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Photonic sensor and a method of manufacturing such a sensor

  • US 9,297,700 B2
  • Filed: 12/03/2012
  • Issued: 03/29/2016
  • Est. Priority Date: 12/03/2012
  • Status: Active Grant
First Claim
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1. A photonic sensor, comprising:

  • a platform supported over a substrate by at least one leg, wherein there is a gap between the platform and the substrate;

    a structure of the platform comprising dielectric material having a structure with reduced mass relative to a corresponding planar layer of dielectric material, the dielectric material comprising at least one of silicon oxide or silicon nitride;

    a metal layer of the platform configured to reflect radiation back to the dielectric material, wherein the gap is between the metal layer and the substrate, and wherein the metal layer is perforated; and

    a temperature sensor on the platform, wherein the temperature sensor is configured to sense a change in temperature due to absorption of radiation by the dielectric material of the platform.

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