Micromachined monolithic 3-axis gyroscope with single drive
First Claim
1. An inertial measurement system, comprising:
- a device layer including a single proof-mass 3-axis gyroscope formed in an x-y plane, the single proof-mass 3-axis gyroscope including;
a main proof-mass section suspended about a single, central anchor, the main proof-mass section including a radial portion extending outward towards an edge of the 3-axis gyroscope sensor;
a central suspension system configured to suspend the 3-axis gyroscope from the single, central anchor;
a drive electrode including a moving portion and a stationary portion, the moving portion coupled to the radial portion, wherein the drive electrode and the central suspension system are configured to oscillate the 3-axis gyroscope about a z-axis normal to the x-y plane at a drive frequency;
symmetrical x-axis proof-mass sections configured to move anti-phase along the x-axis in response to z-axis angular motion; and
a z-axis gyroscope coupling flexure bearing configured to couple the x-axis proof mass sections and to resist in-phase motion between the x-axis proof mass sections;
a cap wafer bonded to a first surface of the device layer; and
a via wafer bonded to a second surface of the device layer, wherein the cap wafer and the via wafer are configured to encapsulate the single proof-mass 3-axis gyroscope.
7 Assignments
0 Petitions
Accused Products
Abstract
This document discusses, among other things, a cap wafer and a via wafer configured to encapsulate a single proof-mass 3-axis gyroscope formed in an x-y plane of a device layer. The single proof-mass 3-axis gyroscope can include a main proof-mass section suspended about a single, central anchor, the main proof-mass section including a radial portion extending outward towards an edge of the 3-axis gyroscope sensor, a central suspension system configured to suspend the 3-axis gyroscope from the single, central anchor, and a drive electrode including a moving portion and a stationary portion, the moving portion coupled to the radial portion, wherein the drive electrode and the central suspension system are configured to oscillate the 3-axis gyroscope about a z-axis normal to the x-y plane at a drive frequency.
-
Citations
17 Claims
-
1. An inertial measurement system, comprising:
-
a device layer including a single proof-mass 3-axis gyroscope formed in an x-y plane, the single proof-mass 3-axis gyroscope including; a main proof-mass section suspended about a single, central anchor, the main proof-mass section including a radial portion extending outward towards an edge of the 3-axis gyroscope sensor; a central suspension system configured to suspend the 3-axis gyroscope from the single, central anchor; a drive electrode including a moving portion and a stationary portion, the moving portion coupled to the radial portion, wherein the drive electrode and the central suspension system are configured to oscillate the 3-axis gyroscope about a z-axis normal to the x-y plane at a drive frequency; symmetrical x-axis proof-mass sections configured to move anti-phase along the x-axis in response to z-axis angular motion; and a z-axis gyroscope coupling flexure bearing configured to couple the x-axis proof mass sections and to resist in-phase motion between the x-axis proof mass sections; a cap wafer bonded to a first surface of the device layer; and a via wafer bonded to a second surface of the device layer, wherein the cap wafer and the via wafer are configured to encapsulate the single proof-mass 3-axis gyroscope. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
-
-
14. A micromachined, monolithic inertial sensor apparatus, comprising:
-
a single proof-mass 3-axis gyroscope formed in an x-y plane of a device layer, the single proof-mass 3-axis gyroscope including; a main proof-mass section suspended about a single, central anchor, the main proof-mass section including a radial portion extending outward towards an edge of the 3-axis gyroscope; a central suspension system configured to suspend the 3-axis gyroscope from the single, central anchor; a drive electrode including a moving portion and a stationary portion, the moving portion coupled to the radial portion, wherein the drive electrode and the central suspension system are configured to oscillate the 3-axis gyroscope about a z-axis normal to the x-y plane at a drive freguency; symmetrical x-axis proof-mass sections configured to move anti-phase along the x-axis in response to z-axis angular motion; and a z-axis gyroscope coupling flexure bearing configured to couple the x-axis proof mass sections and to resist in-phase motion between the x-axis proof mass sections. - View Dependent Claims (15, 16, 17)
-
Specification