Liquid-gas interface plasma device

• US 9,272,359 B2
• Filed: 03/31/2010
• Issued: 03/01/2016
• Est. Priority Date: 05/30/2008
• Status: Active Grant

• Current Assignee: Colorado State University Research Foundation
• Original Assignee: Colorado State University Research Foundation
• Inventors: Koo, Il-Gyo, Collins, George J.
• Primary Examiner(s): Chen, Keath
• Application Number:
  US13/637,331
• Publication Number:
  US 20130062014A1
• Time in Patent Office: 2,162 Days
• Field of Search: 422/22
• US Class Current: 1/1
• CPC Class Codes: A61C 19/00 Dental auxiliary appliances dental chairs or accessories therefor, working stands whether or not combined with chairs A61G15/00
• CPC Class Codes: A61C 19/066 Bleaching devices; Whitening agent applicators for teeth, e.g. trays or strips
• CPC Class Codes: B23K 10/00 Welding or cutting by means of a plasma
• CPC Class Codes: H05H 1/2406 using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
• CPC Class Codes: H05H 1/2418 the electrodes being embedded in the dielectric
• CPC Class Codes: H05H 1/2431 using cylindrical electrodes, e.g. rotary drums
• CPC Class Codes: H05H 1/2443 the plasma fluid flowing through a dielectric tube
• CPC Class Codes: H05H 1/42 with provisions for introducing materials into the plasma, e.g. powder, liquid arc stabilising or constricting arrangements H05H1/3405; coaxial protecting fluids H05H1/341; electrostatic spraying, spraying apparatus with means for charging the spray electrically B05B5/00 ; cf. B23K9/324, B05B7/22

Abstract

A plasma system for treating a workpiece is disclosed. The plasma system includes: a plasma device including an electrode formed from a metal alloy and a dielectric layer covering the electrode, the dielectric layer including a distal portion extending distally past a distal end of the electrode by a predetermined distance; a liquid source configured to supply a liquid to a workpiece; an ionizable media source coupled to the plasma device and configured to supply ionizable media thereto; and a power source coupled to the electrode and configured to ignite the ionizable media at the plasma device to form a plasma effluent in the presence of the liquid, whereby the plasma effluent reacts with the liquid to form at least one reactive species that interacts with the workpiece.

Claims

1. A plasma system for treating a workpiece, comprising:

a plasma device including;

an electrode having an inner surface and an outer surface and formed from a metal alloy; and

a dielectric layer covering the inner and outer surfaces of the electrode and including a distal portion extending distally past a distal end of the electrode by an exposure distance, the dielectric layer being slidable along and relative to the inner and outer surfaces of the electrode to change the exposure distance during treatment of a workpiece;

a liquid source configured to supply a liquid to a workpiece;

an ionizable media source coupled to the plasma device and configured to supply ionizable media thereto; and

a power source coupled to the electrode and configured to ignite the ionizable media at the plasma device to form a plasma effluent in the presence of the liquid, whereby the plasma effluent reacts with the liquid to form at least one reactive species that interacts with the workpiece.

2. A plasma system according to claim 1, wherein the metal alloy is selected from the group consisting of an aluminum alloy and a titanium alloy.

3. A plasma system according to claim 2, wherein the dielectric layer is selected from the group consisting of an oxide, a nitride, a native oxide and a native nitride.

4. A plasma system according to claim 1, wherein the liquid is an aqueous solution of a compound selected from the group consisting of salts, bases, acids and reactive gases.

5. A plasma system according to claim 1, wherein the liquid includes catalyst nanoparticles having a volume average diameter from about 0.1 nm to about 1,000 nm.

6. A plasma system according to claim 1, wherein the electrode has a cylindrical tubular shape.