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Microelectromechanical gyroscope with enhanced rejection of acceleration noises

  • US 9,278,847 B2
  • Filed: 09/25/2013
  • Issued: 03/08/2016
  • Est. Priority Date: 12/23/2008
  • Status: Active Grant
First Claim
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1. A microelectromechanical structure, comprising:

  • a substrate;

    a driving assembly having a first set of driving electrodes and a second set of driving electrodes;

    elastic anchorage elements anchoring portions of the driving assembly to the substrate;

    first and second elastic supporting elements;

    a first sensing mass and a second sensing mass positioned between the first and second set of driving electrodes, the first sensing mass coupled to the driving assembly via the first elastic supporting element and the second sensing mass coupled to the driving assembly via the second elastic supporting element, the first and second sensing masses being configured to be moved by the driving assembly and configured to move in response to rotation of the microelectromechanical structure;

    a rigid connection bar positioned between the first sensing mass and the second sensing mass;

    first and second elastic coupling elements coupled between the first and second sensing masses and the connection bar, respectively, the elastic coupling elements configured to couple movement of the first and second sensing masses together to move at substantially the same frequency; and

    a third sensing mass and a fourth sensing mass positioned between the first and second set of driving electrodes, the first and second sensing masses being aligned along a first axis and the third and fourth sensing masses being aligned along a second axis that is angled with respect to the first axis by less than 90 degrees, the third and fourth sensing masses being movably coupled to the driving assembly without being moveably coupled to the connection bar.

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