Hybrid polymer networks as ultra low ‘k’ dielectric layers
First Claim
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1. A polymeric material, comprising:
- a network of polydimethylsiloxane (PDMS) polymers; and
at least one polyhedral oligomericsilsequioxane (POSS) molecule chemically coupled to at least one PDMS polymer,wherein the polymeric material has a porosity in a range from about 15% to about 80%,wherein a molar ratio of the at least one POSS molecule to the at least one PDMS molecule is in a range from about 8;
1 to about 1;
1,wherein the at least one POSS molecule is represented by Rn(SiO1.5)n, wherein n is an even integer from 6 to 16, wherein at least one of the Rn groups is a reactive functional group for co-polymerization, wherein the reactive functional group is selected from the group consisting of;
a carboxylic acid halide, a sulphonic acid ester, a nitrile, a sulphonic acid, a sulphonic acid halide, a phosphine, and combinations thereof.
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Abstract
According to one embodiment, a polymeric material includes at least one polydimethylsiloxane (PDMS) polymer, and at least one polyhedral oligomericsilsequioxane (POSS) molecule. According to another embodiment, a method includes providing at least one polydimethylsiloxane (PDMS) polymer, providing at least one polyhedral oligomericsilsequioxane (POSS) molecule, and coupling the at least one PDSM polymer to the at least one POSS molecule to form a hybrid polymeric material.
15 Citations
19 Claims
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1. A polymeric material, comprising:
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a network of polydimethylsiloxane (PDMS) polymers; and at least one polyhedral oligomericsilsequioxane (POSS) molecule chemically coupled to at least one PDMS polymer, wherein the polymeric material has a porosity in a range from about 15% to about 80%, wherein a molar ratio of the at least one POSS molecule to the at least one PDMS molecule is in a range from about 8;
1 to about 1;
1,wherein the at least one POSS molecule is represented by Rn(SiO1.5)n, wherein n is an even integer from 6 to 16, wherein at least one of the Rn groups is a reactive functional group for co-polymerization, wherein the reactive functional group is selected from the group consisting of;
a carboxylic acid halide, a sulphonic acid ester, a nitrile, a sulphonic acid, a sulphonic acid halide, a phosphine, and combinations thereof. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 11, 12, 13, 14, 15, 16, 17)
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9. A polymeric material, comprising:
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a network of polydimethylsiloxane (PDMS) polymers; at least one polyhedral oligomericsilsequioxane (POSS) molecule chemically coupled to at least one of the PDMS polymers, wherein the at least one POSS molecule is present in an amount from about 10% to about 40% by weight, wherein the at least one POSS molecule comprises at least one reactive functional group selected from the group consisting of;
a carboxylic acid halide, a sulphonic acid ester, a nitrile, a sulphonic acid, a sulphonic acid halide, a phosphine, and combinations thereof; anda third material coupled to at least one of the PDMS polymers, wherein the third material comprises at least one of an inorganic aerogel and a zeolite.
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10. A polymeric material, comprising:
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a network of polydimethylsiloxane (PDMS) polymers; and a plurality of POSS molecules covalently coupled to the network, wherein each POSS molecule comprises a reactive functional group, wherein the reactive functional group of at least two of the POSS molecules is different from the reactive functional group of at least another of the POSS molecules, wherein at least one of the POSS molecules is represented by Rn(SiO1.5)n, wherein n is an even integer from 6 to 16, wherein at least one of the Rn groups is a reactive functional group for co-polymerization, wherein the reactive functional group is selected from the group consisting of;
a carboxylic acid halide, a sulphonic acid ester, a nitrile, a sulphonic acid, a sulphonic acid halide, a phosphine, and combinations thereof,wherein the polymeric material has a porosity in a range from about 15% to about 80%. - View Dependent Claims (18, 19)
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Specification