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Gas sensor

  • US 9,244,031 B2
  • Filed: 07/24/2012
  • Issued: 01/26/2016
  • Est. Priority Date: 08/16/2011
  • Status: Active Grant
First Claim
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1. A gas sensor on a semiconductor substrate, the gas sensor comprising:

  • an elongate sensor element extending across an opening and having first and second opposed surfaces exposed for contact with a gas to be sensed, wherein the first surface faces away from a major surface of the substrate, wherein the second surface faces toward said major surface, and wherein an electrical conductivity of the elongate sensor element is sensitive to at least one of a composition and a concentration of said gas to be sensed; and

    a support structure directly exposed to the opening, and attached to the first surface of the sensor element at regular intervals over the opening, such that over the opening the sensor element is not continuously attached to the support structure, wherein a majority of the first surface of the sensor element remains available for gas contact while attached to the support structure.

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