Optical projection array exposure system

• US 9,250,509 B2
• Filed: 06/04/2013
• Issued: 02/02/2016
• Est. Priority Date: 06/04/2012
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Markle, David, Laidig, Thomas, Kaskey, Jeffrey, Chen, Jang Fung
• Primary Examiner(s): Whitesell Gordon, Steven H
• Application Number:
  US13/909,076
• Publication Number:
  US 20130321786A1
• Time in Patent Office: 973 Days
• US Class Current: 1/1
• CPC Class Codes: G03B 27/42 for automatic sequential copying of the same original G03B27/34, G03B27/53 take precedence
• CPC Class Codes: G03F 7/7015 Details of optical elements
• CPC Class Codes: G03F 7/70291 Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices

Abstract

A spatial light modulator imaging system is disclosed. The system comprises an illumination module configured to provide illumination light representing data patterns to be imaged by the spatial light modulator imaging system, a projection module configured to project the illumination light to a substrate, and an illumination-projection beam separator coupled between the illumination module and the projection module, where the illumination-projection beam separator is configured to receive the illumination light along an illumination optical axis and transmit the illumination light received to the projection module along a projection optical axis, and where the illumination optical axis and the projection optical axis are substantially parallel to each other.

Claims

1. A spatial light modulator imaging system, comprising:

an illumination module configured to provide illumination light representing data patterns to be imaged by the spatial light modulator imaging system;

a projection module configured to project the illumination light to a substrate, wherein the projection module comprises at least one of;

a one-to-one magnification projection system for providing a one-to-one magnification projection of the data patterns; and

a six-to-one magnification reduction system for providing a six-to-one magnification reduction of the data patterns; and

an illumination-projection beam separator coupled between the illumination module and the projection module, wherein the illumination-projection beam separator is configured to receive the illumination light along an illumination optical axis and transmit the illumination light received to the projection module along a projection optical axis, wherein the illumination optical axis and the projection optical axis are substantially parallel to each other, wherein the one-to-one magnification projection system and the six-to-one magnification reduction system share the same illumination module and illumination-projection beam separator, and wherein the illumination module comprises;

a plurality of laser diodes configured to generate the illumination light;

a plurality of fiber bundles configured to transmit the illumination light to the illumination-projection beam separator; and

a kaleido configured to hold the plurality of fiber bundles.

2. The spatial light modulator imaging system of claim 1, wherein the illumination module is configured to be telecentric with respect to the illumination light, and the projection module is configured to be telecentric with respect to the substrate.

3. The spatial light modulator imaging system of claim 1, wherein the illumination-projection beam separator comprises:

a first prism configured to receive the illumination light along the illumination optical axis;

a second prism configured to transmit the illumination light along the projection optical axis;

an air gap separating the first prism and the second prism; and

a beam orientation adjustor located adjacent to the first prism, the beam orientation adjustor is configured to adjust the illumination light to enter a digital micro-mirror device (DMD) located adjacent to the second prism at a predetermined incidence angle relative to a normal of the DMD and the predetermined incidence angle is substantially equal to twice of an angle of tilt of the DMD.

4. The spatial light modulator imaging system of claim 3, wherein the first prism comprises:

a first right angle prism, wherein the first right angle prism includes a first surface configured to receive the illumination light at approximately normal incidence;

a second surface configured to receive the illumination light at approximately a 45 degree angle and to cause the illumination light to be substantially reflected at the second surface; and

a third surface coupled to the beam orientation adjustor, wherein the third surface and the beam orientation adjustor are configured to cause the illumination light to pass through the second surface and the air gap at the predetermined incidence angle.

5. The spatial light modulator imaging system of claim 3, wherein the second prism comprises:

a second right angle prism, wherein the second right angle prism includes a first surface configured to receive the illumination light from the first prism;

a second surface configured to pass the illumination light to the DMD and receive the illumination light reflected from the DMD, wherein the first surface is further configured to substantially reflect the illumination light reflected from the DMD; and

a third surface configured to transmit the illumination light reflected from the first surface along the projection optical axis.

6. The spatial light modulator imaging system of claim 3, wherein the air gap has a dimension in a range of 0.015 millimeter to 0.015 millimeter.

7. The spatial light modulator imaging system of claim 1, further comprising:

a camera module configured to monitor focus and alignment of the spatial light modulator imaging system, and to check micro-mirror on-off behavior, wherein the camera module is configured to be telecentric with respect to the substrate.

8. A method of forming a spatial light modulator imaging system, comprising:

providing an illumination module, wherein the illumination module is configured to provide illumination light representing data patterns to be imaged by the spatial light modulator imaging system;

providing a projection module, wherein the projection module is configured to project the illumination light to a substrate, and wherein providing the projection module comprises at least one of;

projecting the data patterns at a one-to-one magnification via a one-to-one magnification system; and

projecting the data patterns at a six-to-one magnification reduction via a six-to-one magnification reduction system; and

providing an illumination-projection beam separator coupled between the illumination module and the projection module, wherein the illumination-projection beam separator is configured to receive the illumination light along an illumination optical axis and transmit the illumination light received to the projection module along a projection optical axis, wherein the illumination optical axis and the projection optical axis are substantially parallel to each other, wherein the one-to-one magnification system and the six-to-one magnification reduction system share the same illumination module and illumination-projection beam separator, and wherein the providing the illumination module comprises;

generating the illumination light by a plurality of laser diodes;

transmitting the illumination light to the illumination-projection beam separator using a plurality of fiber bundles; and

holding the plurality of fiber bundles using a kaleido.

