer from the prototype and microstructured second polymer; and
casting or molding a material to the prototype and microstructured second polymer, thereby replicating the preselected pattern of microfeatures in at least a portion of a cast or molded object.
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Abstract
Described herein are casting and molding methods useful for making microstructured objects. By including a plurality of microfeatures on the surface of an object, other characteristics may be imparted to the object, such as increased hydrophobicity. Some of the casting and molding methods described herein further allow for manufacture of objects having both microfeatures and macro features, for example microfeatures on or within macro features or selected macro feature regions.
155 Citations
8 Claims
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1. A method of making a microstructured object, the method comprising the steps of:
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providing a semiconductor wafer; patterning the semiconductor wafer with a preselected pattern of microfeatures; molding an uncured first polymer to the patterned semiconductor wafer; curing the first polymer, thereby forming a microstructured flexible polymer having the preselected pattern of microfeatures on a surface of the microstructured flexible polymer; removing the microstructured flexible polymer from the patterned semiconductor wafer; providing a macro mold having one or more macro scale features, wherein the macro scale feature of the macro mold is one of a recessed feature and a relief feature; deforming at least a portion of the microstructured flexible polymer so as to conform the microstructured flexible polymer to at least a portion of the surface of the one or more macro scale features of the macro mold wherein the microstructured flexible polymer is placed so that a surface of the microstructured flexible polymer opposite to the surface having the preselected pattern of microfeatures faces the portion of the surface of the one or more macro scale features of the macro mold; providing a large-area prototype having one or more macro scale features, wherein the macro scale feature of the large-area prototype is the other of a recessed feature and a relief feature; depositing an uncured second polymer onto at least a portion of a surface of the one or more macro scale features of the prototype; molding the uncured second polymer by bringing the macro mold and microstructured flexible polymer into contact with the prototype and the uncured second polymer; curing the uncured second polymer, thereby making a microstructured second polymer having the preselected pattern of microfeatures; releasing the macro mold and microstructured flexible polymer from the prototype and microstructured second polymer; and casting or molding a material to the prototype and microstructured second polymer, thereby replicating the preselected pattern of microfeatures in at least a portion of a cast or molded object. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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Specification