Physical quantity sensor and electronic apparatus
First Claim
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1. A physical quantity sensor comprising:
- a substrate;
an oscillating member that is disposed over the substrate;
a support portion that supports the oscillating member and that is disposed along a first axis; and
a detection electrode that is disposed on the substrate and that is disposed to oppose the oscillating member,wherein the oscillating member has a side face intersecting a second axis perpendicular to the first axis in a plane, andwherein a protrusion protruding in the plane is formed on at least a part of the side face.
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Abstract
A physical quantity sensor includes a substrate, an oscillating member that is disposed over the substrate, support portions that support the oscillating member and that are disposed along a first axis, and detection electrodes that are disposed on the substrate so as to oppose the oscillating member. The oscillating member has a pair of side faces intersecting a second axis perpendicular to the first axis in a plane, and a protrusion is formed on at least one of the pair of side faces.
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Citations
11 Claims
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1. A physical quantity sensor comprising:
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a substrate; an oscillating member that is disposed over the substrate; a support portion that supports the oscillating member and that is disposed along a first axis; and a detection electrode that is disposed on the substrate and that is disposed to oppose the oscillating member, wherein the oscillating member has a side face intersecting a second axis perpendicular to the first axis in a plane, and wherein a protrusion protruding in the plane is formed on at least a part of the side face. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. An electronic apparatus comprising a physical quantity sensor including:
- a substrate;
an oscillating member that is disposed over the substrate;
a support portion that supports the oscillating member and that is disposed along a first axis; and
a detection electrode that is disposed on the substrate and that is disposed to oppose the oscillating member, wherein the oscillating member has a side face intersecting a second axis perpendicular to the first axis in a plane, and wherein a protrusion protruding in the plane is formed on at least a part of the side face.
- a substrate;
Specification