Gyro sensor and electronic apparatus

• US 9,243,908 B2
• Filed: 04/01/2013
• Issued: 01/26/2016
• Est. Priority Date: 04/02/2012
• Status: Active Grant

• Current Assignee: Seiko Epson Corporation (Seiko Group)
• Original Assignee: Seiko Epson Corporation (Seiko Group)
• Inventors: Kanemoto, Kei
• Primary Examiner(s): Chapman, Jr., John
• Application Number:
  US13/854,269
• Publication Number:
  US 20130255378A1
• Time in Patent Office: 1,030 Days
• Field of Search: 735/041.2
• US Class Current: 1/1
• CPC Class Codes: G01C 19/56 Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
• CPC Class Codes: G01C 19/5747 each sensing mass being connected to a driving mass, e.g. driving frames
• CPC Class Codes: G01C 19/5769 Manufacturing; Mounting; Housings

Abstract

A gyro sensor includes: a vibrating body; a first fixed drive electrode that is disposed, in plan view, on a first direction side crossing a driving vibration direction of the vibrating body and vibrates the vibrating body; a second fixed drive electrode that is disposed, in plan view, on the side opposite to the first direction side and vibrates the vibrating body; a fixed detection electrode that detects a signal changing according to angular velocity of the vibrating body; a first drive wiring that is connected with the first fixed drive electrode and extends toward one side in the driving vibration direction; a second drive wiring that is connected with the second fixed drive electrode and extends toward the one side in the driving vibration direction; and a detection wiring that is connected with the fixed detection electrode and extends toward the side opposite to the one side.

Claims

1. A gyro sensor comprising:

a vibrating body that performs drive-vibration along a driving vibration direction, the vibrating body having first through fourth sides;

first and second fixed drive electrodes that are disposed at the first side of the vibrating body so as to be spaced apart from the first side in a plan view;

third and fourth fixed drive electrodes that are disposed at the second side opposite to the first side of the vibrating body so as to be spaced apart from the second side in the plan view;

first and second detection electrodes that detect a signal changing according to angular velocity of the vibrating body;

first and second drive wirings that are connected to the first and second fixed drive electrodes, respectively, the first and second drive wirings being disposed at the first side and the third side of the vibrating body so as to be spaced apart from the first and third sides;

third and fourth drive wirings that are connected to the third and fourth fixed drive electrodes, respectively, the third and fourth drive wirings being disposed at the second side and the third side of the vibrating body so as to be spaced apart from the second and third sides; and

first and second detection wirings that are connected to the first and second detection electrodes, respectively, the first and second detection wirings being disposed at the fourth side opposite to the third side of the vibrating body so as to extend from the fourth side.

2. The gyro sensor according to claim 1, wherein

the first and second drive wirings extend along the first side and the third side of the vibrating body.

3. The gyro sensor according to claim 2, wherein

the first and second drive wirings and the third and fourth drive wirings are respectively connected to each other.

4. The gyro sensor according to claim 3, wherein

each of the first through fourth drive wirings and each of the first and second detection wirings does not cross each other.

5. The gyro sensor according to claim 2, wherein

each of the first through fourth drive wirings and each of the first and second detection wirings does not cross each other.

6. The gyro sensor according to claim 1, wherein

the first and second drive wirings and the third and fourth drive wirings are respectively connected to each other.

7. The gyro sensor according to claim 6, wherein

each of the first through fourth drive wirings and each of the first and second detection wirings does not cross each other.

8. The gyro sensor according to claim 1, wherein

each of the first through fourth drive wirings and each of the first and second detection wirings does not cross each other.

9. The gyro sensor according to claim 1, further comprising a first movable drive electrode that extends from the first side of the vibrating body and a second movable drive electrode that extends from the second side of the vibrating body, wherein

the first and second fixed drive electrodes are disposed to face the first movable electrode, and

the third and fourth fixed drive electrodes are disposed to face the second movable drive electrode.

10. The gyro sensor according to claim 1, further comprising:

a displacement portion that is connected to the vibrating body via a spring portion; and

a movable detection electrode that extends from the displacement portion, wherein

the first and second fixed detection electrodes are disposed to face the movable detection electrode.

11. The gyro sensor according to claim 1, wherein

the vibrating body is in a frame-like shape, and

the first and second fixed detection electrodes are disposed inside of an outer periphery of the vibrating body in the plan view.

12. An electronic apparatus comprising:

the gyro sensor according to claim 1, and

a display that display an image.

13. The gyro sensor according to claim 1, wherein

the first and second detection wirings further extends in a direction along the fourth side of the vibrating body.