System and methods for plasma application

• US 9,287,091 B2
• Filed: 03/26/2015
• Issued: 03/15/2016
• Est. Priority Date: 05/30/2008
• Status: Active Grant

• Current Assignee: Colorado State University Research Foundation
• Original Assignee: Colorado State University Research Foundation
• Inventors: Koo, Il-Gyo, Moore, Cameron A., Collins, George J., Cho, Jin-Hoon
• Primary Examiner(s): Owens, Douglas W
• Assistant Examiner(s): COOPER, JONATHAN G
• Application Number:
  US14/669,028
• Publication Number:
  US 20150200076A1
• Time in Patent Office: 355 Days
• Field of Search: 31511111-11192, 606/41, 606/34, 606/45, 606/49, 606/50, 606/9, 606/101, 2191214-12152
• US Class Current: 1/1
• CPC Class Codes: A61B 18/042 using additional gas becoming plasma
• CPC Class Codes: H01J 2237/332 Coating
• CPC Class Codes: H01J 2237/334 Etching
• CPC Class Codes: H01J 37/32018 Glow discharge
• CPC Class Codes: H01J 37/32366 Localised processing
• CPC Class Codes: H01J 37/3244 Gas supply means
• CPC Class Codes: H01J 37/32449 Gas control, e.g. control of the gas flow
• CPC Class Codes: H01J 37/32541 Shape
• CPC Class Codes: H01J 37/32559 Protection means, e.g. coatings
• CPC Class Codes: H01J 37/32568 Relative arrangement or disposition of electrodes; moving means
• CPC Class Codes: H01J 37/32577 Electrical connecting means
• CPC Class Codes: H05H 1/2431 using cylindrical electrodes, e.g. rotary drums
• CPC Class Codes: H05H 1/2441 characterised by the physical-chemical properties of the dielectric, e.g. porous dielectric
• CPC Class Codes: H05H 1/2443 the plasma fluid flowing through a dielectric tube
• CPC Class Codes: H05H 2245/32 Surgery, e.g. scalpels, blades or bistoury; Treatments inside the body

Abstract

A plasma system includes a plasma device, an ionizable media source, and a power source. The plasma device includes an inner electrode and an outer electrode coaxially disposed around the inner electrode. The inner electrode includes a distal portion and an insulative layer that covers at least a portion of the inner electrode. The ionizable media source is coupled to the plasma device and is configured to supply ionizable media thereto. The power source is coupled to the inner and outer electrodes, and is configured to ignite the ionizable media at the plasma device to form a plasma effluent having an electron sheath layer about the exposed distal portion.

Claims

1. A plasma system, comprising:

a plasma device including;

an outer electrode having an inner surface and a first coating including a first type of material, the first coating disposed on at least a portion of the inner surface; and

an inner electrode disposed within the outer electrode and having an outer surface and a second coating including a second type of material different from the first type of material, the second coating disposed on at least a portion of the outer surface;

an ionizable media source coupled to the plasma device and configured to supply ionizable media thereto; and

a power source coupled to the inner electrode and the outer electrode and configured to ignite the ionizable media to form a plasma effluent having an electron sheath layer about a distal end portion of the inner electrode.

2. The plasma system according to claim 1, wherein the first type of material is a catalyst, and the second type of material is configured to promote increased secondary electron emission.

3. The plasma system according to claim 1, wherein the plasma device defines an opening between the outer surface of the inner electrode and the inner surface of the outer electrode.

4. The plasma system according to claim 1, wherein the inner electrode and the outer electrode are formed from an alloy, and the first type of material and the second type of material include at least one of an oxide or a nitride of the alloy of the inner electrode or the outer electrode.

5. The plasma system according to claim 4, further comprising a precursor source coupled to the plasma device and configured to provide at least one of an oxygen or a nitrogen to the plasma device to replenish at least one of the first type of material or the second type of material.

6. The plasma system according to claim 1, wherein at least one of the first coating or the second coating includes a plurality of nanostructure pores.

7. The plasma system according to claim 6, wherein at least a portion of the plurality of nanostructure pores includes precursor feedstock disposed therein.

8. The plasma system according to claim 1, wherein the inner surface of the outer electrode defines a plurality of grooves therein, the plurality of grooves having the first coating disposed therein.

9. The plasma system according to claim 1, wherein the distal end portion of the inner electrode extends distally past a distal end of the outer electrode, the second coating covering the inner electrode up to the distal end portion of the inner electrode such that the distal end portion of the inner electrode is un-insulated.

10. The plasma system according to claim 1, wherein the plasma device further includes an electrode spacer slidably disposed between the inner electrode and the outer electrode.

11. A plasma device configured to receive ionizable media, comprising:

an outer electrode having an inner surface and a first coating including a first type of material, the first coating disposed on at least a portion of the inner surface; and

an inner electrode disposed within the outer electrode and having an outer surface and a second coating including a second type of material different from the first type of material, the second coating disposed on at least a portion of the outer surface.

12. The plasma device according to claim 11, wherein the first type of material is a catalyst, and the second type of material is configured to promote increased secondary electron emission.

13. The plasma device according to claim 11, wherein an opening is defined between the outer surface of the inner electrode and the inner surface of the outer electrode.

14. The plasma device according to claim 11, wherein the inner electrode and the outer electrode are formed from an alloy, and the first type of material and the second type of material are formed from at least one of an oxide or a nitride of the alloy of the inner electrode or the outer electrode.

15. The plasma device according to claim 11, wherein at least one of the first coating or the second coating includes a plurality of nanostructure pores.

16. The plasma device according to claim 15, wherein the plurality of nanostructure pores includes precursor feedstock disposed therein.

17. The plasma device according to claim 11, wherein the inner surface of the outer electrode defines a plurality of grooves therein, the plurality of grooves having the first coating disposed therein.

18. The plasma device according to claim 11, wherein the inner electrode includes a distal end portion extending distally past a distal end of the outer electrode, the second coating covering the inner electrode up to the distal end portion of the inner electrode such that the distal end portion of the inner electrode is un-insulated.