Through-hole via inductor in a high-frequency device
First Claim
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1. A high-frequency device, comprising:
- a substrate, comprising a first through-hole therein;
a horizontal inductor having a first inductance, disposed on the substrate; and
a first through-hole via inductor having a second inductance, disposed in the first through-hole of the substrate, wherein the first through-hole via inductor is formed by disposing a conductive pillar structure in the first through-hole of the substrate, wherein the top surface of the conductive pillar structure forms a first terminal of the first through-hole via inductor and the bottom surface of the conductive pillar structure forms a second terminal of the first through-hole via inductor, wherein the first through-hole via inductor is not a part of a spiral coil and one of the terminals of first through-hole via inductor is electrically connected to the horizontal inductor, wherein the second inductance of the first through-hole via inductor is greater than the first inductance of the horizontal inductor.
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Abstract
The invention discloses a high-frequency device having a through-hole via inductor in a substrate. The through-hole via inductor has an integral body. The inductance of the through-hole via inductor is greater than that of the horizontal inductor. The through-hole via inductor comprises at least two materials, wherein one of said at least two materials is a conductive material. The present invention also discloses a method for manufacturing the structure of the high-frequency device, wherein the method mainly includes via-drilling and via-filling in the substrate, and lithography process on the substrate.
8 Citations
20 Claims
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1. A high-frequency device, comprising:
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a substrate, comprising a first through-hole therein; a horizontal inductor having a first inductance, disposed on the substrate; and a first through-hole via inductor having a second inductance, disposed in the first through-hole of the substrate, wherein the first through-hole via inductor is formed by disposing a conductive pillar structure in the first through-hole of the substrate, wherein the top surface of the conductive pillar structure forms a first terminal of the first through-hole via inductor and the bottom surface of the conductive pillar structure forms a second terminal of the first through-hole via inductor, wherein the first through-hole via inductor is not a part of a spiral coil and one of the terminals of first through-hole via inductor is electrically connected to the horizontal inductor, wherein the second inductance of the first through-hole via inductor is greater than the first inductance of the horizontal inductor. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 16, 17, 18)
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14. A high-frequency device, comprising:
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a substrate having a first through-hole, a second through-hole, a third through-hole and a fourth through-hole therein; a first U-shape through-hole via inductor, comprising; a first through-hole via inductor having a first inductance, wherein the first through-hole via inductor is formed by disposing a first conductive pillar structure in the first through-hole of the substrate; a second through-hole via inductor having a second inductance, wherein the second through-hole via inductor is formed by disposing a second conductive pillar structure in the second through-hole of the substrate; and a first horizontal inductor having a third inductance, disposed on the top surface of the substrate, wherein the first horizontal inductor has a first terminal and a second terminal, wherein the first terminal is electrically connected to the first through-hole via inductor, and the second terminal is electrically connected to the second through-hole via inductor, wherein the sum of the first inductance and the second inductance is greater than the third inductance; and a second U-shape through-hole via inductor, comprising; a third through-hole via inductor having a fourth inductance, wherein the third through-hole via inductor is formed by disposing a third conductive pillar structure in the third through-hole of the substrate; a fourth through-hole via inductor having a fifth inductance, wherein the fourth through-hole via inductor is formed by disposing a fourth conductive pillar structure in the fourth through-hole of the substrate; and a second horizontal inductor having a sixth inductance, disposed on the top surface of the substrate, wherein the second horizontal inductor has a third terminal and a fourth terminal, wherein the third terminal is electrically connected to the third through-hole via inductor, and the fourth terminal is electrically connected to the fourth through-hole via inductor, wherein the sum of the fourth inductance and the fifth inductance is greater than the sixth inductance; wherein each of the first U-shape through-hole via inductor and the second U-shape through-hole via inductor is not a part of a spiral coil. - View Dependent Claims (15)
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19. A high-frequency device, comprising:
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a substrate, comprising a first through-hole therein; a first through-hole via inductor, wherein the first through-hole via inductor is formed by disposing a conductive pillar structure in the first through-hole of the substrate, wherein the top surface of the conductive pillar structure forms a first terminal of the first through-hole via inductor and the bottom surface of the conductive pillar structure forms a second terminal of the first through-hole via inductor, wherein the first through-hole via inductor is not a part of a spiral coil. - View Dependent Claims (20)
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Specification