Materials for near field transducers and near field transducers containing same

• US 9,286,931 B2
• Filed: 06/24/2014
• Issued: 03/15/2016
• Est. Priority Date: 06/24/2013
• Status: Active Grant

• Current Assignee: Seagate Technology LLC (Seagate Technology Holdings Plc)
• Original Assignee: Seagate Technology LLC (Seagate Technology Holdings Plc)
• Inventors: Jayashankar, Sethuraman, Kautzky, Michael C.
• Primary Examiner(s): Neyzari, Ali
• Application Number:
  US14/313,551
• Publication Number:
  US 20140374376A1
• Time in Patent Office: 630 Days
• Field of Search: 369/13.33, 369/13.13, 369/13.02, 369/13.01, 369/13.32, 369/13.22
• US Class Current: 1/1
• CPC Class Codes: B32B 15/01 all layers being exclusively metallic making layered metal workpieces by pressure cladding B23K20/22; making coatings with a metallic material characterised by its composition C23C30/00
• CPC Class Codes: B32B 15/018 one layer being formed of a noble metal or a noble metal alloy
• CPC Class Codes: C01F 7/00 Compounds of aluminium
• CPC Class Codes: C01G 5/00 Compounds of silver
• CPC Class Codes: C22C 11/04 with copper as the next major constituent
• CPC Class Codes: C22C 13/00 Alloys based on tin
• CPC Class Codes: C22C 18/02 with copper as the next major constituent
• CPC Class Codes: C22C 19/03 based on nickel
• CPC Class Codes: C22C 19/07 based on cobalt
• CPC Class Codes: C22C 20/00 Alloys based on cadmium
• CPC Class Codes: C22C 21/00 Alloys based on aluminium
• CPC Class Codes: C22C 21/003 containing at least 2.6% of one or more of the elements: tin, lead, antimony, bismuth, cadmium, and titanium
• CPC Class Codes: C22C 21/02 with silicon as the next major constituent
• CPC Class Codes: C22C 21/06 with magnesium as the next major constituent
• CPC Class Codes: C22C 21/10 with zinc as the next major constituent
• CPC Class Codes: C22C 22/00 Alloys based on manganese
• CPC Class Codes: C22C 24/00 Alloys based on an alkali or an alkaline earth metal
• CPC Class Codes: C22C 27/00 Alloys based on rhenium or a refractory metal not mentioned in groups C22C14/00 or C22C16/00
• CPC Class Codes: C22C 27/02 Alloys based on vanadium, niobium, or tantalum
• CPC Class Codes: C22C 27/025 alloys based on vanadium
• CPC Class Codes: C22C 27/06 : Alloys based on chromium
• CPC Class Codes: C22C 28/00 : Alloys based on a metal not provided for in groups C22C5/00 - C22C27/00
• CPC Class Codes: C22C 30/02 : containing copper
• CPC Class Codes: C22C 38/06 : containing aluminium
• CPC Class Codes: C22C 5/02 : Alloys based on gold
• CPC Class Codes: C22C 5/04 : Alloys based on a platinum group metal
• CPC Class Codes: C22C 5/06 : Alloys based on silver
• CPC Class Codes: C22C 5/10 : with cadmium as the next major constituent
• CPC Class Codes: C22C 9/00 : Alloys based on copper
• CPC Class Codes: C22C 9/02 : with tin as the next major constituent
• CPC Class Codes: C22C 9/04 : with zinc as the next major constituent
• CPC Class Codes: C22C 9/05 : with manganese as the next major constituent
• CPC Class Codes: C22C 9/06 : with nickel or cobalt as the next major constituent
• CPC Class Codes: C22C 9/08 : with lead as the next major constituent
• CPC Class Codes: C22C 9/10 : with silicon as the next major constituent
• CPC Class Codes: C23C 14/5833 : Ion beam bombardment
• CPC Class Codes: G11B 13/08 : using near-field interactions or transducing means and at least one other method or means for recording or reproducing
• CPC Class Codes: G11B 2005/0021 : Thermally assisted recording using an auxiliary energy source for heating the recording layer locally to assist the magnetization reversal
• CPC Class Codes: G11B 5/3106 : where the integrated or assembled structure comprises means for conditioning against physical detrimental influence, e.g. wear, contamination G11B5/3133 takes precedence
• CPC Class Codes: G11B 5/314 : where the layers are extra layers normally not provided in the transducing structure, e.g. optical layers G11B5/3196 takes precedence
• CPC Class Codes: G11B 5/3163 : Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
• CPC Class Codes: G11B 5/4866 : the arm comprising an optical waveguide, e.g. for thermally-assisted recording
• CPC Class Codes: G11B 5/6088 : Optical waveguide in or on flying head
• CPC Class Codes: G11B 7/1387 : using the near-field effect
• CPC Class Codes: G11B 7/24059 : specially adapted for near-field recording or reproduction

Abstract

A method of forming a near field transducer (NFT) layer, the method including depositing a film of a primary element, the film having a film thickness and a film expanse; and implanting at least one secondary element into the primary element, wherein the NFT layer includes the film of the primary element doped with the at least one secondary element.

Claims

1. A method of forming a peg of a near field transducer (NFT), the method comprising:

depositing a primary element to form a primary element film or layer;

defining a peg of the NFT from the primary element film or layer;

forming the peg of the NFT;

encapsulating the peg with an encapsulation layer;

defining an implant; and

implanting at least one secondary element in the implant area of the primary element film to form the peg of the NFT.

2. The method according to claim 1, wherein the step of defining the implant comprises using a mask so that only the implant area is exposed.

3. The method according to claim 1 further comprising annealing after implanting the at least one secondary element.

4. The method according to claim 3 further comprising at least one additional implanting step and at least one additional annealing step.

5. The method according to claim 1 further comprising removing at least a portion of the encapsulation layer after implanting the at least one secondary element.

6. The method according to claim 5 further comprising depositing a dielectric material after removing at least a portion of the encapsulation layer.

7. A method of forming a plurality of magnetic heads, each of the magnetic heads comprising an alloyed peg of a NFT, the method comprising:

depositing a primary element on a substrate to form a primary element film or layer;

forming a plurality of pegs of the NFTs;

slicing the substrate into rows, each row containing a plurality of pegs;

depositing head overcoat material on each row; and

implanting at least one secondary element in the primary element film of the peg to form an alloyed peg of a NFT.

8. The method according to claim 7, wherein the step of implanting comprises using a mask so that only the implant area is exposed to the at least one secondary element.

9. The method according to claim 7 further comprising depositing additional head overcoat material after implanting the at least one secondary element.