Substrate for carbon nanotube growth and method for manufacturing the same
First Claim
1. A method for manufacturing a substrate for carbon nanotube growth comprising a base plate and a catalyst disposed on the base plate, the method comprising:
- a primary metal sputtering step of sputtering on the base plate a first metal which forms the catalyst;
a primary oxidizing step of, after the primary metal sputtering step, oxidizing a surface of the first metal to form a first metal oxide layer on the surface of the first metal;
a form-defining material sputtering step of, after the primary oxidizing step, sputtering on the base plate a form-defining material which defines a form which allows the catalyst to be dispersed and arranged;
a secondary metal sputtering step of, after the form-defining material sputtering step, sputtering on the form-defining material a second metal which forms the catalyst; and
a secondary oxidizing step of, after the secondary metal sputtering step, oxidizing a surface of the catalyst in which the first metal and the second metal is integrated to form a catalyst oxide layer on the surface of the catalyst,wherein the secondary metal sputtering step causes the form-defining material to reach an area below the first metal, including the first metal oxide layer on the surface of the first metal, thereby being integrated with the base plate.
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Accused Products
Abstract
Provided is a substrate for carbon nanotube growth in which no metal particles as a catalyst aggregates and a method for manufacturing the substrate. A substrate for carbon nanotube growth 1 includes a base plate 2, a catalyst 3, a form-defining material layer 4 which allows the catalyst 3 to be dispersed and arranged, and a covering layer 5 which has a metal oxide to cover the catalyst. A method for manufacturing a substrate for carbon nanotube growth 1 includes a step of sputtering on a base plate 2 a metal which forms a catalyst 3 and oxidizing the surface of the metal, a step of sputtering a form-defining material on the base plate 2, and a step of further sputtering on the form-defining material a metal which forms a catalyst 3 and oxidizing the surface of the metal.
7 Citations
10 Claims
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1. A method for manufacturing a substrate for carbon nanotube growth comprising a base plate and a catalyst disposed on the base plate, the method comprising:
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a primary metal sputtering step of sputtering on the base plate a first metal which forms the catalyst; a primary oxidizing step of, after the primary metal sputtering step, oxidizing a surface of the first metal to form a first metal oxide layer on the surface of the first metal; a form-defining material sputtering step of, after the primary oxidizing step, sputtering on the base plate a form-defining material which defines a form which allows the catalyst to be dispersed and arranged; a secondary metal sputtering step of, after the form-defining material sputtering step, sputtering on the form-defining material a second metal which forms the catalyst; and a secondary oxidizing step of, after the secondary metal sputtering step, oxidizing a surface of the catalyst in which the first metal and the second metal is integrated to form a catalyst oxide layer on the surface of the catalyst, wherein the secondary metal sputtering step causes the form-defining material to reach an area below the first metal, including the first metal oxide layer on the surface of the first metal, thereby being integrated with the base plate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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Specification