Method and system for pump priming

• US 9,297,374 B2
• Filed: 10/20/2011
• Issued: 03/29/2016
• Est. Priority Date: 10/20/2010
• Status: Active Grant

• Current Assignee: Entegris Incorporated
• Original Assignee: Entegris Incorporated
• Inventors: Braggin, Jennifer M., Inui, Shiho, Chow, Wailup, Wu, Aiwen
• Primary Examiner(s): Beretheaud, Peter J
• Application Number:
  US13/277,684
• Publication Number:
  US 20120128505A1
• Time in Patent Office: 1,622 Days
• Field of Search: 417/53, 417/199.2, 417/200, 417/26, 417/237, 417/313, 222/72, 222/189.06, 222/189.09, 222/189.11, 137/884
• US Class Current: 1/1
• CPC Class Codes: F04B 49/065 and making use of computers
• CPC Class Codes: F04B 53/20 Filtering
• CPC Class Codes: F04D 13/06 the pump being electrically driven
• CPC Class Codes: H01L 21/67017 Apparatus for fluid treatment H01L21/67126, H01L21/6715 take precedence

Abstract

Systems and methods relating to filtration in a pump are described. Even more particularly, systems and methods relate to optimizing operating routines of a pump based on the filter used with the pump. A system controlling a pump can receive filter information and process fluid information and select a priming routine for the filter based on the filter information and process fluid information. The pump can be operated according to the selected priming routine that includes a back pressure step to pressurize the filter from downstream. Systems and methods relating to filtration in a pump are described. Even more particularly, systems and methods relate to optimizing operating routines of a pump based on the filter used with the pump. A system controlling a pump can receive filter information and process fluid information and select a priming routine for the filter based on the filter information and process fluid information. The pump can be operated according to the selected priming routine that includes a back pressure step to pressurize the filter from downstream.

Claims

1. A pump for semiconductor manufacturing comprising:

one or more motors to draw fluid into an inlet of the pump and dispense fluid from an outlet of the pump;

a removable filter disposed in a fluid flow path between the pump inlet and the pump outlet;

a pump controller configured to select a priming routine from a set of priming routines based on a filter type and process fluid, wherein the set of priming routines comprises;

a first priming routine that includes a forward pressurization segment for a first type of removable filter; and

a second priming routine that includes a back pressurization segment for a second type of removable filter;

wherein the controller is configured to control the pump to perform the selected priming routine to prime the removable filter.

2. The pump of claim 1, wherein the pump controller is configured to select the first priming routine for a removable filter having a single filter membrane.

3. The pump of claim 1, wherein the pump controller is configured to select the second priming routine for the removable filter having multiple filter membranes.

4. The pump of claim 1, wherein controlling the pump to perform the selected priming routine when the second priming routine is selected comprises introducing a process fluid to the removable filter and back-pressurizing the removable filter for a predetermined period of time.

5. The pump of claim 4, wherein the pump comprises:

a feed chamber;

a dispense chamber;

an isolation valve between the feed chamber and the removable filter;

a barrier valve between the removable filter and the dispense chamber; and

a vent valve in fluid communication with the removable filter; and

wherein back-pressurizing the removable filter comprises pressurizing fluid in the dispense chamber with the isolation and vent valves closed and the barrier valve open.

6. The pump of claim 4, wherein the pump controller is configured to control the pump to back-pressurize the removable filter for 5-10 minutes.

7. The pump of claim 6, wherein the pump controller is configured to control the pump to back-pressurize the removable filter at a constant pressure of at least 5-25 psi.

8. The pump of claim 1, wherein the second priming routine further comprises pushing fluid through the removable filter prior to back-pressurizing the removable filter.

9. The pump of claim 1, wherein the second priming routine comprises a vent cycle, a purge-to-vent cycle, a first purge-to-vent cycle, a purge-to-inlet cycle, a back flush, and a second purge-to-vent cycle.

10. The pump of claim 9, wherein the vent cycle, purge-to-vent cycle and purge-to-inlet cycle occur before back-pressurizing the removable filter and the back flush and second purge-to-vent cycle occur after back pressurizing the removable filter.

11. A method for priming a filter in a semiconductor manufacturing pump comprising:

connecting a removable filter to the pump;

selecting a priming routine for the removable filter based on a filter type and process fluid;

operating the pump according to the selected priming routine, wherein the operating the pump according to the selected priming routine comprises introducing a process fluid to the removable filter and back-pressurizing the removable filter for a predetermined period of time.

12. The method of claim 11, further comprising back-pressurizing the removable filter for 5-10 minutes.

13. The method of claim 12, further comprising back-pressurizing the removable filter at a constant pressure of 5-25 psi.

14. The method of claim 11, wherein the selected routine further comprises a vent cycle, a purge-to-vent cycle, a first purge-to-vent cycle, a purge-to-inlet cycle, a back flush, and a second purge-to-vent cycle.

15. The method of claim 14, wherein the vent cycle, purge-to-vent cycle and purge-to-inlet cycle occur before back-pressurizing the removable filter and the back flush and second purge-to-vent cycle occur after back pressurizing the removable filter.

16. A computer program product comprising a non-transitory storage medium storing a set of computer executable instructions comprising instructions executable to:

receive filter information and process fluid information;

select a priming routine for the removable filter based on the filter information and process fluid information;

operate a pump according to the selected priming routine, wherein operating the pump according to the selected priming routine comprises introducing a process fluid to the removable filter and back-pressurizing the removable filter for a predetermined period of time.

17. The computer program product of claim 16, wherein back-pressurizing the removable filter comprises back-pressurize the removable filter for 5-10 minutes.

18. The computer program product of claim 17, wherein back-pressurizing the removable filter comprises back-pressurize the removable filter at a constant pressure of 5-25 psi.

19. The computer program product of claim 16, wherein the priming routine further comprises a vent cycle, a purge-to-vent cycle, a first purge-to-vent cycle, a purge-to-inlet cycle, a back flush, and a second purge-to-vent cycle.

20. The computer program product of claim 19, wherein the vent cycle, purge-to-vent cycle and purge-to-inlet cycle are performed multiple times before back-pressurizing the removable filter and the back flush and second purge-to-vent cycle occur after back pressurizing the removable filter.