Spectroscopic measurement device and spectroscopic measurement method

• US 9,291,502 B2
• Filed: 07/02/2013
• Issued: 03/22/2016
• Est. Priority Date: 07/04/2012
• Status: Active Grant

• Current Assignee: Seiko Epson Corporation (Seiko Group)
• Original Assignee: Seiko Epson Corporation (Seiko Group)
• Inventors: Nishimura, Teruyuki
• Primary Examiner(s): Lyons, Michael A
• Application Number:
  US13/933,726
• Publication Number:
  US 20140009761A1
• Time in Patent Office: 994 Days
• US Class Current: 1/1
• CPC Class Codes: G01J 3/0264 Electrical interface; User interface
• CPC Class Codes: G01J 3/027 Control of working procedures of a spectrometer; Failure detection; Bandwidth calculation
• CPC Class Codes: G01J 3/26 using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
• CPC Class Codes: G01J 3/433 Modulation spectrometry; Derivative spectrometry
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26

Abstract

A spectroscopic measurement device includes a variable wavelength interference filter provided with a first reflecting film, a second reflecting film, and an electrostatic actuator for changing a gap amount of a gap between the first reflecting film and the second reflecting film, a detection section adapted to detect the light intensity of the light taken out by the variable wavelength interference filter, a voltage setting section and a voltage control section for applying an analog voltage varying continuously to the electrostatic actuator, a voltage monitoring section for monitoring the voltage applied to the electrostatic actuator, a storage section for storing V-λ data, and a light intensity acquisition section for obtaining the light intensity detected by the detection section at a timing at which the light transmitted through the variable wavelength interference filter has the measurement target wavelength based on the voltage monitored by the voltage monitoring section.

Claims

1. A spectroscopic measurement device comprising:

a first substrate;

a second substrate opposed to the first substrate;

a first reflecting film provided to the first substrate;

a second reflecting film provided to the second substrate, and opposed to the first reflecting film across a predetermined gap;

a gap amount changing section adapted to change the gap amount of the gap by deflecting the second substrate by applying a continuously varying analog voltage;

a detection section adapted to detect a light intensity of light interfered between the first reflecting film and the second reflecting film;

a filter drive section adapted to apply the continuously varying analog voltage to the gap amount changing section;

a voltage monitoring section adapted to monitor the continuously varying analog voltage applied to the gap amount changing section;

a storage section adapted to store V-λ

data corresponding to a relationship between the continuously varying analog voltage applied to the gap amount changing section and a wavelength of the light taken out by the first reflecting film and the second reflecting film; and

a light intensity acquisition section adapted to obtain the light intensity detected by the detection section at a timing at which the light taken out by the first reflecting film and the second reflecting film has a measurement target wavelength based on the continuously varying analog voltage monitored by the voltage monitoring section.

2. The spectroscopic measurement device according to claim 1, wherein

the filter drive section applies the continuously varying analog voltage, a variation pattern of which with time is a predetermined fixed pattern, to the gap amount changing section,

the V-λ

data is data representing a relationship between the continuously varying analog voltage applied to the gap amount changing section and the wavelength of the light taken out by the first reflecting film and the second reflecting film at the timing at which the continuously varying analog voltage is applied to the gap amount changing section when applying the continuously varying analog voltage with the variation pattern to the gap amount changing section, and

the light intensity acquisition section obtains a target voltage corresponding to the measurement target wavelength based on the V-λ

data, and obtains the light intensity detected by the detection section at a timing at which the continuously varying analog voltage monitored by the voltage monitoring section reaches the target voltage.

3. The spectroscopic measurement device according to claim 1, wherein

the filter drive section applies the continuously varying analog voltage, a variation pattern of which with time is a predetermined fixed pattern, to the gap amount changing section,

the V-λ

data is data representing a relationship between the continuously varying analog voltage applied to the gap amount changing section and the wavelength of the light taken out by the first reflecting film and the second reflecting film in a state in which a fluctuation of the gap is converged after the continuously varying analog voltage is applied to the gap amount changing section,

the storage section stores a delay time from when a predetermined voltage is applied to the gap amount changing section until the light with a wavelength corresponding to a voltage of the V-λ

data is taken out by the first reflecting film and the second reflecting film when applying the continuously varying analog voltage of the variation pattern to the gap amount changing section, and

the light intensity acquisition section obtains the light intensity detected by the detection section at a timing at which the delay time elapses from a timing at which the continuously varying voltage monitored by the voltage monitoring section reaches a target voltage corresponding to the measurement target wavelength.

