Method for making surface enhanced Raman scattering device

• US 9,267,894 B2
• Filed: 08/08/2013
• Issued: 02/23/2016
• Est. Priority Date: 08/10/2012
• Status: Active Grant

• Current Assignee: Hamamatsu Photonics KK
• Original Assignee: Hamamatsu Photonics KK
• Inventors: Ito, Masashi, Shibayama, Katsumi, Kasahara, Takashi, Maruyama, Yoshihiro
• Primary Examiner(s): Phan, Thiem
• Application Number:
  US13/962,583
• Publication Number:
  US 20140041217A1
• Time in Patent Office: 929 Days
• Field of Search: 298/46, 298/25, 298/29, 298/49, 356/301
• US Class Current: 1/1
• CPC Class Codes: G01J 3/0205 Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
• CPC Class Codes: G01J 3/4412 Scattering spectrometry particle sizing by light scattering G01N15/0205; optical velocimetry of particles G01P5/20, G01P5/26
• CPC Class Codes: G01N 21/658 enhancement Raman, e.g. surface plasmons
• CPC Class Codes: Y10T 29/49155 Manufacturing circuit on or in base

Abstract

A method for making a surface enhanced Raman scattering device in accordance with one aspect of the present invention comprises a first step of forming a nanoimprint layer on a main surface of a wafer including a plurality of portions each corresponding to a substrate; a second step of transferring, by using a mold having a pattern corresponding to a fine structural part, the pattern to the nanoimprint layer after the first step, and thereby forming the formed layer including the fine structural part for each portion corresponding to the substrate; a third step of forming a conductor layer on the fine structural part after the second step; and a fourth step of cutting the wafer into each portion corresponding to the substrate after the second step.

Claims

1. A method for making a surface enhanced Raman scattering device comprising a substrate having a main surface;

a formed layer formed on the main surface and including a fine structural part; and

a conductor layer formed on the fine structural part and constituting an optical function part for generating surface enhanced Raman scattering the method comprising;

a first step of forming a nanoimprint layer on a main surface of a wafer including a plurality of portions each corresponding to the substrate;

a second step of transferring, by using a mold having a pattern corresponding to the fine structural part, the pattern to the nanoimprint layer after the first step, and thereby forming the formed layer including the fine structural part for each portion corresponding to the substrate;

a third step of forming the conductor layer on the fine structural part after the second step; and

a fourth step of cutting the wafer into each portion corresponding to the substrate after the second step.

2. The method for making a surface enhanced Raman scattering device according to claim 1, wherein the fourth step is performed after the third step.

3. The method for making a surface enhanced Raman scattering device according to claim 1, wherein the mold is flexible.

4. The method for making a surface enhanced Raman scattering device according to claim 1, wherein the mold is elastic.

5. The method for making a surface enhanced Raman scattering device according to claim 1, wherein the mold has a plurality of such patterns;

and

wherein, in the second step, a plurality of the patterns are simultaneously transferred to the nanoimprint layer by using the mold.

6. The method for making a surface enhanced Raman scattering device according to claim 5, wherein a plurality of the patterns are separated from each other;

and

wherein, in the second step, a plurality of the patterns are simultaneously transferred to the nanoimprint layer by using the mold such that a plurality of the fine structural parts are separated from each other.

7. The method for making a surface enhanced Raman scattering device according to claim 6, wherein the formed layer includes a support for supporting the fine structural part on the main surface of the substrate and a ring-shaped frame surrounding the support on the main surface of the substrate;

and

wherein, in the fourth step, a fracture is extended from a cutting start point formed in the wafer along a line to cut passing between the portions corresponding to the substrates, and thereby the frame and conductor layer existing on the line are cut together with the wafer.

8. The method for making a surface enhanced Raman scattering device according to claim 5, wherein a plurality of the patterns are continuous;

and

wherein, in the second step, a plurality of the patterns are simultaneously transferred to the nanoimprint layer by using the mold such that a plurality of the fine structural parts are continuous.

9. The method for making a surface enhanced Raman scattering device according to claim 1, wherein, in the fourth step, the formed layer and conductor layer existing on a line to cut passing between the portions corresponding to the substrates are cut together with the wafer.

10. The method for making a surface enhanced Raman scattering device according to claim 9, wherein, in the fourth step, a fracture is extended from a cutting start point formed in the wafer along the line and thereby the formed layer and conductor layer existing on the line are cut together with the wafer.

11. The method for making a surface enhanced Raman scattering device according to claim 10, wherein, in the fourth step, the wafer is irradiated with laser light while locating a converging point within the wafer, and thereby a modified region is formed as the cutting start point within the wafer along the line.