Absolute position encoder scale having plates alternating with varying recesses

• US 9,267,819 B2
• Filed: 06/12/2014
• Issued: 02/23/2016
• Est. Priority Date: 06/12/2014
• Status: Active Grant

• Current Assignee: Mitutoyo Corporation
• Original Assignee: Mitutoyo Corporation
• Inventors: Cook, Ted Staton
• Primary Examiner(s): Koval, Melissa
• Assistant Examiner(s): NGUYEN, TRUNG Q
• Application Number:
  US14/303,266
• Publication Number:
  US 20150362336A1
• Time in Patent Office: 621 Days
• Field of Search: 32420711-20725, 324/200, 324/234, 324/235, 324/238, 324/240, 324256-258, 324/500, 324/600
• US Class Current: 1/1
• CPC Class Codes: G01B 3/205 provided with a counter for digital indication of the measured dimension
• CPC Class Codes: G01D 5/20 by varying inductance, e.g. by a movable armature
• CPC Class Codes: G01D 5/2275 by a movable non-ferromagnetic conductive element

Abstract

An absolute position encoder scale is provided having scale elements (e.g., plates and plate abatement features such as recesses) which alternate along the scale pattern. At least one of the scale elements has a characteristic (e.g., a recess depth) that is varied along the scale pattern to provide a different respective eddy current response. A signal portion of a read head is responsive to the respective eddy currents to output absolute position signals. For the plate abatement features, the characteristic that may be varied may be a recess depth, an amount of a non-conductive area, an amount of a recessed area, etc. As a varying depth example, the scale may be formed from a bulk material (e.g., aluminum) in which progressively deeper recessed depths are cut along the scale. For plate features, the characteristic that may be varied may include a plate height, an amount of a plate area, etc.

Claims

1. A position sensing device usable to measure a position of a first member with respect to a second member along a measuring axis, the position sensing device comprising:

a scale including a portion comprising a scale pattern extending along the measuring axis direction; and

a read head for being moved relative to the scale pattern along the measuring axis direction, the read head comprising an excitation portion that excites the eddy currents in the scale pattern, and a signal portion that outputs position signals that vary depending on the eddy currents;

wherein;

the scale pattern comprises;

a plurality of first scale element zones arranged periodically along the measuring axis direction, wherein the first scale element zones include a first type of scale element; and

a plurality of second scale element zones arranged periodically along the measuring axis direction and interleaved with the plurality of first periodic scale element zones such that the first and second scale element zones repeat periodically along the measuring axis direction according to a scale wavelength P, wherein the second scale element zones include a second type of scale element having a characteristic that is varied in an absolute signal range along the scale pattern to provide a different respective eddy current response in different respective second scale element zones in the absolute signal range; and

the signal portion is responsive to the respective eddy currents to output absolute position signals having a signal characteristic that varies along the absolute signal range to uniquely indicate respective positions along the absolute signal range.

2. The position sensing device of claim 1, wherein the absolute signal range is at least 10×

the scale wavelength P.

3. The position sensing device of claim 1, wherein the first type of scale element comprises a plate feature and the second type of scale element comprises a plate abatement feature.

4. The position sensing device of claim 3, wherein the plate feature is the same in each of the first scale element zones.

5. The position sensing device of claim 3, wherein the plate feature comprises a conductive plate area and the plate abatement feature comprises at least one of a non-conductive area or a recessed area in a conductor.

6. The position sensing device of claim 5, wherein the characteristic of the second type of scale element that is varied in the absolute signal range along the scale pattern comprises at least one of a) the amount of the non-conductive area, b) the amount of the recessed area, or c) the recess depth of the recessed area.

7. The position sensing device of claim 6, wherein at least one characteristic that is varied in the absolute signal range is varied as a linear function along the absolute signal range.

8. The position sensing device of claim 3, wherein the second type of scale element comprises a conductive region and the plate abatement feature is formed in the conductive region.

9. The position sensing device of claim 8, wherein the scale pattern is formed in a scale portion comprising at least one of a printed circuit board, a patterned thin metal sheet including removed areas, a formed thin metal sheet including recesses formed by deformation of the thin metal sheet, or a metal material piece including recesses formed by removal of the metal material.

10. The position sensing device of claim 1, wherein the position sensing device has a maximum measuring range and the absolute signal range extends over the maximum measuring range.

11. The position sensing device of claim 1, wherein the position sensing device has a maximum measuring range and the absolute signal range is designated as a first absolute signal range that extends over a first portion of the maximum measuring range, with a second absolute signal range that is similar to the first absolute signal range extending over a second portion of the maximum measuring range, and the scale further comprises an absolute signal range identification portion that enables a determination of absolute position over the maximum measuring range.

12. The position sensing device of claim 11, wherein the absolute signal range identification portion comprises at least one of a second scale pattern or binary code elements along the scale.

13. The position sensing device of claim 1, wherein the first type of scale element in the first scale element zones has a characteristic that is varied in the absolute signal range along the scale pattern to provide a different respective eddy current response in different respective first scale element zones in the absolute signal range.

14. The position sensing device of claim 1, wherein the first type of scale element comprises a plate abatement feature that is the same in each of the first scale element zones, the second type of scale element comprises a plate feature, and the characteristic of the second type of scale element that is varied in the absolute signal range along the scale pattern comprises at least one of a) the amount of the plate area, or b) the plate height.

15. The position sensing device of claim 1, wherein the signal portion and the scale pattern are configured such that the signal characteristic varies linearly over the absolute signal range.

16. The position sensing device of claim 1, wherein the signal portion and the scale pattern are configured such that at least one output signal is periodic at the scale wavelength P and the signal characteristic comprises an amplitude or DC offset of the periodic output signal.

17. The position sensing device of claim 1, wherein the area of each first scale element zone is approximately the same as the area of each second scale element zone.

18. A scale for use in a position sensing device usable to measure a position of a first member with respect to a second member along a measuring axis, the scale comprising:

a scale pattern extending along the measuring axis direction, the scale pattern being responsive to an eddy current read head that includes an excitation portion that excites the eddy currents in the scale pattern and a signal portion that outputs position signals that vary depending on the eddy currents;

wherein;

the scale pattern comprises;

a plurality of first scale element zones arranged periodically along the measuring axis direction, wherein the first scale element zones include a first type of scale element; and

a plurality of second scale element zones arranged periodically along the measuring axis direction and interleaved with the plurality of first periodic scale element zones such that the first and second scale element zones repeat periodically along the measuring axis direction according to a scale wavelength P, wherein the second scale element zones include a second type of scale element having a characteristic that is varied in an absolute signal range along the scale pattern to provide a different respective eddy current response in different respective second scale element zones in the absolute signal range; and

the scale pattern is configured so as to cause a signal portion of an eddy current read head to output absolute position signals having a signal characteristic that varies along the absolute signal range to uniquely indicate respective positions along the absolute signal range.

19. The scale of claim 18, wherein the first type of scale element comprises a plate feature and the second type of scale element comprises a plate abatement feature.

20. The scale of claim 19, wherein the plate feature comprises a conductive plate area, the plate abatement feature comprises at least one of a non-conductive area or a recessed area in a conductor, and the characteristic of the second type of scale element that is varied in the absolute signal range along the scale pattern comprises at least one of a) the amount of the non-conductive area, b) the amount of the recessed area, or c) the recess depth of the recessed area.