Zinc oxide anti-reflection layer having a syringe-like structure and method for fabricating the same
First Claim
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1. A zinc oxide anti-reflection layer having a syringe-like structure, comprising:
- a plurality of zinc oxide lower portions, wherein the zinc oxide lower portions have a nanorod array structure, wherein adjacent zinc oxide lower portions are spaced apart from each other; and
a plurality of zinc oxide upper portions, each connected to one of the plurality of zinc oxide lower portions to form a syringe-like structure;
wherein each of the zinc oxide lower portions has a diameter gradually decreasing from bottom to top, and each of the zinc oxide upper portions has a diameter gradually decreasing from bottom to top, and wherein a step is formed between each zinc oxide upper portion and zinc oxide lower portion.
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Abstract
The disclosure provides a zinc oxide anti-reflection layer having a syringe-like structure and method for fabricating the same. The zinc oxide anti-reflection layer includes: a zinc oxide lower portion, wherein the zinc oxide lower portion has a nanorod array structure; and a zinc oxide upper portion connected to the zinc oxide lower portion, wherein the zinc oxide anti-reflection layer has a syringe-like structure.
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Citations
18 Claims
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1. A zinc oxide anti-reflection layer having a syringe-like structure, comprising:
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a plurality of zinc oxide lower portions, wherein the zinc oxide lower portions have a nanorod array structure, wherein adjacent zinc oxide lower portions are spaced apart from each other; and a plurality of zinc oxide upper portions, each connected to one of the plurality of zinc oxide lower portions to form a syringe-like structure; wherein each of the zinc oxide lower portions has a diameter gradually decreasing from bottom to top, and each of the zinc oxide upper portions has a diameter gradually decreasing from bottom to top, and wherein a step is formed between each zinc oxide upper portion and zinc oxide lower portion. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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Specification