Alignment methods in fluid-filled MEMS displays

• US 9,274,333 B2
• Filed: 08/30/2012
• Issued: 03/01/2016
• Est. Priority Date: 02/23/2005
• Status: Expired due to Fees

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: Pixtronix, Incorporated (Qualcomm, Inc.)
• Inventors: Hagood, Nesbitt W. IV, Fijol, John J., Steyn, Jasper Lodewyk, Payne, Richard S., Gandhi, Jignesh
• Primary Examiner(s): Smith, Zandra
• Assistant Examiner(s): Niesz, Jamie C
• Application Number:
  US13/599,734
• Publication Number:
  US 20130010341A1
• Time in Patent Office: 1,279 Days
• Field of Search: 257/88, 257/98, 257/E33.071, 359/230
• US Class Current: 1/1
• CPC Class Codes: B81B 2201/047 Optical MEMS not provided for in B81B2201/042 - B81B2201/045
• CPC Class Codes: B81B 2203/0315 Cavities
• CPC Class Codes: B81C 2203/0118 Bonding a wafer on the substrate, i.e. where the cap consists of another wafer
• CPC Class Codes: B81C 2203/019 characterised by the material or arrangement of seals between parts
• CPC Class Codes: B81C 2203/051 Active alignment, e.g. using internal or external actuators, magnets, sensors, marks or marks detectors
• CPC Class Codes: B81C 3/004 Active alignment, i.e. moving the elements in response to the detected position of the elements using internal or external actuators
• CPC Class Codes: G02B 26/00 Optical devices or arrangements for the control of light using movable or deformable optical elements control of light by modification of the optical properties of the media of the elements involved therein G02F1/00
• CPC Class Codes: G02B 26/023 comprising movable attenuating elements, e.g. neutral density filters
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G09G 2300/023 Display panel composed of stacked panels
• CPC Class Codes: G09G 2300/0426 Layout of electrodes and connections
• CPC Class Codes: G09G 2300/0443 with several sub-pixels for the same colour in a pixel, not specifically used to display gradations G09G3/364 takes precedence
• CPC Class Codes: G09G 2300/0842 forming a memory circuit, e.g. a dynamic memory with one capacitor
• CPC Class Codes: G09G 3/3433 using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices using liquid crystal devices G09G3/36; using electrochromic devices G09G3/38
• CPC Class Codes: G09G 3/3473 based on light coupled out of a light guide, e.g. due to scattering, by contracting the light guide with external means
• CPC Class Codes: H01L 2924/1461 MEMS

Abstract

This application relates to a display including a first layer of material including a first aperture having at least one side, a first substrate separated from the first layer of material by a gap, where the first substrate is arranged to pass through a portion of light emitted from a light source into the gap. The display further includes a movable shutter arranged within the gap, where the shutter is movable to at least a first position and a second position, to obstruct passage of the portion of light through the first aperture at the first position. The movable shutter has a first edge, and in the first position, the movable shutter is aligned with the first aperture such that the first edge extends a first length past the at least one side of the first aperture.

Claims

1. A display comprising:

a first layer of material including a plurality of apertures, each aperture having at least one side;

a first substrate being separated from the first layer of material by a gap, the first substrate arranged to pass through a portion of light emitted from a light source into the gap; and

a plurality of movable shutters arranged within the gap between the first layer of material and the first substrate, the shutters movable to at least a first position and a second position, to obstruct passage of the portion of light through respective ones of the plurality of apertures at the first position, the movable shutters each having a first edge and a second edge, and in the first position, a respective movable shutter being aligned with a respective one of the apertures such that its first edge extends about a first length past a first side of the respective aperture and its second edge extends about the first length past a second side of the respective aperture;

wherein the first length is greater than or equal to a distance between the movable shutter and the first layer of material.

2. The display of claim 1, further comprising a second layer of material arranged over a surface of the first substrate, the second layer of material having an additional aperture with at least one side, one of the movable shutters being aligned with the additional aperture.

3. The display of claim 2, wherein the first edge of the one of the movable shutters in the first position extends a second length past at least one side of the additional aperture.

4. The display of claim 3, wherein the first length is substantially the same as the second length.

5. The display of claim 2, wherein the portion of light passes through the additional aperture and into the gap.

6. The display of claim 1, wherein the first substrate is substantially transparent.

7. The display of claim 1, wherein the first length is more than 0 microns and less than about 5 microns.

8. The display of claim 1, wherein the first length is more than 0 microns and less than about 20 microns.

9. The display of claim 1, wherein a side of one of the shutters facing away from its respective aperture includes at least one of a reflective material and a light-absorbing material.

10. The display of claim 1, wherein a side of one of the shutters facing toward its respective aperture includes a light-absorbing material.

11. The display of claim 2, wherein the second layer of material includes at least one of a mirror, a dielectric mirror, a metallic film, a metal, and a reflective material.

12. The display of claim 2, wherein a side of the second layer of material facing toward the gap includes a light-absorbing material.

13. The display of claim 2, wherein a side of the second layer of material facing away from the gap includes a reflective material.

14. The display of claim 2, wherein the second layer of material includes both a reflective layer and a light-absorbing layer.

15. The display of claim 1, wherein a side of the first layer of material facing toward the gap includes a light-absorbing material.

16. The display of claim 1, further comprising a second substrate, the first layer of material being arranged over a surface of the second substrate.

17. The display of claim 1, further comprising an actuator for moving the shutter between the first position and the second position, a portion of the actuator being arranged adjacent to the first layer of material.

18. The display of claim 2, further comprising an actuator for moving the one of the shutters between the first position and the second position, a portion of the actuator being arranged adjacent to the second layer of material.