Prism-coupling systems and methods for characterizing large depth-of-layer waveguides

• US 9,261,429 B2
• Filed: 05/08/2015
• Issued: 02/16/2016
• Est. Priority Date: 05/21/2014
• Status: Active Grant

• Current Assignee: Corning Incorporated
• Original Assignee: Corning Incorporated
• Inventors: Li, Shenping, Roussev, Rostislav Vatchev
• Primary Examiner(s): Punnoose, Roy M
• Application Number:
  US14/707,431
• Publication Number:
  US 20150338308A1
• Time in Patent Office: 284 Days
• Field of Search: 356/32
• US Class Current: 1/1
• CPC Class Codes: G01B 11/22 for measuring depth
• CPC Class Codes: G01J 4/02 Polarimeters of separated-field type; Polarimeters of half-shadow type
• CPC Class Codes: G01J 4/04 Polarimeters using electric detection means G01J4/02 takes precedence
• CPC Class Codes: G01L 1/24 by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
• CPC Class Codes: G01M 11/3181 Reflectometers dealing with polarisation
• CPC Class Codes: G01N 2021/4126 Index of thin films
• CPC Class Codes: G01N 21/23 Bi-refringence
• CPC Class Codes: G01N 21/41 Refractivity; Phase-affecting properties, e.g. optical path length G01N21/21 takes precedence
• CPC Class Codes: G01N 21/8422 Investigating thin films, e.g. matrix isolation method
• CPC Class Codes: G02B 5/04 Prisms

Abstract

Prism-coupling systems and methods for characterizing large depth-of-layer waveguides are disclosed. The systems and methods utilize a coupling prism having a coupling angle α having a maximum coupling angle α_max at which total internal reflection occurs. The prism angle α is in the range 0.81α_max≦α≦0.99α_max. This configuration causes the more spaced-apart lower-order mode lines to move closer together and the more tightly spaced higher-order mode lines to separate. The adjusted mode-line spacing allows for proper sampling at the detector of the otherwise tightly spaced mode lines. The mode-line spacings of the detected mode spectra are then corrected via post-processing. The corrected mode spectra are then processed to obtain at least one characteristic of the waveguide.

Claims

1. A measurement system for measuring at least one mode spectrum of a waveguide formed in a top surface of a substrate and having a depth-of-layer (DOL) of greater than 50 microns, the system comprising:

a coupling prism having an input surface, an output surface and a coupling surface, a refractive index n_p, and a prism angle α

between the output surface and the coupling surface, and wherein the coupling surface interfaces with the waveguide at the substrate top surface, thereby defining a substrate-prism interface;

a light source system configured to illuminate the substrate-prism interface through the input surface of the prism, thereby forming reflected light that includes mode lines of the at least one mode spectrum having a first size, wherein the reflected light exits the output surface of the coupling prism;

a photodetector system having a detector and arranged to receive the reflected light from the coupling prism and detect the at least one mode spectrum on the detector; and

a controller configured to process the detected at least one mode spectrum to correct a distortion of the mode lines caused by refraction of the reflected light at the output surface of the coupling prism to a corrected mode spectrum having a second size; and

wherein the coupling prism has a maximum prism angle α

_max equal to the critical angle at greater than which the reflected light is totally internally reflected at the output surface of the prism, and wherein the prism angle α

is in the range 0.81α

_max≦

α

≦

0.99α

_max, and wherein the first size is substantially the same as the second size.

2. The measurement system according to claim 1, wherein the prism angle α

is in the range 0.90α

_max≦

α

≦

0.99α

_max.

3. The measurement system according to claim 2, wherein the prism angle α

is in the range 0.95α

_max≦

α

≦

0.99α

_max.

4. The measurement system according to claim 1, wherein the at least one mode spectrum includes a TE mode spectrum and a TM mode spectrum.

5. The measurement system according to claim 1, wherein the detector includes a first section that detects the TE mode spectrum and a second section that detects the TM mode spectrum.

6. The measurement system according to claim 1, wherein the prism angle α

is greater than 90°

.

7. The measurement system according to claim 1, wherein the coupling prism has a flat top surface.

8. A method of measuring mode spectra of a waveguide formed in a top surface of a substrate having a depth-of-layer (DOL) greater than 50 μ

m, comprising;

interfacing a coupling prism with the substrate to form a substrate-prism interface, the coupling prism having a coupling prism angle defined by an output surface and that is in the range 0.81α

_max≦

α

≦

0.99α

_max, wherein α

_max defines a maximum coupling prism angle associated with total internal reflection occurring within the coupling prism;

directing light through the coupling prism to the substrate-prism interface to form reflected light that mode lines of at least one mode spectrum of the waveguide, wherein the reflected light exits the output surface of the coupling prism;

detecting the mode lines of the at least one mode spectrum of the reflected light that exits the coupling prism, wherein the mode lines have an adjusted mode-line spacing due to refraction of the reflected light at the output surface of the coupling prism; and

correcting the adjusted mode-line spacing after said detecting.

9. The method according to claim 8, wherein the prism angle α

is in the range 0.90α

_max≦

α

≦

0.99α

_max.

10. The method according to claim 9, wherein the prism angle α

is in the range 0.95α

_max≦

α

≦

0.99α

_max.

11. The method according to claim 8, wherein the prism angle α

is greater than 90°

.

12. The method according to claim 8, further including determining at least one characteristic of the waveguide based on the corrected mode-line spacing.

13. The method according to claim 12, wherein the at least one characteristic of the waveguide includes one or more of:

surface stress, stress profile, compressive stress, the DOL, refractive index profile and birefringence.

14. The method according to claim 8, wherein the at least one mode spectrum has a first size, and wherein said correcting the adjusted mode-line spacing after said detecting forms an adjusted mode spectrum having a second size that is substantially the same as the first size.

15. The method according to claim 8, wherein the at least one mode spectrum consists of a TE mode spectrum and a TM mode spectrum.

16. The method according to claim 8, including forming waveguide by a double ion-diffusion (DIOX) process.

17. A method of measuring mode spectra of a waveguide formed in a top surface of a substrate by double ion diffusion to a depth-of-layer (DOL) greater than 50 μ

m, comprising;

interfacing a coupling prism with the waveguide, the coupling prism having an input surface, an output surface, a coupling surface that interfaces the top surface to define a substrate-prism interface, the coupling prism having a coupling prism angle α

defined by the coupling surface and the output surface, and a maximum prism angle α

_max that corresponds to a total-internal-reflection angle at the output surface, wherein the coupling prism angle is in the range 0.81α

_max≦

α

≦

0.99α

_max;

directing light through the input surface to the substrate-prism interface, thereby forming reflected light that includes higher-order and lower-order mode lines of the mode spectra, wherein the reflected light exits the coupling prism at the output surface and is made incident upon a detector;

detecting with the detector the higher-order and lower-order mode lines of the mode spectra, wherein the mode lines have an adjusted mode spacing due to refraction of the reflected light at the output surface of the coupling prism; and

after said detecting, correcting the adjustment in the mode-line spacing.

18. The method according to claim 17, further including determining at least one characteristic of the waveguide based on the corrected mode-line spacing.

19. The method according to claim 18, wherein the at least one characteristic of the waveguide includes one or more of:

surface stress, stress profile, compressive stress, the DOL, refractive index profile and birefringence.

20. The method according to claim 17, wherein the coupling prism angle α

is in the range 0.90α

_max≦

α

≦

0.99α

_max.