Tilt mode accelerometer with improved offset and noise performance

• US 9,297,825 B2
• Filed: 03/05/2013
• Issued: 03/29/2016
• Est. Priority Date: 03/05/2013
• Status: Active Grant

• Current Assignee: Analog Devices, Inc.
• Original Assignee: Analog Devices, Inc.
• Inventors: Zhang, Xin, Samuels, Howard R., Judy, Michael W.
• Primary Examiner(s): CHAPMAN JR, JOHN E
• Application Number:
  US13/785,624
• Publication Number:
  US 20140251011A1
• Time in Patent Office: 1,120 Days
• Field of Search: 735/143.2
• US Class Current: 1/1
• CPC Class Codes: G01P 15/08 with conversion into electric or magnetic values
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 2015/0831 the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration
• CPC Class Codes: G01P 2015/0834 the mass constituting a pendulum having the pivot axis disposed symmetrically between the longitudinal ends, the center of mass being shifted away from the plane of the pendulum which includes the pivot axis

Abstract

A single-axis tilt-mode microelectromechanical accelerometer structure. The structure includes a substrate having a top surface defined by a first end and a second end. Coupled to the substrate is a first asymmetrically-shaped mass suspended above the substrate pivotable about a first pivot point on the substrate between the first end and the second end and a second asymmetrically-shaped mass suspended above the substrate pivotable about a second pivot point on the substrate between the first end and the second end. The structure also includes a first set of electrodes positioned on the substrate and below the first asymmetrically-shaped mass and a second set of electrodes positioned on the substrate and below the second asymmetrically-shaped mass.

Claims

1. A single-axis tilt-mode microelectromechanical accelerometer structure for measuring acceleration along a single axis, the accelerometer structure comprising:

a substrate having a top surface defining a plane;

a first asymmetrically-shaped mass suspended above the substrate pivotable about a first pivot axis and asymmetric about a first non-pivot axis, the first pivot axis and the first non-pivot axis being within a plane parallel to the plane of the substrate;

a first suspension structure mechanically coupled to the first asymmetrically shaped mass and the substrate, the first suspension structure positioned substantially at the center of mass about the first non-pivot axis of along the first pivot axis of the first asymmetrically shaped mass.

2. A single-axis tilt-mode microelectromechanical accelerometer structure according to claim 1, wherein the first non-pivot axis is perpendicular to the first pivot axis.

3. A single-axis tilt-mode microelectromechanical accelerometer structure according to claim 1, further comprising a second asymmetrically-shaped mass, the second asymmetrically shaped mass pivotable about a second pivot axis and asymmetrical about a second non-pivot axis wherein the second pivot axis and the non-pivot axis reside within the plane parallel to the plane of the substrate.

4. A single-axis tilt-mode microelectromechanical accelerometer structure according to claim 1, further comprising a second suspension structure mechanically coupled to the second asymmetrically-shaped mass, the second suspension structure positioned substantially at the center of mass of the second pivot axis of the second asymmetrically shaped mass.

5. A single-axis tilt-mode microelectromechanical accelerometer structure according to claim 3, further including:

a first anchor centrally positioned with respect to the first and second ends of the substrate and mechanically coupled to the first asymmetrically-shaped mass; and

a second anchor centrally positioned with respect to the first and second ends of the substrate and mechanically coupled to the second asymmetrically-shaped mass.

6. A single-axis tilt-mode microelectromechanical accelerometer structure according to claim 3 wherein the second mass is suspended above the substrate using one anchor.

7. A single-axis tilt-mode microelectromechanical accelerometer structure according to claim 3 wherein the first mass and the second mass each define a separate tilt-mode accelerometer.

8. A single-axis tilt-mode microelectromechanical accelerometer structure according to claim 3 further comprising:

a first set of electrodes positioned on the substrate and below the first asymmetrically-shaped mass wherein the first set of electrodes includes a plurality of electrodes that are equally positioned from the first pivot axis on the substrate.

9. A single-axis tilt-mode microelectromechanical accelerometer structure according to claim 8 further comprising a second set of electrodes wherein the second set of electrodes includes a plurality of electrodes that are equally positioned from the second pivot axis on the substrate.

