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3D mold for manufacturing of sub-micron 3D structures using 2-D photon lithography and nanoimprinting and process thereof

  • US 9,272,474 B2
  • Filed: 04/08/2013
  • Issued: 03/01/2016
  • Est. Priority Date: 12/22/2008
  • Status: Expired due to Fees
First Claim
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1. A micro-lens, comprising:

  • a plurality of individually molded layers imprinted on top of one another using a nano-imprinting process, each layer of said plurality of layers having a width and a thickness, wherein each layer of said plurality of layers is imprinted using a mold formed from a polymer template fabricated using two-photon lithography;

    wherein the polymer template for each mold is designed using a computer assisted drawing (CAD) software program;

    wherein the width of each layer of said plurality of layers is varied by designing each polymer template using said CAD software program, such that the plurality of individually molded layers creates a curved surface.

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