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Cryopump

  • US 9,266,038 B2
  • Filed: 02/08/2012
  • Issued: 02/23/2016
  • Est. Priority Date: 02/09/2011
  • Status: Active Grant
First Claim
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1. A cryopump, comprising:

  • a first stage frontal baffle plate arranged in an opening of the cryopump to substantially cover the opening, the frontal baffle plate having a plurality of orifices, each orifice having a flap that is bent from and attached to the frontal baffle plate at an edge of the orifice, each flap arranged in a path that passes through the frontal baffle plate.

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