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Method and apparatus for monitoring a charged particle beam

  • US 9,293,310 B2
  • Filed: 03/17/2014
  • Issued: 03/22/2016
  • Est. Priority Date: 03/15/2013
  • Status: Active Grant
First Claim
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1. An ionization chamber comprising:

  • a first electrode plane comprising a first plurality of conductive elements;

    a second electrode plane substantially parallel to said first electrode plane, the second electrode plane comprising a second plurality of conductive elements oriented substantially orthogonally to first plurality of conductive elements;

    a flexible hermetic seal preventing mixing of a gas within said ionization chamber with surrounding ambient gases;

    one or more environmental sensors integrated within said ionization chamber and sensing one or more corresponding aspects of said gas within said ionization chamber; and

    a desiccant cartridge disposed in the interior of said ionization chamber.

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