Gas sensor

• US 9,244,031 B2
• Filed: 07/24/2012
• Issued: 01/26/2016
• Est. Priority Date: 08/16/2011
• Status: Active Grant

• Current Assignee: NXP B.V. (NXP Semiconductors NV)
• Original Assignee: NXP B.V. (NXP Semiconductors NV)
• Inventors: Humbert, Aurelie, Tio Castro, David
• Primary Examiner(s): Caputo, Lisa
• Assistant Examiner(s): Roy, Punam
• Application Number:
  US13/557,042
• Publication Number:
  US 20130042669A1
• Time in Patent Office: 1,281 Days
• US Class Current: 1/1
• CPC Class Codes: G01N 27/128 Microapparatus

Abstract

A gas sensor on a semiconductor substrate. The gas sensor includes an elongate sensor element extending across an opening and has first and second opposed surfaces exposed for contact with a gas to be sensed. The first surface faces away from a major surface of the substrate. The second surface faces toward said major surface. The electrical conductivity of the elongate sensor element is sensitive to a composition and/or concentration of said gas to which the opposed first and second surfaces are exposable. The gas sensor further includes a support structure arranged to increase the mechanical robustness of the gas sensor by supporting the elongate sensor element in the opening.

Claims

1. A gas sensor on a semiconductor substrate, the gas sensor comprising:

an elongate sensor element extending across an opening and having first and second opposed surfaces exposed for contact with a gas to be sensed, wherein the first surface faces away from a major surface of the substrate, wherein the second surface faces toward said major surface, and wherein an electrical conductivity of the elongate sensor element is sensitive to at least one of a composition and a concentration of said gas to be sensed; and

a support structure directly exposed to the opening, and attached to the first surface of the sensor element at regular intervals over the opening, such that over the opening the sensor element is not continuously attached to the support structure, wherein a majority of the first surface of the sensor element remains available for gas contact while attached to the support structure.

2. The gas sensor of claim 1, wherein the support structure comprises at least one elongate strut extending across the opening.

3. The gas sensor of claim 1, wherein the elongate sensor element is arranged in a meander line.

4. The gas sensor of claim 3, wherein the support structure comprises at least one elongate strut extending across the opening and wherein the at least one elongate strut extends substantially perpendicular to a long axis of the meander line.

5. The gas sensor of claim 1, wherein at least part of the support structure extends outwardly from the substrate to support the sensor element at the first surface.

6. The gas sensor of claim 1, wherein the sensor element is suspended from the support structure above the semiconductor substrate.

7. The gas sensor of claim 1, wherein the support structure comprises a patterned layer on the semiconductor substrate.

8. The gas sensor of claim 1, wherein the support structure comprises any of SiC, SiN, SiO2, Si, GeO2, GeN and a polymer.

9. The gas sensor of claim 1, wherein the sensor element is metallic.

10. The gas sensor of claim 9, wherein the sensor element comprises one of Cu, Al, W, WC, TiN, TaN, Ti, Ta, Pt, Ag and Au.

11. A semiconductor device comprising a plurality of sensors integrated in one of a semiconductor die and a package, wherein at least one of the plurality of sensors comprises the gas sensor according to claim 1.

12. The gas sensor of claim 1, wherein the gas sensor is configured for use in a radio frequency identification (RFID) tag.

13. The gas sensor of claim 1, wherein the gas sensor is configured for use in a mobile communications device.

14. The gas sensor of claim 1, wherein the gas sensor is configured for use in a heating, ventilation and air conditioning (HVAC) system.

15. A gas sensor on a semiconductor substrate, the gas sensor comprising:

an elongate sensor element extending across an opening and having first and second opposed surfaces exposed for contact with a gas to be sensed, wherein the first surface faces away from a major surface of the substrate, wherein the second surface faces toward said major surface, and wherein an electrical conductivity of the elongate sensor element is sensitive to at least one of a composition and a concentration of said gas to be sensed; and

a support structure attached to the second surface of the sensor element and extending outwardly from the substrate towards the second surface, such that over the opening the sensor element is not continuously attached to the support structure, wherein a majority of the second surface of the sensor element remains available for gas contact while attached to the support structure.