Thermocouple assembly with guarded thermocouple junction

• US 9,267,850 B2
• Filed: 02/06/2013
• Issued: 02/23/2016
• Est. Priority Date: 05/06/2009
• Status: Active Grant

• Current Assignee: ASM IP Holding B.V. (ASM International NV)
• Original Assignee: ASM America Incorporated (ASM International NV)
• Inventors: Aggarwal, Ravinder K., Haro, Robert C.
• Primary Examiner(s): KAPLAN VERBITSKY, GAIL
• Application Number:
  US13/760,160
• Publication Number:
  US 20130148693A1
• Time in Patent Office: 1,112 Days
• Field of Search: 374/178, 374/163, 374/208, 374/179, 374/141, 136/200
• US Class Current: 1/1
• CPC Class Codes: G01K 7/02 using thermoelectric elements, e.g. thermocouples
• CPC Class Codes: G01K 7/04 the object to be measured not forming one of the thermoelectric materials

Abstract

An improved thermocouple assembly for providing a temperature measurement is provided. The thermocouple assembly includes a sheath having a measuring tip, a support member received within the sheath, and first and second wires disposed within the support member. An end of each of the first and second wires are fused together to form a thermocouple junction therebetween. A recessed region is formed in a distal end of the support member, and the thermocouple junction is fixedly located at the base of the recessed region such that the recessed region maintains the thermocouple junction in a substantially fixed position relative to the measuring tip of the sheath.

Claims

1. A thermocouple assembly for measuring temperature within a chemical vapor deposition reactor, said thermocouple assembly comprising:

a continuous sheath having an elongated longitudinal axis and a measuring tip located along the elongated longitudinal axis at a distal end of said sheath;

a support member, wherein at least a portion of said support member is received within said sheath;

a first wire and a second wire formed of dissimilar metals, a portion of said first and second wires received, along the longitudinal axis, within said support member, and an end of each of said first and second wires being fused together to form a thermocouple junction therebetween; and

a recessed region formed in a distal end of said support member, the recessed region comprising a surface having a side surface and a bottom surface distal to the measuring tip and an open end proximate to the measuring tip,

wherein the thermocouple junction is in contact with at least a portion of the surface and is located between the bottom surface of the recessed region of the support member and the measuring tip of the sheath, and

wherein said thermocouple junction is positioned at a fixed spaced-apart distance from said measuring tip of said sheath.

2. The thermocouple assembly of claim 1, wherein said fixed spaced-apart distance between said thermocouple junction and said measuring tip of said sheath is less than 5 mm.

3. The thermocouple assembly of claim 1, wherein said fixed spaced-apart distance between said thermocouple junction and said measuring tip of said sheath is less than 1 mm.

4. The thermocouple assembly of claim 1, wherein an edge is formed about said recessed region at said distal end of said support member.

5. The thermocouple assembly of claim 4, wherein said edge is a ledge extending in a substantially perpendicular manner relative to a longitudinal axis of said support member.

6. The thermocouple assembly of claim 4, wherein said edge contacts an inner surface of said sheath at said measuring tip.

7. The thermocouple assembly of claim 1, wherein said thermocouple junction is maintained at a substantially fixed location relative to said base of said recessed region.

8. The thermocouple assembly of claim 1 further comprising a side wall formed about said recessed region, wherein said side wall guards said thermocouple junction.

9. The thermocouple assembly of claim 1, wherein said recessed region forms a substantially semi-spherical indentation.

10. The thermocouple assembly of claim 1, wherein said recessed region forms a substantially cylindrical indentation.

11. The thermocouple assembly of claim 1, wherein said recessed region forms a truncated conical indentation.

12. The thermocouple assembly of claim 1, wherein said recessed region forms a conical indentation.

13. The thermocouple assembly of claim 1, wherein said first wire is formed of Platinum and said second wire is formed of a Platinum alloy containing about 13% Rhodium.

15. The thermocouple assembly of claim 1, wherein said side surface is an angled surface that slopes inwardly toward the longitudinal axis as the angled surface extends away from the distal end of the support member.

14. A thermocouple assembly for measuring temperature within a chemical vapor deposition reactor, said thermocouple assembly comprising:

an elongated support member having an elongated longitudinal axis, said support member configured to receive at least a portion of said first wire and a second wire therewithin along the longitudinal axis, wherein said first wire and second wire are formed of dissimilar metals;

an elongated continuous sheath having a measuring tip along the longitudinal axis and located at a distal end of said sheath, said sheath configured to receive at least a portion of said support member;

a thermocouple junction formed by fusing an end of each of said first and second wires; and

a recessed region formed into a distal end of said support member, the recessed region comprising a surface comprising a side surface and a bottom surface distal to the measuring tip and an open end proximate to the measuring tip,

wherein said thermocouple junction is in contact with at least a portion of the surface and is maintained between the bottom surface of the recessed region of the support member and the measuring tip of the sheath at a substantially fixed position relative to said measuring tip of said sheath, and

wherein said thermocouple junction is positioned at a fixed spaced-apart distance from said measuring tip of said sheath.

16. The thermocouple assembly of claim 14, wherein said recessed region forms a substantially cylindrical indentation, and wherein a sidewall of the support member contacts the sheath.

17. A thermocouple assembly for measuring temperature within a chemical vapor deposition reactor, said thermocouple assembly comprising:

an elongated support member having an elongated longitudinal axis, said support member configured to receive at least a portion of said first wire and a second wire therewithin along the longitudinal axis, wherein said first wire and second wire are formed of dissimilar metals;

a continuous elongated sheath having a measuring tip located along the longitudinal axis and at a distal end of said sheath, said sheath configured to receive at least a portion of said support member;

a thermocouple junction formed by fusing an end of each of said first and second wires, the thermocouple junction in contact with the support member; and

a region formed at a distal end of said support member, the region comprising a sloped surface distal to the measuring tip,

wherein the sloped surface is substantially planar and formed at an angle relative to the longitudinal axis of the support member, and

wherein said thermocouple junction is in contact with the sloped surface.