Optical module, electronic apparatus, and spectroscopic camera
First Claim
1. An optical module comprising:
- a first reflection film that reflects part of incident light and transmits part thereof;
a second reflection film that faces the first reflection film, reflects part of incident light, and transmits part thereof;
a first driver provided in a region outside an optical interference area formed by the first reflection film and the second reflection film in a plan view, the first driver having a plurality of sub-drivers that are driven independently of each other via voltage application;
a second driver that changes a dimension of a gap between the first reflection film and the second reflection film; and
a voltage controller that applies first drive voltages to the sub-drivers and applies a second drive voltage to the second driver,wherein the voltage controller applies a first drive voltage set for each of the sub-drivers in accordance with parallelism between the first reflection film and the second reflection film at a time when the dimension of the gap is changed.
1 Assignment
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Accused Products
Abstract
An optical module includes a fixed reflection film, a movable reflection film, a first driver having a plurality of sub-drivers that can be driven independently of each other via voltage application in a plan view, a second driver that changes the dimension of a gap between the fixed reflection film and the movable reflection film, and a voltage controller that applies first drive voltages to the sub-drivers and applies a second drive voltage to the second driver, and the voltage controller applies a first drive voltage set for each of the sub-drivers in accordance with parallelism between the fixed reflection film and the movable reflection film at the time when the dimension of the gap is changed.
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Citations
12 Claims
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1. An optical module comprising:
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a first reflection film that reflects part of incident light and transmits part thereof; a second reflection film that faces the first reflection film, reflects part of incident light, and transmits part thereof; a first driver provided in a region outside an optical interference area formed by the first reflection film and the second reflection film in a plan view, the first driver having a plurality of sub-drivers that are driven independently of each other via voltage application; a second driver that changes a dimension of a gap between the first reflection film and the second reflection film; and a voltage controller that applies first drive voltages to the sub-drivers and applies a second drive voltage to the second driver, wherein the voltage controller applies a first drive voltage set for each of the sub-drivers in accordance with parallelism between the first reflection film and the second reflection film at a time when the dimension of the gap is changed. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. An electronic apparatus comprising:
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an optical module; and a control unit that controls the optical module, the optical module including; a first reflection film that reflects part of incident light and transmits part thereof, a second reflection film that faces the first reflection film via a gap, reflects part of incident light, and transmits part thereof, a first driver provided in a region outside an optical interference area formed by the first reflection film and the second reflection film in a plan view, the first driver having a plurality of sub-drivers that can be driven independently of each other via voltage application, a second driver that changes a dimension of the gap between the first reflection film and the second reflection film, and a voltage controller that applies first drive voltages to the sub-drivers and applies a second drive voltage to the second driver, wherein the voltage controller applies a first drive voltage set for each of the sub-drivers in accordance with parallelism between the first reflection film and the second reflection film at the time when the second driver changes dimension of the gap.
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12. A spectroscopic camera comprising:
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an optical module; and a control unit that controls the optical module, the optical module including; a first reflection film that reflects part of incident light and transmits part thereof, a second reflection film that faces the first reflection film via a gap, reflects part of incident light, and transmits part thereof, a first driver provided in a region outside an optical interference area formed by the first reflection film and the second reflection film in a plan view, the first driver having a plurality of sub-drivers that can be driven independently of each other via voltage application, a second driver that changes a dimension of the gap between the first reflection film and the second reflection film, a voltage controller that applies first drive voltages to the sub-drivers and applies a second drive voltage to the second driver, and an imaging section that receives light of a wavelength selected based on interference of light that enters the gap between the first reflection film and the second reflection film to capture a spectroscopic image, wherein the voltage controller applies a first drive voltage set for each of the sub-drivers in accordance with parallelism between the first reflection film and the second reflection film at the time when the second driver changes dimension of the gap.
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Specification