Circuits using gate-all-around technology

• US 9,281,363 B2
• Filed: 04/08/2015
• Issued: 03/08/2016
• Est. Priority Date: 04/18/2014
• Status: Active Grant

• Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Original Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Inventors: Chen, Chung-Hui
• Primary Examiner(s): HO, TU TU V
• Application Number:
  US14/681,523
• Publication Number:
  US 20150303259A1
• Time in Patent Office: 335 Days
• Field of Search: 257/9
• US Class Current: 1/1
• CPC Class Codes: H01L 21/823487 with a particular manufacturing method of vertical transistor structures, i.e. with channel vertical to the substrate surface with a current flow parallel to the substrate surface H01L21/823431
• CPC Class Codes: H01L 27/0207 Geometrical layout of the components, e.g. computer aided design; custom LSI, semi-custom LSI, standard cell technique
• CPC Class Codes: H01L 27/088 the components being field-effect transistors with insulated gate
• CPC Class Codes: H01L 29/0676 oriented perpendicular or at an angle to a substrate
• CPC Class Codes: H01L 29/42392 fully surrounding the channel, e.g. gate-all-around
• CPC Class Codes: H01L 29/66666 Vertical transistors H01L29/66712, H01L29/66742 take precedence
• CPC Class Codes: H01L 29/7827 Vertical transistors H01L29/7802, H01L29/78642 take precedence

Abstract

A semiconductor structure includes a first gate-all-around (GAA) structure configured to form a first circuit and a second GAA structure configured to form a second circuit similar to the first circuit. The first GAA structure and the second GAA structure have a same of at least one of the following exemplary features: a number of GAA devices in which current flows from a first oxide definition (OD) region to a second OD region; a number of GAA devices in which current flows from the second OD region to the first OD region; a number of first OD region contact elements; a number of second OD region contact elements.

Claims

1. A semiconductor structure, comprising:

a first gate-all-around (GAA) structure configured to form a first circuit;

a second GAA structure configured to form a second circuit similar to the first circuit;

wherein

each of the first GAA structure and the second GAA structure comprises;

at least one GAA device, each GAA device comprising;

at least one nanowire;

a first oxide diffusion (OD) region and a second OD region connected to opposite ends of the at least one nanowire; and

a gate region wrapping all around a portion of each of the at least one nanowire;

at least one first OD region contact element, each first OD region contact element electrically coupled to a corresponding first OD region of the at least one GAA device; and

at least one second OD region contact element, each second OD region contact element electrically coupled to a corresponding second OD region of the at least one GAA device; and

the first GAA structure and the second GAA structure have substantially a same of at least one of the following features;

a number of GAA devices in the at least one GAA device configured to have current flows from the first OD region to the second OD region;

a number of GAA devices in the at least one GAA device configured to have current flows from the second OD region to the first OD region;

a number of integral first OD region of the at least one GAA device;

a number of integral second OD region of the at least one GAA device;

an orientation of and a corresponding direction of current flow through the first GAA structure or the second GAA structure;

a number of the at least one first OD region contact element;

an orientation of the at least one first OD region contact element;

a number of the at least one second OD region contact element;

an orientation of the at least one second OD region contact element;

a number of the at least one nanowire for each corresponding GAA devices of the first GAA structure and the second GAA structure;

a number of rows of the at least one nanowire arranged in an array for each corresponding GAA devices of the first GAA structure and the second GAA structure;

a number of nanowires in a row of the at least one nanowire arranged in the array for each corresponding GAA devices of the first GAA structure and the second GAA structure;

a number of columns of the at least one nanowire arranged in the array for each corresponding GAA devices of the first GAA structure and the second GAA structure;

a number of nanowires in a column of the at least one nanowire arranged in the array for each corresponding GAA devices of the first GAA structure and the second GAA structure; and

a shape of the at least one nanowire for each corresponding GAA devices of the first GAA structure and the second GAA structure.

2. The semiconductor structure of claim 1, wherein

the at least one GAA device further comprises a substrate;

one of the ends of the at least one nanowire is located closer to the substrate and the other of the ends of the at least one nanowire is located further away from the substrate.

3. The semiconductor structure of claim 2, wherein the shape of the at least one nanowire is such that a vertical cross section of each of the at least one nanowire is asymmetrical with respect to a middle line between the opposite ends of the nanowire.

4. The semiconductor structure of claim 3, wherein the vertical cross section is continuously tapered or stepwise tapered.

5. The semiconductor structure of claim 1, wherein a first GAA device and a second GAA device in a plurality of GAA devices of each of the first GAA structure and the second GAA structure are electrically coupled by an integral first OD region or an integral second OD region.

