Cryopump

• US 9,266,038 B2
• Filed: 02/08/2012
• Issued: 02/23/2016
• Est. Priority Date: 02/09/2011
• Status: Active Grant

• Current Assignee: Edwards Vacuum, LLC (Atlas Copco AB)
• Original Assignee: Brooks Automation Incorporated (Azenta, Inc.)
• Inventors: Syssoev, Sergei, Bartlett, Allen J., Casello, John J., Wells, Jeffrey A., Eacobacci, Michael J. Jr.
• Primary Examiner(s): Ali, Mohammad M
• Application Number:
  US13/983,973
• Publication Number:
  US 20130312431A1
• Time in Patent Office: 1,476 Days
• Field of Search: 62/555, 62/506, 62/511, 298/880.2
• US Class Current: 1/1
• CPC Class Codes: B01D 8/00 Cold traps; Cold baffles pumps for evacuating by condensing or freezing F04B37/08
• CPC Class Codes: F04B 37/08 by condensing or freezing, e.g. cryogenic pumps
• CPC Class Codes: Y10T 29/49236 Fluid pump or compressor making

Abstract

A cryopump has a simple-to-manufacture frontal baffle plate with improved gas distribution and has a large-area second-stage array plate to capture Type II gases. The cryopump has a first-stage frontal baffle plate having orifices and flaps bent from and attached to the orifices. The cryopump has a second-stage top plate that is larger in area than cooling baffles of the second stage array.

Claims

1. A cryopump, comprising:

a first stage frontal baffle plate arranged in an opening of the cryopump to substantially cover the opening, the frontal baffle plate having a plurality of orifices, each orifice having a flap that is bent from and attached to the frontal baffle plate at an edge of the orifice, each flap arranged in a path that passes through the frontal baffle plate.

2. The cryopump of claim 1 wherein each of the plurality of orifices is rectangle shaped.

3. The cryopump of claim 1 wherein each of the plurality of orifices is circle shaped.

4. The cryopump of claim 1 wherein the flap is substantially the same size and the same shape as the orifice.

5. The cryopump of claim 1 wherein the flap is bent at an angle of between 10°

and 60°

with respect to the frontal baffle plate.

6. The cryopump of claim 1 wherein the flap is bent at an angle of between 25°

and 35°

with respect to the frontal baffle plate.

7. The cryopump of claim 1 wherein the flap is bent at an angle of between 35°

and 45°

with respect to the frontal baffle plate.

8. The cryopump of claim 1 wherein the edge of each orifice at which its respective flap is attached is an edge closest to the center of the frontal baffle plate.

9. The cryopump of claim 1 further comprising a second stage array, the second stage array having:

a plurality of cooling baffles, the plurality of cooling baffles thermally coupled to a second stage of a refrigerator, at least a portion of at least one cooling surface coated with an adsorbent material; and

a top plate thermally coupled to the second stage of the refrigerator and arranged between the frontal baffle plate and the plurality of cooling baffles, the top plate extending beyond the plurality of cooling baffles as viewed from the frontal baffle.

10. The cryopump of claim 9 wherein the top plate extends beyond the plurality of cooling baffles to covers between 50% and 98% of a cross-sectional area of a radiation shield of the cryopump.

11. A frontal baffle plate for a cryopump, comprising:

a metal plate that substantially covers an opening to a cryopump when the metal plate is installed in the cryopump; and

a plurality of orifices distributed on the metal plate, each orifice having a flap that is bent from and attached to the frontal baffle plate at an edge of the orifice, each flap arranged in a path that passes through the frontal baffle plate.

12. The frontal baffle plate of claim 11 wherein the metal plate has at least one path from near the center of the metal plate to an outside edge of the metal plate in which none of the plurality of orifices are distributed.

13. The frontal baffle plate of claim 11 wherein each of the plurality of orifices is rectangle shaped.

14. The frontal baffle plate of claim 11 wherein each of the plurality of orifices is circle shaped.

15. The frontal baffle plate of claim 11 wherein the flap is substantially the same size and the same shape as the orifice.

16. The frontal baffle plate of claim 11 wherein the flap is bent at an angle of between 10°

and 60°

with respect to the metal plate.

17. The frontal baffle plate of claim 11 wherein the flap is bent at an angle of between 25°

and 35°

with respect to the metal plate.

18. The frontal baffle plate of claim 11 wherein the flap is bent at an angle of between 35°

and 45°

with respect to the metal plate.

19. The frontal baffle of claim 11 wherein the edge of each orifice at which its respective flap is attached is an edge closest to the center of the frontal baffle plate.

20. A method of making a frontal baffle plate for a cryopump, comprising:

providing a metal plate;

creating a plurality of orifices in the metal plate, wherein at least a portion of metal from the metal plate at each orifice remains attached to the metal plate at an edge of the orifice; and

bending the portion of metal about the edge at an angle relative to the surface of the metal plate.

21. The method of claim 20 wherein creating at least one orifice in the metal plate comprises creating a circular orifice.

22. The method of claim 20 wherein creating at least one orifice in the metal plate comprises creating a rectangular orifice.

23. The method of claim 20 wherein the portion of metal is attached to an edge of the orifice that is closest to the center of the metal plate.

24. The method of claim 20 wherein creating the plurality of orifices includes arranging the plurality of orifices on the metal plate such that at least one path from the center of the plate to an edge of the plate has no orifices.

25. The method of claim 20 wherein creating the plurality of orifices includes at least one of laser cutting, water jet cutting, mechanical cutting, etching, and stamping.