Device manufacturing apparatus and device manufacturing method

• US 9,256,231 B2
• Filed: 09/03/2010
• Issued: 02/09/2016
• Est. Priority Date: 09/10/2009
• Status: Active Grant

• Current Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Original Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Inventors: Yoshida, Tomohiko
• Primary Examiner(s): WILCZEWSKI, MARY A
• Application Number:
  US12/876,038
• Publication Number:
  US 20110059621A1
• Time in Patent Office: 1,985 Days
• Field of Search: 165/287, 438/780, 438/781, 118/50.1, 700/121
• US Class Current: 1/1
• CPC Class Codes: G05D 23/1928 sensing the temperature of one space
• CPC Class Codes: H01L 21/67248 Temperature monitoring

Abstract

An apparatus for manufacturing a device comprises a temperature regulator configured to regulate a temperature of a component associated with manufacture of the device, a controller configured to control the temperature regulator, and a console configured to send command information to the controller upon receiving an input regarding an operation of the temperature regulator, the command information including a command for causing the temperature regulator to operate in an electric power saving mode, and a parameter which specifies a detail of the electric power saving mode.

Claims

1. An apparatus for manufacturing a device, comprising:

a plurality of temperature regulators each of which is configured to regulate a temperature of a component associated with manufacture of the device;

a controller configured to control the plurality of temperature regulators; and

a console configured to send command information to the controller upon receiving an input regarding start of an electric power saving mode of the plurality of temperature regulators, the command information including a parameter which specifies one of a plurality of electric power saving mode settings each of which is set in advance for the plurality of temperature regulators, and a command for causing the plurality of temperature regulators to operate in one of the plurality of electric power saving mode settings, which is selected by the parameter, the console being configured to provide a user interface to determine the parameter in accordance with input from the user interface, the console being configured such that the plurality of electric power saving mode settings are set, in accordance with input from the user interface, to be different from each other in at least one of i) a temperature regulator, to be shifted to an electric power saving state, of the plurality of temperature regulators, ii) whether temperature regulation by a temperature regulator, to be shifted to an electric power saving state, of the plurality of temperature regulators stops, and iii) whether a target temperature of temperature regulation by a temperature regulator, to be shifted to an electric power saving state, of the plurality of temperature regulators is changed.

2. An apparatus according to claim 1, wherein

the plurality of temperature regulators includes temperature regulators including a primary temperature regulator configured to regulate a temperature of a cooling medium, and a secondary temperature regulator configured to regulate a temperature of the cooling medium whose temperature has been regulated by the primary temperature regulator, and

the command information includes a parameter which indicates, as the target temperature, a target temperature of temperature regulation by the primary temperature regulator in the electric power saving mode closer to a target temperature of temperature regulation by the secondary temperature regulator in a non-electric power saving mode than to a target temperature of temperature regulation by the primary temperature regulator in the non-electric power saving mode.

3. An apparatus according to claim 2, wherein the primary temperature regulator includes a heat exchanger, and the secondary temperature regulator includes a heater.

4. An apparatus according to claim 1, wherein the device manufacturing apparatus is configured as an exposure apparatus for exposing a substrate to radiant energy.

5. An apparatus according to claim 1, wherein the command information includes a parameter which indicates the target temperature.

6. An apparatus according to claim 1, wherein the command information includes a parameter which indicates a temperature regulator temperature regulation by which is stopped.

7. An apparatus according to claim 1, wherein the console is configured to select one of a plurality of electric power saving modes, with respect to each of the plurality of temperature regulators, in accordance with input from the user interface so as to set in advance each of the plurality of electric power saving mode settings.

8. An apparatus for manufacturing a device, comprising:

a plurality of temperature regulators each of which is configured to regulate a temperature of a component associated with manufacture of the device;

a controller configured to control the plurality of temperature regulators; and

a console configured to send command information to the controller upon receiving an input regarding start of an electric power saving mode of the plurality of temperature regulators, the command information including a parameter which specifies one of a plurality of electric power saving mode settings each of which is set in advance for the plurality of temperature regulators, and a command for causing the plurality of temperature regulators to operate in one of the plurality of electric power saving mode settings, which is selected by the parameter, the console being configured to provide a user interface to determine the parameter in accordance with input from the user interface, the console being configured such that the plurality of electric power saving mode settings are set, in accordance with input from the user interface, to be different from each other in whether a target temperature of temperature regulation by a temperature regulator, to be shifted to an electric power saving state, of the plurality of temperature regulators is changed.