Tilt mode accelerometer with improved offset and noise performance
First Claim
1. A single-axis tilt-mode microelectromechanical accelerometer structure for measuring acceleration along a single axis, the accelerometer structure comprising:
- a substrate having a top surface defining a plane;
a first asymmetrically-shaped mass suspended above the substrate pivotable about a first pivot axis and asymmetric about a first non-pivot axis, the first pivot axis and the first non-pivot axis being within a plane parallel to the plane of the substrate;
a first suspension structure mechanically coupled to the first asymmetrically shaped mass and the substrate, the first suspension structure positioned substantially at the center of mass about the first non-pivot axis of along the first pivot axis of the first asymmetrically shaped mass.
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Abstract
A single-axis tilt-mode microelectromechanical accelerometer structure. The structure includes a substrate having a top surface defined by a first end and a second end. Coupled to the substrate is a first asymmetrically-shaped mass suspended above the substrate pivotable about a first pivot point on the substrate between the first end and the second end and a second asymmetrically-shaped mass suspended above the substrate pivotable about a second pivot point on the substrate between the first end and the second end. The structure also includes a first set of electrodes positioned on the substrate and below the first asymmetrically-shaped mass and a second set of electrodes positioned on the substrate and below the second asymmetrically-shaped mass.
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Citations
21 Claims
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1. A single-axis tilt-mode microelectromechanical accelerometer structure for measuring acceleration along a single axis, the accelerometer structure comprising:
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a substrate having a top surface defining a plane; a first asymmetrically-shaped mass suspended above the substrate pivotable about a first pivot axis and asymmetric about a first non-pivot axis, the first pivot axis and the first non-pivot axis being within a plane parallel to the plane of the substrate; a first suspension structure mechanically coupled to the first asymmetrically shaped mass and the substrate, the first suspension structure positioned substantially at the center of mass about the first non-pivot axis of along the first pivot axis of the first asymmetrically shaped mass. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A single-axis tilt-mode microelectromechanical accelerometer structure comprising:
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a substrate having a top surface; a first tilt-mode sensor having an asymmetrically-shaped mass having a first pivot axis and a first non-pivot axis, the first pivot axis and the first non-pivot axis in a plane substantially parallel to the top surface of the substrate, the mass being asymmetrical about the first non-pivot axis and the first tilt-mode sensor coupled by an anchor to the substrate; and a second tilt-mode sensor having an asymmetrical-shaped mass having a second pivot axis and a second non-pivot axis, the second pivot axis and the second non-pivot axis in a plane substantially parallel to the top surface of the substrate, the mass being asymmetrical about the second non-pivot axis and coupled by an anchor to the substrate; and wherein the anchor of the first tilt-mode sensor is positioned substantially at the center of mass about the first non-pivot axis along the first pivot axis of the asymmetrically shaped mass. - View Dependent Claims (15)
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16. A single-axis tilt-mode microelectromechanical accelerometer structure for measuring acceleration along a single axis, the accelerometer structure comprising:
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a substrate having a top surface defining a plane; a first asymmetrically-shaped mass suspended above the substrate pivotable about a first pivot axis and asymmetrical about a first non-pivot axis where the first pivot axis and the first non-pivot axis reside in a plane substantially parallel to the top surface of the substrate; a suspending means mechanically coupled to the first asymmetrically shaped mass and the substrate, the suspending means positioned substantially at the center of mass of the first non-pivoting axis of the first asymmetrically shaped mass. - View Dependent Claims (17, 18, 19, 20, 21)
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Specification