Liquid crystal display device and method of manufacturing the same
First Claim
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1. A liquid crystal display device comprising:
- a gate wiring over an insulating surface;
a first insulating film comprising silicon nitride over the gate wiring;
a first amorphous semiconductor film over the first insulating film;
a pair of second amorphous semiconductor films over the first amorphous semiconductor film;
a first wiring over and electrically connected to one of the pair of second amorphous semiconductor films;
a second wiring over and electrically connected to the other of the pair of second amorphous semiconductor films;
a second insulating film comprising silicon nitride over the first wiring and the second wiring;
a transparent electrode in direct contact with a side surface of the second wiring;
a common electrode;
an alignment film over the transparent electrode and the common electrode; and
a liquid crystal over the alignment film,wherein the common electrode and the transparent electrode overlap each other,wherein the first wiring overlaps the first amorphous semiconductor film and the one of the pair of second amorphous semiconductor films,wherein the first amorphous semiconductor film and the one of the pair of second amorphous semiconductor films extend along the first wiring,wherein a part of the first amorphous semiconductor film and a part of the pair of second amorphous semiconductor films overlap the gate wiring,wherein the second insulating film is in contact with the part of the first amorphous semiconductor film and the part of the pair of second amorphous semiconductor films, andwherein the first wiring overlaps the gate wiring and the common electrode.
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Abstract
In a liquid crystal display device of an IPS system, to realize reduction of manufacturing cost and improvement of yield by decreasing the number of steps for manufacturing a TFT. A channel etch type bottom gate TFT structure, where patterning of a source region and a drain region and patterning of a source wiring and a pixel electrode are carried out by the same photomask.
269 Citations
15 Claims
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1. A liquid crystal display device comprising:
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a gate wiring over an insulating surface; a first insulating film comprising silicon nitride over the gate wiring; a first amorphous semiconductor film over the first insulating film; a pair of second amorphous semiconductor films over the first amorphous semiconductor film; a first wiring over and electrically connected to one of the pair of second amorphous semiconductor films; a second wiring over and electrically connected to the other of the pair of second amorphous semiconductor films; a second insulating film comprising silicon nitride over the first wiring and the second wiring; a transparent electrode in direct contact with a side surface of the second wiring; a common electrode; an alignment film over the transparent electrode and the common electrode; and a liquid crystal over the alignment film, wherein the common electrode and the transparent electrode overlap each other, wherein the first wiring overlaps the first amorphous semiconductor film and the one of the pair of second amorphous semiconductor films, wherein the first amorphous semiconductor film and the one of the pair of second amorphous semiconductor films extend along the first wiring, wherein a part of the first amorphous semiconductor film and a part of the pair of second amorphous semiconductor films overlap the gate wiring, wherein the second insulating film is in contact with the part of the first amorphous semiconductor film and the part of the pair of second amorphous semiconductor films, and wherein the first wiring overlaps the gate wiring and the common electrode. - View Dependent Claims (2, 3, 4, 5)
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6. A liquid crystal display device comprising:
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a gate wiring over an insulating surface; a first insulating film comprising silicon nitride over the gate wiring; a first amorphous semiconductor film over the first insulating film; a pair of second amorphous semiconductor films over the first amorphous semiconductor film; a first wiring over and electrically connected to one of the pair of second amorphous semiconductor films; a second wiring over and electrically connected to the other of the pair of second amorphous semiconductor films; a second insulating film comprising silicon nitride over the first wiring and the second wiring; a transparent electrode in direct contact with a side surface of the second wiring; a common electrode; an alignment film over the transparent electrode and the common electrode; a liquid crystal over the alignment film; and a terminal portion comprising a first conductive layer formed of a same layer as the transparent electrode, wherein the common electrode and the transparent electrode overlap each other, wherein the first wiring overlaps the first amorphous semiconductor film and the one of the pair of second amorphous semiconductor films, wherein the first amorphous semiconductor film and the one of the pair of second amorphous semiconductor films extend along the first wiring, wherein a part of the first amorphous semiconductor film and a part of the pair of second amorphous semiconductor films overlap the gate wiring, wherein the second insulating film is in contact with the part of the first amorphous semiconductor film and the part of the pair of second amorphous semiconductor films, and wherein the first wiring overlaps the gate wiring and the common electrode. - View Dependent Claims (7, 8, 9, 10)
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11. A liquid crystal display device comprising:
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a gate wiring over an insulating surface; a first insulating film over the gate wiring; a first amorphous semiconductor film over the first insulating film; a pair of second amorphous semiconductor films over the first amorphous semiconductor film; a first wiring over and electrically connected to one of the pair of second amorphous semiconductor films; a second wiring over and electrically connected to the other of the pair of second amorphous semiconductor films; a second insulating film over the first wiring and the second wiring; a transparent electrode in direct contact with a side surface of the second wiring; a common electrode; an alignment film over the transparent electrode and the common electrode; a liquid crystal over the alignment film; and a terminal portion comprising a first conductive layer formed of a same layer as the transparent electrode, wherein the common electrode and the transparent electrode overlap each other, wherein the first wiring overlaps the first amorphous semiconductor film and the one of the pair of second amorphous semiconductor films, wherein the first amorphous semiconductor film and the one of the pair of second amorphous semiconductor films extend along the first wiring, wherein a part of the first amorphous semiconductor film and a part of the pair of second amorphous semiconductor films overlap the gate wiring, wherein the second insulating film is in contact with the part of the first amorphous semiconductor film and the part of the pair of second amorphous semiconductor films, and wherein the first wiring overlaps the gate wiring and the common electrode. - View Dependent Claims (12, 13, 14, 15)
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Specification