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Uncooled microbolometer detector and array for terahertz detection

  • US 9,261,411 B2
  • Filed: 12/19/2012
  • Issued: 02/16/2016
  • Est. Priority Date: 12/19/2012
  • Status: Active Grant
First Claim
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1. An uncooled microbolometer detector comprising:

  • a substrate;

    a platform held above the substrate by a support structure;

    at least one thermistor provided on the platform; and

    an optical absorber extending on the platform over and in thermal contact with the at least one thermistor, the optical absorber comprising a first electrically conductive layer patterned to form a capacitive structure operating as a low-pass spectral filter and a second electrically conductive layer patterned to form an inductive structure operating as a high-pass spectral filter, the capacitive structure and the inductive structure together forming a resonant structure defining an absorption spectrum of the optical absorber, the optical absorber being exposed to electromagnetic radiation and absorbing the electromagnetic radiation according to the absorption spectrum.

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