3D mold for manufacturing of sub-micron 3D structures using 2-D photon lithography and nanoimprinting and process thereof

• US 9,272,474 B2
• Filed: 04/08/2013
• Issued: 03/01/2016
• Est. Priority Date: 12/22/2008
• Status: Expired due to Fees

• Current Assignee: Helios Applied Systems Pte Limited
• Original Assignee: Helios Applied Systems Pte Limited
• Inventors: Kan, Shyi-Herng
• Primary Examiner(s): Greece, James
• Application Number:
  US13/858,509
• Publication Number:
  US 20130286485A1
• Time in Patent Office: 1,058 Days
• Field of Search: 359/619, 359/618, 359/627, 359/628
• US Class Current: 1/1
• CPC Class Codes: B29D 11/00365 Production of microlenses lenticular sheets B29D11/00278
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: B82Y 40/00 Manufacture or treatment of nanostructures
• CPC Class Codes: G02B 3/04 with continuous faces that are rotationally symmetrical but deviate from a true sphere , e.g. so called "aspheric" lenses
• CPC Class Codes: G02B 3/12 Fluid-filled or evacuated lenses
• CPC Class Codes: G03F 7/0002 Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
• CPC Class Codes: G03F 7/2053 using a laser ablative removal B41C
• CPC Class Codes: G03F 7/70375 Multiphoton lithography or multiphoton photopolymerization; Imaging systems comprising means for converting one type of radiation into another type of radiation

Abstract

A process to manufacture a 3D mold to fabricate a high-throughput and low cost sub-micron 3D structure product is disclosed. The process integrates use of 2-photon laser lithography and 3D write technology to make a 3D mold of each layer of the 3D structure product, and then use nanoimprinting to form a sheet of polymer film of each layer of the 3D structure from the said 3D mold of that layer. Each layer of the sheet of polymer film is then fabricated into the sub-micron 3D structure product. The 3D mold of each layer of a high-throughput and low cost sub-micron 3D structure product, is further used to make master molds which is then used to form a sheet of polymer film of each layer of the 3D structure to fabricate the sub-micron 3D structure product. Applications using this process are also disclosed.

Claims

1. A micro-lens, comprising:

a plurality of individually molded layers imprinted on top of one another using a nano-imprinting process, each layer of said plurality of layers having a width and a thickness, wherein each layer of said plurality of layers is imprinted using a mold formed from a polymer template fabricated using two-photon lithography;

wherein the polymer template for each mold is designed using a computer assisted drawing (CAD) software program;

wherein the width of each layer of said plurality of layers is varied by designing each polymer template using said CAD software program, such that the plurality of individually molded layers creates a curved surface.

2. The micro-lens of claim 1, wherein said curved surface is contoured to focus, reflect, guide and bend light.

3. The micro-lens of claim 1, wherein said curved surface is non-spherical.

4. The micro-lens of claim 1, wherein said curved surface is asymmetric.

5. The micro-lens of claim 1, wherein the thickness of each layer of said plurality of layers is between 0.01 micron and 150 microns.

6. The micro-lens of claim 5, wherein the thickness of each layer of said plurality of layers is less than 1 micron.

7. The micro-lens of claim 5, wherein the thickness of each layer of said plurality of layers is 100 nm.

8. The micro-lens of claim 1, wherein said micro-lens is a compound lens.

9. The micro-lens of claim 8, wherein said curved surface comprises a custom designed curvature using said CAD software program.

10. The micro-lens of claim 4, wherein said micro-lens is hemispherical.

11. The micro-lens of claim 1, wherein each layer of said plurality of layers comprises a sheet of polymer film.

12. The micro-lens of claim 1, wherein each layer of said plurality of layers is imprinted using a 3D mold formed form a polymer template fabricated using two-photon lithography.

13. The micro-lens of claim 12, wherein said 3D mold comprises curved side walls.

14. The micro-lens of claim 1, wherein each layer of said plurality of layers is imprinted using a roller mold formed form a polymer template fabricated using two-photon lithography.