Gate overvoltage protection for compound semiconductor transistors
First Claim
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1. A transistor device, comprising:
- a compound semiconductor body;
a drain disposed in the compound semiconductor body;
a source disposed in the compound semiconductor body and spaced apart from the drain by a channel region;
a gate operable to control the channel region; and
a gate overvoltage protection device connected between the source and the gate and comprising p-type and n-type silicon-containing semiconductor material,wherein the compound semiconductor body comprises a doped SiC substrate and a SiC epitaxial layer on the doped SiC substrate, the source is electrically connected to the doped SiC substrate through a conductive via disposed in a first trench extending through the SiC epitaxial layer to the doped SiC substrate, the gate overvoltage protection device is disposed in a second trench extending through the SiC epitaxial layer to the doped SiC substrate, the second trench is insulated from the SiC epitaxial layer, and the gate overvoltage protection device comprises alternating regions of p-type and n-type SiC.
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Abstract
A transistor device includes a compound semiconductor body, a drain disposed in the compound semiconductor body and a source disposed in the compound semiconductor body and spaced apart from the drain by a channel region. A gate is provided for controlling the channel region. The transistor device further includes a gate overvoltage protection device connected between the source and the gate, the gate overvoltage protection device including p-type and n-type silicon-containing semiconductor material.
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Citations
22 Claims
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1. A transistor device, comprising:
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a compound semiconductor body; a drain disposed in the compound semiconductor body; a source disposed in the compound semiconductor body and spaced apart from the drain by a channel region; a gate operable to control the channel region; and a gate overvoltage protection device connected between the source and the gate and comprising p-type and n-type silicon-containing semiconductor material, wherein the compound semiconductor body comprises a doped SiC substrate and a SiC epitaxial layer on the doped SiC substrate, the source is electrically connected to the doped SiC substrate through a conductive via disposed in a first trench extending through the SiC epitaxial layer to the doped SiC substrate, the gate overvoltage protection device is disposed in a second trench extending through the SiC epitaxial layer to the doped SiC substrate, the second trench is insulated from the SiC epitaxial layer, and the gate overvoltage protection device comprises alternating regions of p-type and n-type SiC. - View Dependent Claims (2, 3, 4, 5)
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6. A transistor device, comprising:
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a GaN semiconductor body; a drain disposed in the GaN semiconductor body; a source disposed in the GaN semiconductor body and spaced apart from the drain by a channel region; a gate operable to control the channel region; and a gate overvoltage protection device disposed in a first trench formed in the GaN semiconductor body and connected between the source and the gate, the gate overvoltage protection device comprising alternating p-type and n-type silicon regions. - View Dependent Claims (7, 8, 9, 10, 11, 12, 13, 14)
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15. A method of manufacturing a transistor device, comprising:
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forming a drain and a source in a GaN semiconductor body with the drain and the source spaced apart by a channel region; forming a gate operable to control the channel region; forming a first trench in the GaN semiconductor body; and forming a gate overvoltage protection device connected between the source and the gate, the gate overvoltage protection device comprising alternating p-type and n-type silicon regions disposed in the first trench. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22)
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Specification