Method for forming normally closed micromechanical device comprising a laterally movable element
First Claim
1. A method for forming a micromechanical device, the method comprising:
- providing a first substrate that defines a first plane, the first substrate comprising a first base substrate and a first element, the first element having a first end that is operable to move along a first direction that is substantially parallel with the first plane;
providing a second substrate that defines a second plane, the second substrate comprising a second base substrate and a first contact structure;
bonding the first substrate and the second substrate such that (1) the first plane and second plane are substantially parallel, (2) the first end is in physical contact with the first contact structure, (3) motion of the first end along the first direction moves the first end out of physical contact with the first contact structure, and (4) the first element is operatively coupled with an actuator operable for moving the first end along the first direction; and
removing at least one of the first base substrate and the second base substrate.
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Accused Products
Abstract
A micromechanical device and a method for forming the device is disclosed, wherein the micromechanical device has a laterally movable mechanically active element that has a quiescent position in which it is in physical contact with a second structural element. The device is fabricating by disposing the mechanically active element on a first substrate and disposing the second structural element on a second substrate. After the two substrates are aligned and joined such that both the mechanically active element and the second structural element are in contact and affixed to one of the substrates, the other substrate is removed leaving all structural elements disposed on a single substrate.
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Citations
8 Claims
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1. A method for forming a micromechanical device, the method comprising:
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providing a first substrate that defines a first plane, the first substrate comprising a first base substrate and a first element, the first element having a first end that is operable to move along a first direction that is substantially parallel with the first plane; providing a second substrate that defines a second plane, the second substrate comprising a second base substrate and a first contact structure; bonding the first substrate and the second substrate such that (1) the first plane and second plane are substantially parallel, (2) the first end is in physical contact with the first contact structure, (3) motion of the first end along the first direction moves the first end out of physical contact with the first contact structure, and (4) the first element is operatively coupled with an actuator operable for moving the first end along the first direction; and removing at least one of the first base substrate and the second base substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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Specification