6. The semiconductor structure of claim 5, wherein

the first GAA structure and the second GAA structure have substantially the same following features:

a number of GAA devices in the plurality of GAA devices configured to have current flows from the first OD region to the second OD region; and

a number of GAA devices in the plurality of GAA devices configured to have current flows from the second OD region to the first OD region.

7. The semiconductor structure of claim 5, wherein

the first GAA device and the second GAA device are electrically coupled by one of the at least one first OD region contact element electrically coupled to one of the at least one second OD region contact element through a first conductive line;

the first GAA device and the second GAA device are electrically coupled by one of a plurality of first OD region contact elements of each of the first GAA structure and the second GAA structure electrically coupled to another of the plurality of first OD region contact elements through a second conductive line;

or

the first GAA device and the second GAA device are electrically coupled by one of a plurality of second OD region contact elements of each of the first GAA structure and the second GAA structure electrically coupled to another of the plurality of second OD region contact elements through a third conductive line.

8. The semiconductor structure of claim 7, wherein

the first GAA structure and the second GAA structure have substantially the same following features:

a number of GAA devices in the plurality of GAA devices configured to have current flows from the first OD region to the second OD region;

a number of GAA devices in the plurality of GAA devices configured to have current flows from the second OD region to the first OD region;

a number of the at least one first OD region contact element; and

a number of the at least one second OD region contact element.

9. The semiconductor structure of claim 1, wherein the orientation of the first GAA structure or the second GAA structure is such that the at least one GAA device is arranged in length along a first direction, the at least one GAA device is arranged in length opposite to the first direction, the at least one GAA device is arranged in length along a second direction substantially orthogonal to the first direction, or the at least one GAA device is arranged in length opposite to the second direction.

10. The semiconductor structure of claim 1, wherein the orientation of the at least one first OD contact element and the orientation of the at least one second OD contact element are such that the at least one first OD contact element is substantially parallel to the at least one second OD contact element, or the at least one first OD contact element is substantially orthogonal to the at least one second OD contact element.

11. A semiconductor structure, comprising:

a first gate-all-around (GAA) structure configured to form a first circuit;

a second GAA structure configured to form a second circuit similar to the first circuit;

wherein

each of the first GAA structure and the second GAA structure comprises;

at least one GAA device, each GAA device comprising;

at least one nanowire;

a first oxide diffusion (OD) region and a second OD region connected to opposite ends of the at least one nanowire; and

a gate region wrapping all around a portion of each of the at least one nanowire; and

the first GAA structure and the second GAA structure are configured such that if a first current path through the first GAA structure is from the first OD region of one end of the at least one GAA device to the second OD region of the other end of the at least one GAA device of the first GAA structure, a second current path through the second GAA structure is from the first OD region of one end of the at least one GAA device to the second OD region of the other end of the at least one GAA device of the second GAA structure, and if the first current path is from the second OD region of the one end of the at least one GAA device to the first OD region of the other end of the at least one GAA device of the first GAA structure, the second current path is from the second OD region of the one end of the at least one GAA device to the first OD region of the other end of the at least one GAA device of the second GAA structure.

12. The semiconductor structure of claim 11, wherein

the first GAA structure and the second GAA structure are configured such that if the at least one GAA device of the first GAA structure is arranged in length along a first direction, the at least one GAA device of the second GAA structure is arranged in length along the first direction, the at least one GAA device of the second GAA structure is arranged in length opposite to the first direction, the at least one GAA device of the second GAA structure is arranged in length along a second direction substantially orthogonal to the first direction, or the at least one GAA device of the second GAA structure is arranged in length opposite to the second direction.

13. The semiconductor structure of claim 11, wherein

the at least one GAA device further comprises a substrate;

one of the ends of the at least one nanowire is located closer to the substrate and the other of the ends of the at least one nanowire is located further away from the substrate.

14. The semiconductor structure of claim 13, wherein the shape of the at least one nanowire is such that a vertical cross section of each of the at least one nanowire is asymmetrical with respect to a middle line between the opposite ends of the nanowire.

15. The semiconductor structure of claim 14, wherein the vertical cross section is continuously tapered or stepwise tapered.

16. The semiconductor structure of claim 11, wherein

a number of GAA devices in the first GAA structure that provides the first OD region to the second OD region traversal in the first current path is substantially the same as a number of GAA devices in the second GAA structure that provides the first OD region to the second OD region traversal in the second current path;

and

a number of GAA devices in the first GAA structure that provides the second OD region to the first OD region traversal in the first current path is substantially the same as a number of GAA devices in the second GAA structure that provides the second OD region to the first OD region traversal in the second current path.

