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Gas enclosure systems and methods utilizing multi-zone circulation and filtration

  • US 9,278,564 B2
  • Filed: 07/16/2015
  • Issued: 03/08/2016
  • Est. Priority Date: 07/18/2014
  • Status: Active Grant
First Claim
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1. An industrial printing tool comprising:

  • a printing system comprising;

    a substrate support apparatus for supporting a substrate,a carriage assembly mounted to a bridge, where the carriage assembly is configured to position a printhead assembly relative to the substrate;

    a gas enclosure defining an interior containing a gas, wherein the gas enclosure comprises a first tunnel enclosure section, a bridge enclosure section and a second tunnel enclosure section; and

    a gas circulation and filtration system for circulating the gas within the gas enclosure, the gas circulation and filtration system comprising;

    a tunnel circulation and filtration system configured to filter and circulate the gas around the substrate support apparatus in a circulation path across the direction of substrate travel; and

    a bridge circulation and filtration system configured to filter and circulate gas around the carriage assembly.

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