4. The spectroscopic measurement device according to claim 1, wherein

the filter drive section applies a periodic drive voltage adapted to periodically move the second substrate back and forth to the gap amount changing section as the continuously varying analog voltage.

5. The spectroscopic measurement device according to claim 4, wherein

a period of the periodic drive voltage is longer than a natural period inherent in the second substrate.

6. The spectroscopic measurement device according to claim 4, wherein

the light intensity acquisition section obtains the light intensity of the light with the measurement target wavelength a plurality of times, and takes an average value of the light intensity taken the plurality of times as a measurement value.

7. The spectroscopic measurement device according to claim 1, wherein

the filter drive section varies the gap amount from an initial gap amount with no deflection of the second substrate to a predetermined minimum gap amount, and

the minimum gap amount is smaller than a lower limit gap amount corresponding to a minimum wavelength in a measurement target wavelength band.

8. A spectroscopic measurement device comprising:

a first reflecting film and a second reflecting film opposed to each other across a gap;

a gap amount changing section adapted to change a gap amount of the gap;

a detection section adapted to detect a light intensity of light interfered between the first reflecting film and the second reflecting film;

a filter drive section adapted to apply a continuously varying analog voltage to the gap amount changing section;

a voltage monitoring section adapted to monitor the continuously varying analog voltage applied to the gap amount changing section;

a storage section adapted to store V-λ

data corresponding to a relationship between the continuously varying analog voltage applied to the gap amount changing section and a wavelength of the light taken out by the first reflecting film and the second reflecting film; and

a light intensity acquisition section adapted to obtain the light intensity detected by the detection section at a timing at which the light taken out by the first reflecting film and the second reflecting film has a measurement target wavelength based on the continuously varying analog voltage monitored by the voltage monitoring section.

9. The spectroscopic measurement device according to claim 8, wherein

the filter drive section applies the continuously varying analog voltage, a variation pattern of which with time is a predetermined fixed pattern, to the gap amount changing section,

the V-λ

data is data representing a relationship between the continuously varying analog voltage applied to the gap amount changing section and the wavelength of the light taken out by the first reflecting film and the second reflecting film at the timing at which the continuously varying analog voltage is applied to the gap amount changing section when applying the continuously varying analog voltage with the variation pattern to the gap amount changing section, and

the light intensity acquisition section obtains a target voltage corresponding to the measurement target wavelength based on the V-λ

data, and obtains the light intensity detected by the detection section at a timing at which the continuously varying analog voltage monitored by the voltage monitoring section reaches the target voltage.

10. The spectroscopic measurement device according to claim 8, wherein

the filter drive section applies the continuously varying analog voltage, a variation pattern of which with time is a predetermined fixed pattern, to the gap amount changing section,

the V-λ

data is data representing a relationship between the continuously varying analog voltage applied to the gap amount changing section and the wavelength of the light taken out by the first reflecting film and the second reflecting film in a state in which a fluctuation of the gap is converged after the continuously varying analog voltage is applied to the gap amount changing section,

the storage section stores a delay time from when a predetermined voltage is applied to the gap amount changing section until the light with a wavelength corresponding to a voltage of the V-λ

data is taken out by the first reflecting film and the second reflecting film when applying the continuously varying analog voltage of the variation pattern to the gap amount changing section, and

the light intensity acquisition section obtains the light intensity detected by the detection section at a timing at which the delay time elapses from a timing at which the continuously varying analog voltage monitored by the voltage monitoring section reaches a target voltage corresponding to the measurement target wavelength.

11. A spectroscopic measurement method comprising:

changing a gap amount of a gap between a first reflecting film and a second reflecting film by applying a continuously varying analog voltage to a gap amount changing section;

detecting a light intensity of light interfered between the first reflecting film and the second reflecting film;

monitoring the applied continuously varying analog voltage to obtain a monitored voltage;

determining a timing at which the light interfered between the first reflecting film and the second reflecting film has a measurement target wavelength based on the monitored voltage; and

obtaining the detected light intensity at the timing.