Substrate with antireflection coating and method for producing same
First Claim
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1. A coated substrate comprising:
- a substrate; and
a multilayer antireflection coating on at least one side of the substrate, the multilayer antireflection coating comprising layers having a higher refractive index alternated with layers having a lower refractive index, wherein the layers having a lower refractive index are formed of silicon oxide with a proportion of aluminum and have a first ratio of an amount of aluminum to an amount of silicon that is greater than 0.05, but with the amount of silicon being predominant relative to the amount of aluminum, and wherein the layers having a higher refractive index include a material selected from the group consisting of a silicide, an oxide, and a nitride, andwherein the multilayer antireflection coating has the layer having the lower refractive index as an upper surface so that the upper surface has an average roughness and a root mean squared roughness of less than 1.5 nm each, based on an area of one square micrometer.
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Abstract
A substrate is provided with an abrasion resistance antireflection coating. The coated substrate includes a multilayer antireflection coating on at least one side. The coating has layers with different refractive indices, wherein higher refractive index layers alternate with lower refractive index layers. The layers having a lower refractive index are formed of silicon oxide with a proportion of aluminum, with a ratio of the amounts of aluminum to silicon is greater than 0.05, preferably greater than 0.08, but with the amount of silicon predominant relative to the amount of aluminum. The layers having a higher refractive index include a silicide, an oxide, or a nitride.
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12 Claims
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1. A coated substrate comprising:
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a substrate; and a multilayer antireflection coating on at least one side of the substrate, the multilayer antireflection coating comprising layers having a higher refractive index alternated with layers having a lower refractive index, wherein the layers having a lower refractive index are formed of silicon oxide with a proportion of aluminum and have a first ratio of an amount of aluminum to an amount of silicon that is greater than 0.05, but with the amount of silicon being predominant relative to the amount of aluminum, and wherein the layers having a higher refractive index include a material selected from the group consisting of a silicide, an oxide, and a nitride, and wherein the multilayer antireflection coating has the layer having the lower refractive index as an upper surface so that the upper surface has an average roughness and a root mean squared roughness of less than 1.5 nm each, based on an area of one square micrometer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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Specification