9. The method of claim 8, wherein the illumination module is configured to be telecentric with respect to the illumination light, and the projection module is configured to be telecentric with respect to the substrate.

10. The method of claim 8, wherein providing the illumination-projection beam separator comprises:

providing a first prism, a beam orientation adjustor, a digital micro-mirror device (DMD), and a second prism, wherein the beam orientation adjustor is located adjacent to the first prism, the beam orientation adjustor is configured to adjust the illumination light to enter the DMD located adjacent to the second prism at a predetermined incidence angle relative to a normal of the DMD, and the predetermined incidence angle is substantially equal to twice of an angle of tilt of the DMD;

separating the first prism and the second prism with an air gap;

receiving the illumination light along the illumination optical axis using the first prism;

controlling the illumination light to pass through the first prism, the beam orientation adjustor, the air gap, the DMD, and the second prism; and

transmitting the illumination light along the projection optical axis using the second prism.

11. The method of claim 10, wherein the first prism comprises:

a first right angle prism, wherein the first right angle prism includes a first surface configured to receive the illumination light at approximately normal incidence;

a second surface configured to receive the illumination light at approximately 45 degree angle and to cause the illumination light to be substantially reflected at the second surface; and

a third surface coupled to the beam orientation adjustor, wherein the third surface and the beam orientation adjustor are configured to cause the illumination light to pass through the second surface and the air gap at the predetermined incidence angle.

12. The method of claim 10, wherein the second prism comprises:

a second right angle prism, wherein the second right angle prism includes a first surface configured to receive the illumination light from the first prism;

a second surface configured to pass the illumination light to the DMD and receive the illumination light reflected from the DMD, wherein the first surface is further configured to substantially reflect the illumination light reflected from the DMD; and

a third surface configured to transmit the illumination light reflected from the first surface along the projection optical axis.

13. The method of claim 10, wherein the air gap has a dimension in a range of 0.005 millimeter to 0.015 millimeter.

14. The method of claim 8, further comprising:

monitoring focus and alignment of the spatial light modulator imaging system using a camera module; and

checking micro-mirror on-off behavior using the camera module, wherein the camera module is configured to be telecentric with respect to the substrate.

15. A spatial light modulator imaging system, comprising:

an illumination module configured to provide illumination light representing data patterns to be imaged by the spatial light modulator imaging system;

a projection module configured to project the illumination light to a substrate; and

an illumination-projection beam separator coupled between the illumination module and the projection module, wherein the illumination-projection beam separator is configured to receive the illumination light along an illumination optical axis and transmit the illumination light received to the projection module along a projection optical axis, wherein the illumination optical axis and the projection optical axis are substantially parallel to each other, and wherein the illumination-projection beam separator comprises;

a first prism configured to receive the illumination light along the illumination optical axis;

a second prism configured to transmit the illumination light along the projection optical axis;

an air gap separating the first prism and the second prism; and

a beam orientation adjustor located adjacent to the first prism, the beam orientation adjustor is configured to adjust the illumination light to enter a digital micro-mirror device (DMD) located adjacent to the second prism at a predetermined incidence angle relative to a normal of the DMD and the predetermined incidence angle is substantially equal to twice of an angle of tilt of the DMD, and wherein the beam orientation adjustor comprises at least one of;

a wedge mirror, wherein the wedge mirror having a thickness of approximately 4.67 millimeters at a first end, having a thickness of approximately 2.18 millimeters at a second end, and having a slope of approximately 5.47°

; and

a reflective grating coating, wherein the reflective grating coating is an inorganic MgF2 coating, having a thickness of larger than ten times of a corresponding exposure wavelength of the spatial light modulator imaging system.

16. A method of forming a spatial light modulator imaging system, comprising:

providing an illumination module, wherein the illumination module is configured to provide illumination light representing data patterns to be imaged by the spatial light modulator imaging system;

providing a projection module, wherein the projection module is configured to project the illumination light to a substrate; and

providing an illumination-projection beam separator coupled between the illumination module and the projection module, wherein the illumination-projection beam separator is configured to receive the illumination light along an illumination optical axis and transmit the illumination light received to the projection module along a projection optical axis, wherein the illumination optical axis and the projection optical axis are substantially parallel to each other, and wherein providing the illumination-projection beam separator comprises;

providing a first prism, a beam orientation adjustor, a digital micro-mirror device (DMD), and a second prism, wherein the beam orientation adjustor is located adjacent to the first prism, the beam orientation adjustor is configured to adjust the illumination light to enter the DMD located adjacent to the second prism at a predetermined incidence angle relative to a normal of the DMD, and the predetermined incidence angle is substantially equal to twice of an angle of tilt of the DMD, and wherein the beam orientation adjustor comprises at least one of;

a wedge mirror, wherein the wedge mirror having a thickness of approximately 4.67 millimeters at a first end, having a thickness of approximately 2.18 millimeters at a second end, and having a slope of approximately 5.47°

; and

a reflective grating coating, wherein the reflective grating coating is an inorganic MgF2 coating, having a thickness of larger than ten times of a corresponding exposure wavelength of the spatial light modulator imaging system;

separating the first prism and the second prism with an air gap;

receiving the illumination light along the illumination optical axis using the first prism;

controlling the illumination light to pass through the first prism, the beam orientation adjustor, the air gap, the DMD, and the second prism; and

transmitting the illumination light along the projection optical axis using the second prism.