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Low power consumption type gas sensor and method for manufacturing the same

  • US 9,285,332 B2
  • Filed: 04/11/2014
  • Issued: 03/15/2016
  • Est. Priority Date: 12/12/2011
  • Status: Active Grant
First Claim
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1. A gas sensor comprising:

  • a substrate;

    an electrode formed on the substrate; and

    a gas-sensing layer formed on the electrode,wherein the gas-sensing layer is a self-heating nanocolumnar structure having nanocolumns formed on the electrode and inclined with respect to the electrode with an angle of 60-89° and

    gas diffusion pores formed between the nanocolumns.

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