Miniaturized integrated micro electro-mechanical systems (MEMS) optical sensor array

• US 9,267,923 B2
• Filed: 09/13/2011
• Issued: 02/23/2016
• Est. Priority Date: 11/01/2010
• Status: Expired due to Fees

• Current Assignee: Koç University
• Original Assignee: Koç University
• Inventors: Urey, Hakan, Alaca, Burhanettin Erdem, Timurdogan, Erman
• Primary Examiner(s): Sines, Brian J
• Application Number:
  US13/882,987
• Publication Number:
  US 20140147337A1
• Time in Patent Office: 1,624 Days
• Field of Search: 422/50, 422/68.1, 422/502, 422/503, 422/509, 422/82.05, 436/43, 436/174, 436/164
• US Class Current: 1/1
• CPC Class Codes: G01N 2291/014 Resonance or resonant frequency
• CPC Class Codes: G01N 2291/02466 Biological material, e.g. blood
• CPC Class Codes: G01N 2291/0427 Flexural waves, plate waves, e.g. Lamb waves, tuning fork, cantilever
• CPC Class Codes: G01N 29/022 Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices microdevices per se B81B
• CPC Class Codes: G01N 29/2418 using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics photoacoustic cells G01N21/1702; measuring characteristics of vibrations by using radiation-sensitive means G01H9/00; acousto-optical conversion techniques for short-range imaging G01S15/8965; sound-producing devices using laser bundle G10K15/046
• CPC Class Codes: G01N 33/54373 involving physiochemical end-point determination, e.g. wave-guides, FETS, gratings

Abstract

This invention describes a method and apparatus for actuation and multiplexed sensing using an array of sensing elements. The invention can be used for label-free detection of biological and chemical agents in a robust, miniaturized package. The invention integrates photonics, CMOS electronics, and Micro/Nano system technologies and allows multi-analyte sensing in the same package. The preferred actuation method is using magnetic thin films and preferred sensing method is optical using interference means.

Claims

1. An apparatus for sensing dynamic changes such as mass or viscosity comprising:

a disposable cartridge having at least one micro-electromechanical sensor;

at least one light source coupled to the at least one micro-electromechanical sensor;

at least one photodetector coupled to the at least one micro-electromechanical sensor and the light source; and

a control electronics coupled to at least one actuation means;

wherein the at least one actuation means can be removably coupled to the at least one micro-electromechanical sensor and

wherein the control electronics and user interface can be removably coupled to the at least one photodetector.

2. The apparatus according to claim 1, wherein the at least one light source is a single laser source and wherein the at least one photodetector is a single photodetector.

3. The apparatus according to claim 1, wherein the at least one micro-electromechanical sensor comprises at least one vibrating structure for sensing and an interference means coupled with each vibrating mechanical structure.

4. The apparatus according to claim 1, wherein the at least one micro-electromechanical sensor comprises at least one vibrating structure for sensing and an interference means coupled with at least one vibrating mechanical structure and a substrate having a via for each mechanical structure to allow the light source to pass through the substrate to the mechanical structure.

5. The apparatus according to claim 4, wherein the photodetector is located on the substrate.

6. The apparatus according to claim 5, wherein the light source is coupled to the substrate.

7. The apparatus according to claim 5, further comprising at least one heating element for each vibrating mechanical structure.

8. The apparatus according to claim 1, wherein the micromechanical sensor comprises plurality of vibrating mechanical structures.

9. The apparatus according to claim 8, wherein the vibrating mechanical structures are arranged in a two-dimensional array.

10. The apparatus according to claim 4, wherein the at least one light source is a single light source that is scanned across each vibrating mechanical structure.

11. The apparatus according to claim 4, wherein the interference mean is a grating coupled to the each vibrating mechanical structure.

12. The apparatus according to claim 10, wherein the at least one light source is selected from the group consisting of laser diode, LED or VCSEL.