Micromechanical coriolis rate of rotation sensor

• US 9,279,681 B2
• Filed: 12/19/2012
• Issued: 03/08/2016
• Est. Priority Date: 12/23/2011
• Status: Active Grant

• Current Assignee: Hanking Electronics Hongkong Company Limited
• Original Assignee: Maxim Integrated Products, Inc. (Analog Devices, Inc.)
• Inventors: Rocchi, Alessandro, Marchetti, Eleonora, Bertini, Lorenzo
• Primary Examiner(s): Kwok, Helen
• Application Number:
  US13/720,217
• Publication Number:
  US 20130269469A1
• Time in Patent Office: 1,175 Days
• Field of Search: 735/041.2, 735/041.4, 735/040.2, 735/040.4
• US Class Current: 1/1
• CPC Class Codes: G01C 19/04 Details
• CPC Class Codes: G01C 19/5712 the devices involving a micromechanical structure
• CPC Class Codes: G01C 19/5747 each sensing mass being connected to a driving mass, e.g. driving frames
• CPC Class Codes: Y10T 74/1293 Flexure hinges for gyros

Abstract

A micromechanical Coriolis rate of rotation sensor for detecting a rate of rotation, comprising a substrate, a measurement axis (X-axis), a detection axis (Y-axis), and a drive axis (Z-axis), each disposed orthogonally to each other and a first and a second driving mass (2) disposed in an X-Y plane parallel to the substrate. Each driving mass (2) being rotatably connected to the substrate by means of a central suspension. The two central suspensions being disposed along the Y-axis. Drive means are used for generating a rotational oscillation of the driving masses (2) about the drive axis (Z) at each central suspension. At least one elastic connecting element (5) is disposed on each of the driving masses (2) on both sides of the Y-axis and spaced apart from the same for connecting and oscillating the two driving masses (2) in a mutually tuned manner.

Claims

1. A micromechanical Coriolis rate of rotation sensor for detecting a rate of rotation, comprising:

a substrate;

a measurement axis (X-axis), a detection axis (Y-axis), and a drive axis (Z-axis), each being disposed orthogonally to each other;

a first and a second driving mass disposed in an X-Y plane parallel to the substrate, each driving mass being rotatably coupled to the substrate by means of a central suspension that is disposed along the Y-axis;

drive means for generating rotational oscillation of the driving masses about the drive axis (Z) at each central suspension; and

wherein at least one elastic connecting element is disposed on each of the driving masses on both sides of the Y-axis, and spaced apart for coupling and oscillating the first and second driving mass in a mutually tuned manner.

2. The micromechanical Coriolis rate of rotation sensor according to claim 1, wherein the at least one elastic connecting element is attached at the outermost end of the driving masses in the direction of the X-axis.

3. The micromechanical Coriolis rate of rotation sensor according to claim 1, wherein the at least one elastic connecting element comprises cantilevers and elastic connecting springs.

4. The micromechanical Coriolis rate of rotation sensor according to claim 3, wherein the elastic connecting springs protrude into an intermediate space between the first and second driving masses.

5. The micromechanical Coriolis rate of rotation sensor according to claim 1, wherein the at least one connecting element is disposed between the first and second driving masses.

6. The micromechanical Coriolis rate of rotation sensor according to claim 1, wherein the at least one elastic connecting element is a first mass that is coupled to the first and second driving masses by means of springs.

7. The micromechanical Coriolis rate of rotation sensor according to claim 6, wherein the first mass encloses a second mass in a frame shape and is coupled thereto by means of connecting springs.

8. The micromechanical Coriolis rate of rotation sensor according to claim 1, wherein the at least one elastic connecting element is rotatably coupled about the X-axis to the substrate by means of an anchoring.

9. The micromechanical Coriolis rate of rotation sensor according to claim 7, wherein detection elements are disposed between the substrate and at least one mass that is selected from the first and second driving mass, the first mass and the second masses.

10. The micromechanical Coriolis rate of rotation sensor according to claim 1, wherein drive elements are disposed on the first and second driving masses.

11. The micromechanical Coriolis rate of rotation sensor according to claim 10, wherein feedback elements are associated with the drive elements.

12. The micromechanical Coriolis rate of rotation sensor according to claim 1, wherein the first and second driving masses are disposed on the central suspension by means of a plurality of anchor springs.

13. The micromechanical Coriolis rate of rotation sensor according to claim 7, wherein stoppers for limiting the displaceability of the first and second driving masses, the first mass and the second mass are disposed between the driving masses and the first mass or between the first mass and the second mass.

14. The micromechanical Coriolis rate of rotation sensor according to claim 1, wherein stoppers are disposed between the central suspension and at least one of the driving masses.

15. The micromechanical Coriolis rate of rotation sensor according to claim 12, wherein stoppers are disposed between the substrate and the driving masses or between the substrate and the anchoring springs.

16. The micromechanical Coriolis rate of rotation sensor according to claim 7, wherein the second mass is rotatably coupled about the X-axis to the substrate by means of an anchoring.