Low offset spinning current hall plate and method to operate it

• US 9,261,572 B2
• Filed: 09/08/2014
• Issued: 02/16/2016
• Est. Priority Date: 02/08/2011
• Status: Active Grant

• Current Assignee: Infineon Technologies AG
• Original Assignee: Infineon Technologies AG
• Inventors: Ausserlechner, Udo
• Primary Examiner(s): LEDYNH, BOT L
• Application Number:
  US14/479,448
• Publication Number:
  US 20150168508A1
• Time in Patent Office: 526 Days
• Field of Search: 324/251
• US Class Current: 1/1
• CPC Class Codes: G01R 33/075 Hall devices configured for spinning current measurements
• CPC Class Codes: H10N 52/101 Semiconductor Hall-effect devices

Abstract

One embodiment of the present invention relates to a method and apparatus for removing the effect of contact resistances for Hall effect device contacts. In one embodiment, the apparatus comprises a Hall effect device comprising a plurality of force and sense contact pairs. The force and sense contact pairs comprise a force contact and a separate and distinct sense contact. The force contact is configured to act as a supply terminal that receive an input signal while the sense contact is configured act as an output terminal to provide an output signal indicative of a measured magnetic field value. By utilizing separate contacts for inputting a signal (e.g., an applied current) and reading out a signal (e.g., an induced voltage) the non-linearities generated by contact resistances may be removed, thereby minimizing the zero point offset voltage of the measured magnetic field.

Claims

1. A Hall effect device configured to detect a magnetic field perpendicular to a substrate, comprising:

a first even number of sense contacts having centers symmetrically disposed around a center point at distinct angular positions separated by angles equal to 360°

divided by the first even number, and comprising a first sense contact pair disposed along a first line and a second sense contact pair disposed along a second line intersecting and substantially perpendicular to the first line, wherein the first sense contact pair and the second sense contact pair are configured to respectively provide an electrical potential from the Hall effect device;

a second even number of force contacts equal to the first even number of sense contacts, and having centers symmetrically disposed around the center point at the distinct angular positions, wherein the second even number of force contacts comprise a first force contact pair and a second force contact pair, wherein the first force contact pair and the second force contact pair are configured to respectively provide an electrical current to the Hall effect device; and

wherein the second line extends between the first sense contact pair and between the first force contact pair.

2. The Hall effect device of claim 1,

wherein the first force contact pair is disposed along the first line;

and

wherein the second force contact pair is disposed along the second line.

3. The Hall effect device of claim 1,

wherein the first sense contact pair and the second sense contact pair are located within one or more doped tubs disposed within a substrate.

4. The Hall effect device of claim 1, wherein the first sense contact pair and the second sense contact pair comprise sense contacts that have smaller surface area than force contacts of the first force contact pair and the second force contact pair.

5. The Hall effect device of claim 1,

where a first space between sense contacts of the first sense contact pair is smaller than a second space between force contacts of the first force contact pair;

and

where a third space between sense contacts of the second sense contact pair is smaller than a fourth space between force contacts of the second force contact pair.

6. The Hall effect device of claim 1, further comprising:

a plurality of feedback circuits coupled to the first and second force contact pairs and to the first and second sense contact pairs, wherein the plurality of feedback circuits are configured to regulate a voltage potential at sense contacts of the first and second sense contact pairs.

7. The Hall effect device of claim 1,

wherein the first force contact pair and the second sense contact pair comprise a first sense contact and a second sense contact disposed along the first line at positions between a first force contact and a second force contact;

and

wherein the second force contact pair and the second sense contact pair comprise a third sense contact and a fourth sense contact disposed along the second line at positions between a third force contact and a fourth force contact.

8. A Hall effect device, comprising:

a first force contact configured to convey a first current and a second force contact configured to convey a second current different than the first current;

a first sense contact and a second sense contact disposed along a first line, wherein the first sense contact and the second sense contact are separated by a first distance that is smaller than a second distance separating the first force contact and the second force contact;

a third force contact configured to convey a third current and a fourth force contact configured to convey a fourth current different than the third current; and

a third sense contact and a fourth sense contact disposed along a second line intersecting the first line, wherein the third sense contact and the fourth sense contact are separated by a third distance that is smaller than a fourth distance separating the third force contact and the fourth force contact;

wherein the sense contacts are configured to respectively provide an electric potential.

