Etching method and apparatus

• US 9,263,283 B2
• Filed: 09/25/2012
• Issued: 02/16/2016
• Est. Priority Date: 09/28/2011
• Status: Active Grant

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: Sekine, Takayuki, Sasaki, Masaru, Matsumoto, Naoki, Shinpuku, Eiichirou
• Primary Examiner(s): Olsen, Allan
• Assistant Examiner(s): Klunk, Margaret D
• Application Number:
  US14/227,972
• Publication Number:
  US 20140302684A1
• Time in Patent Office: 1,239 Days
• Field of Search: None
• US Class Current: 1/1
• CPC Class Codes: H01J 37/32192 Microwave generated discharge H01J37/32357, H01J37/32366, H01J37/32394, H01J37/32403 take precedence
• CPC Class Codes: H01J 37/3222 Antennas
• CPC Class Codes: H01J 37/3244 Gas supply means
• CPC Class Codes: H01L 21/0337 characterised by the process involved to create the mask, e.g. lift-off masks, sidewalls, or to modify the mask, e.g. pre-treatment, post-treatment
• CPC Class Codes: H01L 21/3065 Plasma etching; Reactive-ion etching
• CPC Class Codes: H01L 21/31116 by dry-etching
• CPC Class Codes: H01L 21/31144 using masks
• CPC Class Codes: H01L 21/67069 for drying etching

Abstract

An etching method and apparatus for etching a silicon oxide film selectively with respect to a silicon nitride film formed on a substrate are provided. A processing gas containing a plasma excitation gas and a CHF-based gas is introduced into a processing chamber such that a flow rate ratio of the CHF-based gas to the plasma excitation gas is 1/15 or higher. By generating a plasma in the processing chamber, the silicon oxide film is etched selectively with respect to the silicon nitride film formed on the substrate in the processing chamber.

Claims

1. An etching method comprising:

loading a substrate into a processing chamber, the substrate including a silicon nitride film, polycrystalline silicon patterns formed on the silicon nitride film and a silicon oxide film formed on a surface of the silicon nitride film and top surfaces and side surfaces of the polycrystalline silicon patterns;

introducing a processing gas containing (i) a plasma excitation gas, (ii) a carbon and fluorine containing gas consisting of a CHF₃ gas, and (iii) an oxygen gas into the processing chamber, wherein a flow rate ratio of the carbon and fluorine containing gas to the plasma excitation gas is 1/15 or higher and a flow rate ratio of the oxygen gas to the carbon and fluorine containing gas is 1/10 or less; and

etching the silicon oxide film formed on the top surfaces of the polycrystalline silicon patterns and the surface of the silicon nitride film in the processing chamber by using a plasma of the processing gas in the processing chamber while depositing a protective film containing carbon and fluorine obtained by dissociation of the carbon and fluorine containing gas on the surface of the silicon nitride film exposed during etching the silicon oxide film, wherein the silicon nitride film is etched by said etching 4 nm or less in depth,

wherein the plasma is generated by microwaves supplied by using a radial line slot antenna.

2. The etching method of claim 1, wherein an etching selectivity of the silicon oxide film with respect to the silicon nitride film is equal to or greater than 1.

3. The etching method of claim 1, wherein a flow rate of the plasma excitation gas is equal to or greater than 200 sccm.

4. The etching method of claim 1, further comprising removing the polycrystalline silicon patterns to produce spacers formed of the remaining silicon oxide film after said etching.

5. The etching method of claim 1, comprising applying an RF bias power for attracting ions of the plasma toward the substrate, wherein the RF bias power ranges from 70 W to 100 W.