Resonant photo acoustic system

• US 9,243,998 B2
• Filed: 06/15/2012
• Issued: 01/26/2016
• Est. Priority Date: 07/07/2011
• Status: Active Grant

• Current Assignee: Honeywell International Inc.
• Original Assignee: Honeywell International Inc.
• Inventors: Avramescu, Viorel, Gologanu, Mihai, Youngner, Daniel, Carlson, Bob Jon
• Primary Examiner(s): Larkin, Daniel S
• Assistant Examiner(s): Campbell, Irving A
• Application Number:
  US13/524,407
• Publication Number:
  US 20130008230A1
• Time in Patent Office: 1,320 Days
• Field of Search: 73/240.2
• US Class Current: 1/1
• CPC Class Codes: G01N 2021/1704 in gases
• CPC Class Codes: G01N 2021/1708 with piezotransducers
• CPC Class Codes: G01N 21/1702 with opto-acoustic detection, e.g. for gases or analysing solids

Abstract

A device includes a resonator having an oscillating portion with dimensions chosen to lead to a desired resonant frequency. A light source is positioned to provide light along the length of the oscillating portion at a specific wave length. A detector detects a change in oscillation of the resonator responsive to the wave pressure produced by the light source heating a gas. The light source is modulated with a frequency the same as the resonant frequency of the resonator.

Claims

1. A device comprising:

a resonator having an oscillating portion formed as a single-prong suspended beam having a supported end;

a light source to provide light along a length of the oscillating portion, the light being directed toward the supported end; and

a detector to detect a change in oscillation of the resonator responsive to the light source heating a gas, wherein the detector comprises a piezoelectric layer split into two adjacent portions along the length of the single-prong suspended beam supported by a ground electrode, and further comprises a pair of electrodes extending along the lengths of and coupled to respective adjacent portions of the piezoelectric layer, wherein one electrode is positioned to collect positive electrical charges from one portion of the piezoelectric layer and the other electrode is positioned to collect negative electrical charges from the other portion of the piezoelectric layer, such that the adjacent portions along the length of the single-prong suspended beam prevent charge compensation.

2. The device of claim 1 wherein the resonator comprises a micro electromechanical systems (MEMS) single-prong suspended beam oscillator formed of silicon.

3. The device of claim 1 wherein the light source comprises an optical fiber to couple to a laser.

4. The device of claim 3 further comprising a lens to focus light from the optical fiber to minimize dispersion of the light along the length of the resonator.

5. The device of claim 1 wherein the resonator is formed of silicon.

6. The device of claim 1 wherein the light is tuned to a resonant frequency of the resonator and to a selected absorption line of the gas to be detected.

7. A method comprising:

providing light adjacent to a length of a micro electromechanical systems (MEMS) cantilever single-prong suspended beam resonant oscillator, the light being provided along the single-prong suspended beam toward a supported end of the beam;

exposing a gas to be detected to the light to create a pressure wave; and

detecting oscillation of the single-prong suspended beam resonant oscillator responsive to the pressure wave via a detector having a piezoelectric layer split into two adjacent portions supported by a ground electrode, along the length of the single-prong suspended beam resonant oscillator and further comprising a pair of electrodes extending along the lengths of and coupled to respective adjacent portions of the piezoelectric layer, wherein one electrode is positioned to collect positive electrical charges from one portion of the piezoelectric layer and the other electrode is positioned to collect negative electrical charges from the other portion of the piezoelectric layer, such that the adjacent portions along the length of the single-prong suspended beam resonant oscillator prevent charge compensation.

8. The method of claim 7 wherein the light has a frequency corresponding to a resonant frequency of the single-prong suspended beam resonant oscillator and to an absorption line of the gas to be detected.

9. The method of claim 8 and further including performing calibration of the single-prong suspended beam resonant oscillator by:

driving the single-prong suspended beam resonant oscillator via one of the electrodes and corresponding portion of the piezoelectric layer; and

sensing movement of the single-prong suspended beam resonant oscillator via the other one of the electrodes and corresponding other portion of the piezoelectric layer.

10. The method of claim 7 and further comprising focusing the light along the length of the single-prong suspended beam resonant oscillator such that the light does not significantly disperse.

11. The method of claim 7 wherein the single-prong suspended beam resonant oscillator is formed of silicon.

12. The method of claim 7 wherein the light source comprises an optical fiber to couple to a laser.

13. The method of claim 7 and further comprising subtracting signals on the electrodes from each other to provide an output signal representative of the movement of the single-prong suspended beam resonant oscillator.

14. A sensor comprising:

a device wafer formed of silicon;

a microelectricalmechanical single crystal cantilevered single-prong beam resonator released from the silicon on insulator device wafer and having a single-prong beam oscillating portion with dimensions chosen to lead to a desired resonant frequency;

an optical fiber light source to provide light along the length of the oscillating single-prong beam portion in a cavity formed in the device wafer, the light having a frequency tuned to a resonant frequency of the resonator and to an absorption line of a gas to be detected, and wherein the light is directed toward a supported portion of the cantilevered single-prong beam;

a handle wafer supporting the device wafer and the optical fiber light source; and

a transducer to detect a change in oscillation of the single-prong beam resonator responsive to the light source heating the gas, wherein the transducer comprises a piezoelectric layer split into two adjacent portions supported by a ground electrode, along the length of the single-prong beam resonator and further comprising a pair of electrodes extending along the lengths of and coupled to respective adjacent portions of the piezoelectric layer, wherein one electrode is positioned to collect positive electrical charges from one portion of the piezoelectric layer and the other electrode is positioned to collect negative electrical charges from the other portion of the piezoelectric layer, such that the adjacent portions along the length of the single-prong beam of the resonator prevent charge compensation.