Spectroscopic measurement device and spectroscopic measurement method
First Claim
1. A spectroscopic measurement device comprising:
- a first substrate;
a second substrate opposed to the first substrate;
a first reflecting film provided to the first substrate;
a second reflecting film provided to the second substrate, and opposed to the first reflecting film across a predetermined gap;
a gap amount changing section adapted to change the gap amount of the gap by deflecting the second substrate by applying a continuously varying analog voltage;
a detection section adapted to detect a light intensity of light interfered between the first reflecting film and the second reflecting film;
a filter drive section adapted to apply the continuously varying analog voltage to the gap amount changing section;
a voltage monitoring section adapted to monitor the continuously varying analog voltage applied to the gap amount changing section;
a storage section adapted to store V-λ
data corresponding to a relationship between the continuously varying analog voltage applied to the gap amount changing section and a wavelength of the light taken out by the first reflecting film and the second reflecting film; and
a light intensity acquisition section adapted to obtain the light intensity detected by the detection section at a timing at which the light taken out by the first reflecting film and the second reflecting film has a measurement target wavelength based on the continuously varying analog voltage monitored by the voltage monitoring section.
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Accused Products
Abstract
A spectroscopic measurement device includes a variable wavelength interference filter provided with a first reflecting film, a second reflecting film, and an electrostatic actuator for changing a gap amount of a gap between the first reflecting film and the second reflecting film, a detection section adapted to detect the light intensity of the light taken out by the variable wavelength interference filter, a voltage setting section and a voltage control section for applying an analog voltage varying continuously to the electrostatic actuator, a voltage monitoring section for monitoring the voltage applied to the electrostatic actuator, a storage section for storing V-λ data, and a light intensity acquisition section for obtaining the light intensity detected by the detection section at a timing at which the light transmitted through the variable wavelength interference filter has the measurement target wavelength based on the voltage monitored by the voltage monitoring section.
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Citations
11 Claims
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1. A spectroscopic measurement device comprising:
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a first substrate; a second substrate opposed to the first substrate; a first reflecting film provided to the first substrate; a second reflecting film provided to the second substrate, and opposed to the first reflecting film across a predetermined gap; a gap amount changing section adapted to change the gap amount of the gap by deflecting the second substrate by applying a continuously varying analog voltage; a detection section adapted to detect a light intensity of light interfered between the first reflecting film and the second reflecting film; a filter drive section adapted to apply the continuously varying analog voltage to the gap amount changing section; a voltage monitoring section adapted to monitor the continuously varying analog voltage applied to the gap amount changing section; a storage section adapted to store V-λ
data corresponding to a relationship between the continuously varying analog voltage applied to the gap amount changing section and a wavelength of the light taken out by the first reflecting film and the second reflecting film; anda light intensity acquisition section adapted to obtain the light intensity detected by the detection section at a timing at which the light taken out by the first reflecting film and the second reflecting film has a measurement target wavelength based on the continuously varying analog voltage monitored by the voltage monitoring section. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A spectroscopic measurement device comprising:
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a first reflecting film and a second reflecting film opposed to each other across a gap; a gap amount changing section adapted to change a gap amount of the gap; a detection section adapted to detect a light intensity of light interfered between the first reflecting film and the second reflecting film; a filter drive section adapted to apply a continuously varying analog voltage to the gap amount changing section; a voltage monitoring section adapted to monitor the continuously varying analog voltage applied to the gap amount changing section; a storage section adapted to store V-λ
data corresponding to a relationship between the continuously varying analog voltage applied to the gap amount changing section and a wavelength of the light taken out by the first reflecting film and the second reflecting film; anda light intensity acquisition section adapted to obtain the light intensity detected by the detection section at a timing at which the light taken out by the first reflecting film and the second reflecting film has a measurement target wavelength based on the continuously varying analog voltage monitored by the voltage monitoring section. - View Dependent Claims (9, 10)
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11. A spectroscopic measurement method comprising:
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changing a gap amount of a gap between a first reflecting film and a second reflecting film by applying a continuously varying analog voltage to a gap amount changing section; detecting a light intensity of light interfered between the first reflecting film and the second reflecting film; monitoring the applied continuously varying analog voltage to obtain a monitored voltage; determining a timing at which the light interfered between the first reflecting film and the second reflecting film has a measurement target wavelength based on the monitored voltage; and obtaining the detected light intensity at the timing.
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Specification