Methods for passivating a carbonic nanolayer

• US 9,281,185 B2
• Filed: 11/07/2014
• Issued: 03/08/2016
• Est. Priority Date: 10/23/2009
• Status: Active Grant

• Current Assignee: ZEON Corporation
• Original Assignee: Nantero Incorporated
• Inventors: Rueckes, Thomas, Manning, H. Montgomery, Sen, Rahul
• Primary Examiner(s): KUSUMAKAR, KAREN M
• Application Number:
  US14/535,675
• Publication Number:
  US 20150064886A1
• Time in Patent Office: 487 Days
• Field of Search: 438/500, 977/745, 977/749, 977/762, 977/764, 977/779
• US Class Current: 1/1
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: B82Y 40/00 Manufacture or treatment of nanostructures
• CPC Class Codes: H01L 21/02203 the layer being porous
• CPC Class Codes: H01L 21/02527 Carbon, e.g. diamond-like carbon
• CPC Class Codes: H01L 21/02606 Nanotubes carbon nanotubes H10K85/211
• CPC Class Codes: H01L 21/02628 using solutions
• CPC Class Codes: H01L 29/0665 the shape of the body defining a nanostructure nanotechnology per se B82B
• CPC Class Codes: H01L 29/0669 Nanowires or nanotubes carbon nanotubes as material of solid-state device active part H10K85/211
• CPC Class Codes: H01L 29/1029 of field-effect transistors
• CPC Class Codes: H01L 29/1606 Graphene
• CPC Class Codes: H10K 10/50 Bistable switching devices
• CPC Class Codes: H10K 10/88 Passivation; Containers; Encapsulations
• CPC Class Codes: H10K 71/12 using liquid deposition, e.g. spin coating
• CPC Class Codes: H10K 71/15 characterised by the solvent used
• CPC Class Codes: H10K 85/221 Carbon nanotubes
• CPC Class Codes: H10N 70/021 Formation of switching materials, e.g. deposition of layers
• CPC Class Codes: H10N 70/826 adapted for essentially vertical current flow, e.g. sandwich or pillar type devices
• CPC Class Codes: H10N 70/8845 Carbon or carbides
• CPC Class Codes: Y10S 977/842 for carbon nanotubes or fullerenes

Abstract

Methods for passivating a nanotube fabric layer within a nanotube switching device to prevent or otherwise limit the encroachment of an adjacent material layer are disclosed. In some embodiments, a sacrificial material is implanted within a porous nanotube fabric layer to fill in the voids within the porous nanotube fabric layer while one or more other material layers are applied adjacent to the nanotube fabric layer. Once the other material layers are in place, the sacrificial material is removed. In other embodiments, a non-sacrificial filler material (selected and deposited in such a way as to not impair the switching function of the nanotube fabric layer) is used to form a barrier layer within a nanotube fabric layer. In other embodiments, individual nanotube elements are combined with and nanoscopic particles to limit the porosity of a nanotube fabric layer.

Claims

1. A method for forming a carbonic nanolayer based device, comprising:

combining a first volume of carbon structures and a second volume of nanoscopic particles in a liquid medium to form an application solution;

depositing said application solution over a first material layer as to form a composite layer, said composite layer comprising a mixture of said carbon structures and said nanoscopic particles;

depositing a second material layer such that said composite layer and said second material layer have longitudinal axes that are substantially parallel; and

flowing a filler material over said composite layer such that said filler material penetrates said composite layer to form a barrier layer.

2. The method of claim 1 wherein said carbon structures are selected from the group consisting of single wall carbon nanotubes, multi-wall carbon nanotubes, functionalized carbon nanotubes, oxidized carbon nanotubes, buckyballs, graphene sheets, nanoscopic graphene flecks, and graphene oxide.

3. The method of claim 1 wherein said second volume of nanoscopic particles are comprised of at least one material selected from the group consisting of silicon oxide, silicon nitride, amorphous carbon, and multi-walled carbon nanotubes.

4. The method of claim 1 wherein substantially all of said nanoscopic particles within said second volume fall within a predetermined volume tolerance.

5. The method of claim 1 wherein at least one of the magnitude of said first volume of carbon structures, the magnitude of said second volume of nanoscopic particles, and the volume of said liquid medium is selected to obtain a desired degree of porosity within said composite layer.

6. The method of claim 1 wherein said first volume of carbon structures form a matrix phase and said second volume of nanoscopic particles form a discrete phase.

7. The method of claim 1 wherein said second volume of nanoscopic particles form a matrix phase and said first volume of carbon structures form a discrete phase.

8. The method of claim 1 wherein said first volume of carbon structures and said second volume of nanoscopic particles form interconnected matrix phases.

9. The method of claim 1 wherein said composite layer has less than about 10¹¹ metal atoms/cm².

10. The method of claim 1 wherein said barrier layer limits the encroachment of said material layer into said composite layer.

11. The method of claim 1 further comprising etching away excess filler material after said flowing.

12. The method of claim 1 wherein said barrier layer provides structural support to said composite layer.

13. The method of claim 1 wherein said filler material is selected from the group consisting of amorphous carbon, silicon dioxide (SiO₂), and silicon nitride (SiN).

14. The method of claim 1 wherein said barrier layer is formed through a room temperature physical vapor deposition (RTPVD) process.

15. The method of claim 14 wherein said filler material comprises tetraethyl orthosilicate (TEOS).

16. The method of claim 1 wherein said barrier layer is formed through a non-directional sputter deposition process.

17. The method of claim 16 wherein said filler material comprises titanium nitride (TiN).

18. The method of claim 1 wherein at least one of said first material layer and said second material layer are flexible.