17. The semiconductor structure of claim 11, wherein

each of the first GAA structure and the second GAA structure comprises:

at least one first OD region contact element, each first OD region contact element electrically coupled to a corresponding first OD region of the at least one GAA device; and

at least one second OD region contact element, each first OD region contact element electrically coupled to a corresponding second OD region of the at least one GAA device.

18. The semiconductor structure of claim 17, wherein

a number of GAA devices in the first GAA structure that provides the first OD region to the second OD region traversal in the first current path is substantially the same as a number of GAA devices in the second GAA structure that provides the first OD region to the second OD region traversal in the second current path;

a number of GAA devices in the first GAA structure that provides the second OD region to the first OD region traversal in the first current path is substantially the same as a number of GAA devices in the second GAA structure that provides the second OD region to the first OD region traversal in the second current path;

a number of the at least one first OD region contact element in the first current path is substantially the same as a number of the at least one first OD region contact element in the second current path; and

a number of the at least one second OD region contact element in the first current path is substantially the same as a number of the at least one second OD region contact element in the first current path.

19. The semiconductor structure of claim 17, wherein

the at least one first OD contact element and the at least one second OD contact element are configured such that the at least one first OD contact element is substantially parallel to the at least one second OD contact element, or the at least one first OD contact element is substantially orthogonal to the at least one second OD contact element.

20. The semiconductor structure of claim 11, wherein

the first GAA structure and the second GAA structure have for each corresponding GAA devices substantially a same of at least one of the following features:

a number of the at least one nanowire;

a number of rows of the at least one nanowire arranged in an array;

a number of nanowires in a row of the at least one nanowire arranged in the array;

a number of columns of the at least one nanowire arranged in the array; and

a number of nanowires in a column of the at least one nanowire arranged in the array; and

a shape of the at least one nanowire.

21. A layout for a first gate-all-around (GAA) structure and a second GAA structure configured to form corresponding first circuit and second circuit similar to each other, the layout comprising:

a first layer comprising at least one first oxide diffusion (OD) region of the first GAA structure and substantially a same number of at least one first OD region of the second GAA structure;

a second layer comprising at least one second OD region of the first GAA structure and substantially a same number of at least one second OD region of the second GAA structure; and

a third layer comprising for the first GAA structure and the second GAA structure substantially a same of at least one of the following features;

a number of at least one nanowire between each corresponding first OD region and second OD region of the first layer and the second layer;

a number of rows of the at least one nanowire arranged in an array between each corresponding first OD region and second OD region of the first layer and the second layer;

a number of nanowires in a row of the at least one nanowire arranged in the array between each corresponding first OD region and second OD region of the first layer and the second layer;

a number of columns of the at least one nanowire arranged in the array between each corresponding first OD region and second OD region of the first layer and the second layer; and

a number of nanowires in a column of the at least one nanowire arranged in the array between each corresponding first OD region and second OD region of the first layer and the second layer.

22. The layout of claim 21, wherein

the first GAA structure and the second GAA structure are arranged such that if the at least one first OD region and the at least one second OD region of the first GAA structure are arranged in length along a first direction, the at least one first OD region and the at least one second OD region of the second GAA structure are arranged in length along the first direction, arranged invertedly in length along the first direction, arranged in length along a second direction substantially orthogonal to the first direction, or arranged invertedly in length along the second direction.

23. The layout of claim 21, further comprising:

a fourth layer comprising at least one first OD region contact element of the first GAA structure and substantially a same number of at least one first OD region contact element of the second GAA structure;

a fifth layer comprising at least one second OD region contact element of the first GAA structure and substantially a same number of at least one second OD region contact element of the second GAA structure,

wherein

the at least one first OD region contact element of the first GAA structure overlaps with the at least one first OD region of the first GAA structure;

the at least one second OD region contact element of the first GAA structure overlaps with the at least one second OD region of the first GAA structure;

the at least one first OD region contact element of the second GAA structure overlaps with the at least one first OD region of the second GAA structure; and

the at least one second OD region contact element of the second GAA structure overlaps with the at least one second OD region of the second GAA structure.

24. The layout of claim 23, wherein

an orientation of the at least one first OD region contact element of the first GAA structure with respect to the at least one second OD region contact element of the first GAA structure is substantially a same as an orientation of the at least one first OD region contact element of the second GAA structure with respect to the at least one second OD region contact element of the second GAA structure.