10. A single-axis tilt-mode microelectromechanical accelerometer structure according to claim 9 wherein the first pivot axis and the second pivot axis are the same axis.

11. A single-axis tilt-mode microelectromechanical accelerometer structure according to claim 10 wherein the first set of electrodes includes at least two electrodes that are each equally positioned on opposite sides of the pivot axis and the second set of electrodes includes at least two electrodes that are each equally positioned on opposite sides of the pivot axis wherein an electrode from the first set of electrodes is cross-coupled with an electrode from the second set of electrodes on an opposite side of the pivot axis.

12. A single-axis tilt-mode microelectromechanical accelerometer structure according to claim 9 wherein the first and second sets of electrodes are electrically coupled in a differential mode.

13. A single-axis tilt-mode microelectromechanical accelerometer structure according to claim 1 wherein the first mass is suspended above the substrate using one anchor.

14. A single-axis tilt-mode microelectromechanical accelerometer structure comprising:

a substrate having a top surface;

a first tilt-mode sensor having an asymmetrically-shaped mass having a first pivot axis and a first non-pivot axis, the first pivot axis and the first non-pivot axis in a plane substantially parallel to the top surface of the substrate, the mass being asymmetrical about the first non-pivot axis and the first tilt-mode sensor coupled by an anchor to the substrate; and

a second tilt-mode sensor having an asymmetrical-shaped mass having a second pivot axis and a second non-pivot axis, the second pivot axis and the second non-pivot axis in a plane substantially parallel to the top surface of the substrate, the mass being asymmetrical about the second non-pivot axis and coupled by an anchor to the substrate;

and wherein the anchor of the first tilt-mode sensor is positioned substantially at the center of mass about the first non-pivot axis along the first pivot axis of the asymmetrically shaped mass.

15. A single-axis tilt-mode microelectromechanical accelerometer structure according to claim 14 further comprising:

circuitry electrically coupled to a first set of electrodes and to a second set of electrodes and to the first mass and the second mass, the circuitry configured to sense rotational movement of the first mass about an X-axis caused by Z-axis accelerations via changes in capacitance between the first mass and the corresponding first set of electrodes and sense rotational movement about the X-axis of the second mass caused by Z-axis accelerations via changes in capacitance between the second mass and the corresponding second set of electrodes wherein the first and second masses have an asymmetry about a Y-axis.

16. A single-axis tilt-mode microelectromechanical accelerometer structure for measuring acceleration along a single axis, the accelerometer structure comprising:

a substrate having a top surface defining a plane;

a first asymmetrically-shaped mass suspended above the substrate pivotable about a first pivot axis and asymmetrical about a first non-pivot axis where the first pivot axis and the first non-pivot axis reside in a plane substantially parallel to the top surface of the substrate;

a suspending means mechanically coupled to the first asymmetrically shaped mass and the substrate, the suspending means positioned substantially at the center of mass of the first non-pivoting axis of the first asymmetrically shaped mass.

17. A single-axis tilt-mode microelectromechanical accelerometer structure according to claim 16, further comprising a second asymmetrically-shaped mass suspended above the substrate pivotable about the first pivot axis and asymmetrical about a second non-pivot axis wherein the first pivot axis and the second non-pivot axis reside in a plane substantially parallel to the top surface of the substrate.

18. A single-axis tilt-mode micromechanical accelerometer structure according to claim 17, further comprising:

a suspending means mechanically coupled to the second asymmetrically shaped mass and the substrate, the suspending means positioned substantially at the center of mass of a non-pivot axis of the second asymmetrically shaped mass along the first pivot axis.

19. A single-axis tilt-mode microelectromechanical accelerometer structure according to claim 18 further comprising:

a first set of electrodes positioned on the substrate and below the first asymmetrically-shaped mass.

20. A single-axis tilt-mode microelectromechanical accelerometer structure according to claim 19 further comprising a second set of electrodes positioned on the substrate and below the second asymmetrically-shaped mass.

21. A single-axis tilt-mode microelectromechanical accelerometer structure according to claim 20 wherein an electrode from the first set of electrodes is cross-coupled with an electrode from the second set of electrodes on an opposite side of the pivot axis.