9. The Hall effect device of claim 8, further comprising:

one or more feedback circuits coupled to one or more of the force and sense contacts, respective feedback circuits configured to generate a feedback signal that controls a voltage potential at a coupled sense contact,

wherein the one or more feedback circuits comprise a high impedance feedback circuit input node coupled to one or more sense contacts and a feedback circuit output node coupled to one or more force contacts.

10. The Hall effect device of claim 9, wherein respective feedback circuits, comprise:

a transconductance input stage having a first input node configured to receive an input signal from the one or more sense contacts, a second input node configured to receive a reference signal, and an output node configured to output a current proportional to a voltage difference between the first and second input nodes; and

a current controlled current source configured to receive the output signal and to generate a feedback current based thereupon that is provided to the one or more force contacts associated with the one or more sense contacts.

11. The Hall effect device of claim 9,

wherein the one or more feedback circuits comprise a first feedback circuit coupled to the first force contact and the first sense contact, and a second feedback circuit coupled to the second force contact and the second sense contact,

wherein the first and second feedback circuits are configured to generate first and second feedback currents that establish a first and second potentials at the first sense contact and at the second sense contact.

12. The Hall effect device of claim 11,

wherein the one or more feedback circuits further comprise a third feedback circuit coupled to the third force contact and the third sense contact, and a fourth feedback circuit coupled to the fourth force contact and the fourth sense contact,

wherein the third and fourth feedback circuits are configured to generate third and fourth feedback currents that establish an equal voltage potential at third and fourth sense contacts, and wherein the difference between the third and fourth feedback currents is essentially linearly dependent of a magnetic field acting on the Hall effect device.

13. The Hall effect device of claim 11, further comprising

a differential feedback circuit coupled to spatially opposed pairs of force and sense contacts, the differential feedback circuit having an input configured to receive a voltage potential difference between sense contacts of the spatially opposed pairs and an output configured to provide a differential feedback current that reduces the potential difference between the sense contacts of the spatially opposed pairs.

14. The Hall effect device of claim 11, further comprising:

a common-mode feedback circuit coupled to spatially opposed pairs of force and sense contacts, the common-mode feedback circuit having an input configured to receive a summation of the voltage potential at sense contacts of the spatially opposed pairs and further having an output configured to provide a common-mode feedback current that drives a potential difference between the sense contacts of the spatially opposed pairs to be equal to the sum of the voltage potential at the sense contacts of the spatially opposed pairs divided by two.

15. The Hall effect device of claim 9, wherein the one or more feedback circuits comprise:

a dedicated source-feedback circuit configured to generate a first voltage potential at the first sense contact of the Hall effect device;

a dedicated sink-feedback circuit configured to generate a second voltage potential at the second sense contact, wherein the second voltage potential is smaller than the first voltage potential;

a differential feedback circuit configured to generate a voltage potential of substantially zero on the third and fourth sense contacts;

a common-mode feedback circuit configured to generate a common-mode voltage potential on the third sense contact and the fourth sense contact, which is smaller than the first voltage potential and larger than the second voltage potential; and

a switch matrix configured to connect the one or more of feedback circuits to the force and sense contacts according to a sequence of clock cycles.

16. The Hall effect device of claim 9, further comprising:

an adaptive control unit configured to control reference potentials associated with the one or more feedback circuits using an adaptive control technique, wherein respective feedback circuits of the Hall effect device drive the voltage potential at coupled force and sense contacts to the associated reference potential.

17. A Hall effect device, comprising:

a first sense contact pair disposed along a first line at a first position between a first force contact and a second force contact;

a second sense contact pair disposed along a second line, intersecting the first line, at a second position between a third force contact and a fourth force contact;

wherein respective force contacts are configured to provide electrical energy to the Hall effect device and respective sense contacts are configured to provide an output signal from the Hall effect device; and

wherein the Hall effect device has a first number of the force contacts that is the same as a second number of the sense contacts.

18. The Hall effect device of claim 17,

wherein only two force contacts and two sense contacts intersect the first line;

and

wherein only two force contacts and two sense contacts intersect the second line.

19. The Hall effect device of claim 17,

wherein the first sense contact pair and the second sense contact pair are located within one or more doped tubs disposed within a substrate.