Dynamic support system for quartz process chamber

• US 9,240,513 B2
• Filed: 04/04/2011
• Issued: 01/19/2016
• Est. Priority Date: 05/14/2010
• Status: Active Grant

• Current Assignee: SolarCity Corporation (Tesla Inc.)
• Original Assignee: SolarCity Corporation (Tesla Inc.)
• Inventors: Trujillo, Robert T., Beese, Steven C., Rozenzon, Yan
• Primary Examiner(s): LUND, JEFFRIE ROBERT
• Application Number:
  US13/079,623
• Publication Number:
  US 20110277688A1
• Time in Patent Office: 1,751 Days
• US Class Current: 1/1
• CPC Class Codes: C23C 16/44 characterised by the method of coating C23C16/04 takes precedence
• CPC Class Codes: C23C 16/52 Controlling or regulating the coating process C23C16/45557, C23C16/279 take precedence
• CPC Class Codes: F16F 15/0232 with at least one gas spring F16F15/027 takes precedence
• CPC Class Codes: F16F 15/027 comprising control arrangements F16F15/0237 takes precedence
• CPC Class Codes: F16F 15/0275 Control of stiffness
• CPC Class Codes: F16M 11/046 adapted to upward-downward translation movement
• CPC Class Codes: F16M 11/18 with mechanism for moving the apparatus relatively to the stand
• CPC Class Codes: H01L 31/18 Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof

Abstract

One embodiment of the present invention provides a support system for providing dynamic support to a deposition reactor. The system includes a coupling mechanism configured to provide coupling between the deposition reactor and the support system, an attachment mechanism configured to attach the support system to an external frame, and at least one gas bellows situated between the coupling mechanism and the attachment mechanism.

Claims

1. A system for providing support to a deposition reactor to prevent thermal stress fracture, the system comprising:

a horizontally oriented platform positioned below and coupled to the deposition reactor, wherein a top portion of the deposition rector is attached to an external frame at an attachment point;

an attachment mechanism positioned below the horizontally oriented platform and attached to the external frame;

at least one gas bellows positioned between the platform and the attachment mechanism; and

a pressure regulating mechanism coupled to the gas bellows and configured to automatically regulate gas pressure inside the gas bellows to move the platform to allow the attachment point of the top portion of the deposition reactor to remain at a same position while the deposition reactor expands or contracts due to temperature changes.

2. The support system of claim 1, wherein the pressure regulating mechanism regulates the pressure within the gas bellows by allowing pressurized gas to enter or exit the gas bellows.

3. The system of claim 2, wherein the pressurized gas includes inert gas.

4. The system of claim 1, wherein the horizontally oriented platform is in direct contact with a bottom surface of the deposition reactor.

5. The system of claim 1, wherein the attachment mechanism includes a mount bracket comprising a vertical surface and a horizontal surface, wherein the vertical surface is mounted to the external frame, and wherein the horizontal surface is coupled to the gas bellows.

6. A deposition tool, comprising:

an external frame;

a reactor that includes a chamber, a top gas delivery mechanism positioned above and coupled to a top portion of the chamber, and a bottom gas delivery mechanism positioned below and coupled to the chamber, wherein the top gas delivery mechanism is attached to the external frame at an attachment point; and

a support system coupling together the external frame and the reactor, wherein the support system comprises;

a horizontally oriented platform positioned below the bottom gas delivery system, thereby providing support to the reactor;

an attachment mechanism attached to the external frame;

at least one gas bellows positioned between the platform and the attachment mechanism; and

a pressure regulating mechanism coupled to the gas bellows and configured to automatically regulate gas pressure inside the gas bellows to move the platform to allow the attachment point to remain at a same position while the chamber expands or contracts due to temperature changes.

7. The deposition tool of claim 6, wherein the pressure regulating mechanism regulates the pressure within the gas bellows by allowing pressurized gas to enter or exit the gas bellows.

8. The deposition tool of claim 7, wherein the pressurized gas includes inert gas.

9. The deposition tool of claim 6, wherein the horizontally oriented platform is in direct contact with the bottom gas delivery mechanism.

10. The deposition tool of claim 6, wherein the attachment mechanism includes a mount bracket comprising a vertical surface and a horizontal surface, wherein the vertical surface is mounted to the external frame, and wherein the horizontal surface is coupled to the gas bellows.

11. The deposition tool of claim 6, wherein the chamber is made of a material that includes quartz, and wherein the gas delivery mechanisms are made of a material that includes metal.