Method for making light emitting diodes
First Claim
1. A method for making a light emitting diode, comprising the following steps:
- providing a substrate having a first surface;
forming a first semiconductor pre-layer on the first surface of the substrate;
forming a plurality of first three-dimensional structures on a first semiconductor pre-layer surface at a distance away from the substrate, to form a first semiconductor layer;
forming an active layer and a second semiconductor pre-layer on the first semiconductor layer in order;
applying a patterned mask layer on a second semiconductor pre-layer surface, wherein the patterned mask layer comprises a plurality of linear walls aligned side by side, and a groove is defined between each adjacent linear walls to form an exposed portion of the second semiconductor pre-layer surface;
etching the exposed portion and removing the patterned mask layer to form a second plurality of three-dimensional structures, wherein the second plurality of three-dimensional structures are linear protruding structures, and a cross-section of each linear protruding structure is an arc;
removing the substrate to form an exposed first semiconductor layer surface located away from the active layer;
covering the exposed first semiconductor layer surface by a first electrode; and
electrically connecting a second electrode with the second semiconductor pre-layer.
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Accused Products
Abstract
A method for making a LED comprises following steps. A substrate having a surface is provided. A first semiconductor layer, an active layer and a second semiconductor pre-layer is formed on the surface of the substrate. A patterned mask layer is applied on a surface of the second semiconductor pre-layer. A number of three-dimensional nano-structures is formed on the second semiconductor pre-layer and the patterned mask layer is removed. The substrate is removed and a first electrode is formed on a surface of the first semiconductor layer away from the active layer. A second electrode is formed to electrically connect with the second semiconductor pre-layer.
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Citations
19 Claims
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1. A method for making a light emitting diode, comprising the following steps:
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providing a substrate having a first surface; forming a first semiconductor pre-layer on the first surface of the substrate; forming a plurality of first three-dimensional structures on a first semiconductor pre-layer surface at a distance away from the substrate, to form a first semiconductor layer; forming an active layer and a second semiconductor pre-layer on the first semiconductor layer in order; applying a patterned mask layer on a second semiconductor pre-layer surface, wherein the patterned mask layer comprises a plurality of linear walls aligned side by side, and a groove is defined between each adjacent linear walls to form an exposed portion of the second semiconductor pre-layer surface; etching the exposed portion and removing the patterned mask layer to form a second plurality of three-dimensional structures, wherein the second plurality of three-dimensional structures are linear protruding structures, and a cross-section of each linear protruding structure is an arc; removing the substrate to form an exposed first semiconductor layer surface located away from the active layer; covering the exposed first semiconductor layer surface by a first electrode; and electrically connecting a second electrode with the second semiconductor pre-layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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Specification