Optical emission system including dichroic beam combiner
First Claim
1. A spectrometer system, comprising:
- a light source configured to emit light from a sample, the emitted light comprising first light emitted in a first direction and second light emitted in a second direction different from the first direction;
a light detection and measurement apparatus configured to perform emission spectrometry analysis on the sample by measuring intensity and wavelength of each of the first light and the second light; and
a dichroic beam combiner configured to receive the first light via a first light path and the second light via a second light path, to reflect a reflected portion of the first light into an entrance aperture of the light detection and measurement apparatus, and to transmit a transmitted portion of the second light into the entrance aperture of the light detection and measurement apparatus,wherein the reflected portion of the first light reflected into the entrance aperture predominately has wavelengths in a first range of wavelengths, and the transmitted portion of the second light transmitted into the entrance aperture predominately has wavelengths in a second range of wavelengths different from the first range of wavelengths.
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Accused Products
Abstract
An optical emission spectrometer system includes a light source and a dichroic beam combiner. The light source emits first light in a first direction and second light in a second direction different from the first direction. The dichroic beam combiner receives the first light via a first light path and the second light via a second light path, reflects a portion the first light into an entrance aperture of a light detection and measurement apparatus, and transmits a portion of the second light into the entrance aperture, enabling analysis and measurement of both first and second light characteristics simultaneously. The portion of the first light reflected into the entrance aperture predominately has wavelengths in a first range of wavelengths and the portion of the second light transmitted into the entrance aperture predominately has wavelengths in a second range of wavelengths, different from the first range of wavelengths.
219 Citations
19 Claims
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1. A spectrometer system, comprising:
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a light source configured to emit light from a sample, the emitted light comprising first light emitted in a first direction and second light emitted in a second direction different from the first direction; a light detection and measurement apparatus configured to perform emission spectrometry analysis on the sample by measuring intensity and wavelength of each of the first light and the second light; and a dichroic beam combiner configured to receive the first light via a first light path and the second light via a second light path, to reflect a reflected portion of the first light into an entrance aperture of the light detection and measurement apparatus, and to transmit a transmitted portion of the second light into the entrance aperture of the light detection and measurement apparatus, wherein the reflected portion of the first light reflected into the entrance aperture predominately has wavelengths in a first range of wavelengths, and the transmitted portion of the second light transmitted into the entrance aperture predominately has wavelengths in a second range of wavelengths different from the first range of wavelengths. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. An optical emission spectrometer apparatus for performing emission spectrometry analysis on a sample, the apparatus comprising:
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optical directing means configured to direct first light, emitted from the sample in a first direction, along a first light path to a single light detection and measurement apparatus, and to direct second light, emitted from the sample in a second direction different from the first direction, along a second light path to the same light detection and measurement apparatus; optical filtering means configured to simultaneously filter the first and second light into predominantly different wavelength ranges; and optical combining means to combine the filtered first and second light prior to the light detection and measurement apparatus, wherein the filtered first light comprises a first reflected portion directed to the light detection and measurement apparatus, and a first transmitted portion directed away from the light detection and measurement apparatus, and wherein the filtered second light comprises a second transmitted portion directed to the light detection and measurement apparatus, and a second reflected portion directed away from the light detection and measurement apparatus. - View Dependent Claims (15, 16, 17, 18, 19)
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Specification