Vibrating element, vibrator, oscillator, electronic apparatus, and moving object
First Claim
1. A vibrating element comprising:
- a drive vibrating portion configured to perform a drive mode; and
a detection vibrating portion configured to perform first and second detection modes in which the detection vibrating portion vibrates in a direction orthogonal to a vibration direction of the drive vibrating portion in the drive mode, whereinwhen a resonance frequency in the drive mode is fa, a resonance frequency in the first detection mode is fb, and a resonance frequency in the second detection mode is fc, the fa falls between the fb and the fc, andin first through third frequency-temperature characteristic curves representing the drive, first detection and second detection modes, respectively, when a turnover temperature of the first frequency-temperature characteristic curve of the fa is Ta [°
C.], a turnover temperature of the second frequency-temperature characteristic curve of the fb is Tb [°
C.], and a turnover temperature of the third frequency-temperature characteristic curve of the fc is Tc [°
C.], the Ta is lower than the Tb and the Tc, or the Ta is higher than the Tb and the Tc.
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Accused Products
Abstract
A vibrating element has a drive mode, and first and second detection modes in which the vibrating element vibrates in a direction orthogonal to a vibration direction in the drive mode. In frequency-temperature characteristic curves representing a change in frequency due to a change in temperature in the respective modes with a horizontal axis representing an ambient temperature and a vertical axis representing a change in frequency, when a turnover temperature of the frequency-temperature characteristic curve in the drive mode is Ta [° C.], a turnover temperature of the frequency-temperature characteristic curve in the first detection mode is Tb [° C.], and a turnover temperature of the frequency-temperature characteristic curve in the second detection mode is Tc [° C.], Ta is lower than Tb and Tc, or Ta is higher than Tb and Tc.
11 Citations
10 Claims
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1. A vibrating element comprising:
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a drive vibrating portion configured to perform a drive mode; and a detection vibrating portion configured to perform first and second detection modes in which the detection vibrating portion vibrates in a direction orthogonal to a vibration direction of the drive vibrating portion in the drive mode, wherein when a resonance frequency in the drive mode is fa, a resonance frequency in the first detection mode is fb, and a resonance frequency in the second detection mode is fc, the fa falls between the fb and the fc, and in first through third frequency-temperature characteristic curves representing the drive, first detection and second detection modes, respectively, when a turnover temperature of the first frequency-temperature characteristic curve of the fa is Ta [°
C.], a turnover temperature of the second frequency-temperature characteristic curve of the fb is Tb [°
C.], and a turnover temperature of the third frequency-temperature characteristic curve of the fc is Tc [°
C.], the Ta is lower than the Tb and the Tc, or the Ta is higher than the Tb and the Tc. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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Specification