Liquid ejecting head and liquid ejecting apparatus
First Claim
Patent Images
1. A liquid ejecting head comprising:
- a pressure chamber forming member that is formed with pressure chambers that communicate with nozzles; and
a piezoelectric element that includes a first electrode, a piezoelectric layer, and a second electrode that are laminated in a position corresponding to an opening portion of each of the pressure chambers in the pressure chamber forming member in a sequence from a side close to the opening portion, wherein the first electrode is disposed on top of a vibration plate of the liquid ejecting head, the piezoelectric layer is disposed on top of the first electrode, and the second electrode is disposed on top of the piezoelectric layer,wherein the opening portion of each of the pressure chambers has a polygonal shape that includes a plurality of corners and sides that connect the corners to each other, andwherein the piezoelectric layer is integrally formed throughout the plurality of pressure chambers in the pressure chamber forming member,wherein a region along the sides from among regions that are interposed between adjacent pressure chambers includes a hollow that penetrates the piezoelectric layer or a hollow where a portion of the piezoelectric layer has been removed such that a thickness of the piezoelectric layer in the hollow is less than a thickness of the portion of the piezoelectric layer that is not part of the hollow, andwherein a region along the corners is thicker than the portion of the piezoelectric layer in the hollow.
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Abstract
A piezoelectric layer is integrally formed in such a way that opening portions of a plurality of pressure chambers in a flow channel forming member are covered. In a region that corresponds to a position between adjacent pressure chambers in the piezoelectric layer, a hollow that penetrates the piezoelectric layer or that has a relatively thin thickness in the piezoelectric layer is formed along the sides of the opening of each of the pressure chambers. The hollow is formed to avoid a region along a corner of the pressure chamber in the region.
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Citations
12 Claims
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1. A liquid ejecting head comprising:
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a pressure chamber forming member that is formed with pressure chambers that communicate with nozzles; and a piezoelectric element that includes a first electrode, a piezoelectric layer, and a second electrode that are laminated in a position corresponding to an opening portion of each of the pressure chambers in the pressure chamber forming member in a sequence from a side close to the opening portion, wherein the first electrode is disposed on top of a vibration plate of the liquid ejecting head, the piezoelectric layer is disposed on top of the first electrode, and the second electrode is disposed on top of the piezoelectric layer, wherein the opening portion of each of the pressure chambers has a polygonal shape that includes a plurality of corners and sides that connect the corners to each other, and wherein the piezoelectric layer is integrally formed throughout the plurality of pressure chambers in the pressure chamber forming member, wherein a region along the sides from among regions that are interposed between adjacent pressure chambers includes a hollow that penetrates the piezoelectric layer or a hollow where a portion of the piezoelectric layer has been removed such that a thickness of the piezoelectric layer in the hollow is less than a thickness of the portion of the piezoelectric layer that is not part of the hollow, and wherein a region along the corners is thicker than the portion of the piezoelectric layer in the hollow. - View Dependent Claims (3, 4, 5, 6, 7, 9, 10, 11, 12)
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2. A liquid ejecting head comprising:
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a pressure chamber forming member that is formed with pressure chambers that communicate with nozzles; and a piezoelectric element that includes a first electrode, a piezoelectric layer, and a second electrode that are laminated in a position corresponding to an opening portion of each of the pressure chambers in the pressure chamber forming member in a sequence from a side close to the opening portion, wherein the first electrode is disposed on top of a vibration plate of the liquid ejecting head, the piezoelectric layer is disposed on top of the first electrode, and the second electrode is disposed on top of the piezoelectric layer, wherein the opening portion of each of the pressure chambers includes a polygonal shape which includes a plurality of corners and sides that connect the corners to each other, wherein the piezoelectric layer is integrally formed throughout the plurality of pressure chambers in the pressure chamber forming member, wherein a region that is interposed between sides from among regions that are interposed between adjacent pressure chambers includes a hollow that penetrates the piezoelectric layer or a hollow where a portion of the piezoelectric layer has been removed such that a thickness of the piezoelectric layer in the hollow is less than a thickness of the portion of the piezoelectric layer that is not part of the hollow, and wherein a region, that is interposed in such a way that the corners are positioned on at least one side, is thicker than the portion of the piezoelectric layer in the hollow. - View Dependent Claims (8)
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Specification