Radial waveguide systems and methods for post-match control of microwaves

• US 9,299,537 B2
• Filed: 03/20/2014
• Issued: 03/29/2016
• Est. Priority Date: 03/20/2014
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Kobayashi, Satoru, Park, Soonam, Lubomirsky, Dmitry, Sugai, Hideo
• Primary Examiner(s): Le, Tung X
• Application Number:
  US14/221,132
• Publication Number:
  US 20150270105A1
• Time in Patent Office: 740 Days
• Field of Search: 315/111.21, 315/111.31, 315/111.41, 315/111.51, 315/111.71, 315/39, 315/248, 118/723.E, 118/723.R, 118/728, 216/61, 216/68, 216/71
• US Class Current: 1/1
• CPC Class Codes: H01J 19/80 Structurally associated resonator having distributed inductance and capacitance
• CPC Class Codes: H01J 37/244 Detectors; Associated components or circuits therefor
• CPC Class Codes: H01J 37/32201 Generating means
• CPC Class Codes: H01J 37/32229 Waveguides
• CPC Class Codes: H01J 37/32302 Plural frequencies
• CPC Class Codes: H01J 37/32311 Circuits specially adapted for controlling the microwave discharge
• CPC Class Codes: H01J 37/32935 Monitoring and controlling tubes by information coming from the object and/or discharge
• CPC Class Codes: H01J 37/3299 Feedback systems
• CPC Class Codes: H01J 7/24 Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space
• CPC Class Codes: H05B 41/16 in which the lamp is fed by dc or by low-frequency ac, e.g. by 50 cycles/sec ac, or with network frequencies

Abstract

A system provides post-match control of microwaves in a radial waveguide. The system includes the radial waveguide, and a signal generator that provides first and second microwave signals that have a common frequency. The signal generator adjusts a phase offset between the first and second signals in response to a correction signal. The system also includes first and second electronics sets, each of which amplifies a respective one of the first and second microwave signals. The system transmits the amplified, first and second microwave signals into the radial waveguide, and matches an impedance of the amplified microwave signals to an impedance presented by the waveguide. The system also includes at least two monitoring antennas disposed within the waveguide. A signal controller receives analog signals from the monitoring antennas, determines the digital correction signal based at least on the analog signals, and transmits the correction signal to the signal generator.

Claims

1. A system that provides post-match control of microwaves in a radial waveguide, comprising:

the radial waveguide;

a signal generator that provides a first microwave signal and a second microwave signal, the first and second microwave signals having a common frequency, wherein the signal generator adjusts a phase offset between the first and second microwave signals in response to a digital correction signal;

a first electronics set and a second electronics set, wherein each of the first and second electronics sets;

amplifies a respective one of the first and second microwave signals to provide a respective first or second amplified microwave signal,

transmits the respective one of the first and second amplified microwave signals into the radial waveguide; and

matches an impedance of the respective one of the first and second amplified microwave signals to an impedance presented by the radial waveguide;

at least two monitoring antennas disposed at least 30 degrees about a circumference of the radial waveguide from locations at which the first and second electronics sets transmit the respective first and second amplified microwave signals into the radial waveguide; and

a signal controller that;

receives analog signals from the at least two monitoring antennas;

determines the digital correction signal based at least on the analog signals from the at least two monitoring antennas; and

transmits the digital correction signal to the signal generator.

2. The system that provides post-match control of microwaves in a radial waveguide as recited in claim 1, further comprising:

a target input device configured to provide a target parameter to the signal controller;

and wherein;

the signal controller determines the digital correction signal based on the analog signals from the at least two monitoring antennas and the target parameter.

3. The system that provides post-match control of microwaves in a radial waveguide as recited in claim 1, wherein the first electronics set includes:

a tuner that matches the impedance of the first amplified microwave signal to the impedance presented by the radial waveguide;

a dummy load; and

a circulator that shunts any power reflected back from the radial waveguide to the first electronics set, into the dummy load;

wherein the signal generator adjusts the phase offset, and the tuner matches the impedance, concurrently with one another.

4. The system that provides post-match control of microwaves in a radial waveguide as recited in claim 1, wherein the monitoring antennas are disposed proximate to locations at which the first and second electronics sets transmit the respective first and second amplified microwave signals into the radial waveguide.

5. The system that provides post-match control of microwaves in a radial waveguide as recited in claim 1, wherein:

a first one of the monitoring antennas is disposed 90 degrees about a circumference of the radial waveguide from a location at which the first electronics set transmits the first amplified microwave signal into the radial waveguide; and

a second one of the monitoring antennas is disposed 90 degrees about the circumference of the radial waveguide from a location at which the second electronics set transmits the second amplified microwave signal into the radial waveguide.

6. The system that provides post-match control of microwaves in a radial waveguide as recited in claim 1, wherein the monitoring antennas are loop antennas that measure magnetic fields to provide the analog signals.

7. A system for plasma processing of a workpiece, comprising:

a process chamber configured to create a plasma for the plasma processing;

a radial waveguide, adjacent to the process chamber, configured to generate microwaves for transmission to the process chamber to supply energy for the plasma;

a signal generator that provides a first microwave signal and a second microwave signal, the first and second microwave signals having a common frequency, wherein the signal generator adjusts a phase offset between the first and second microwave signals in response to a digital correction signal;

a first electronics set and a second electronics set, wherein each of the first and second electronics sets;

amplifies a respective one of the first and second microwave signals to provide an amplified microwave signal,

transmits the amplified microwave signal into the radial waveguide; and

matches an impedance of the amplified microwave signal to an impedance presented by the radial waveguide;

at least two monitoring antennas disposed at least 30 degrees about a circumference of the radial waveguide from locations at which the first and second electronics sets transmit the respective first and second amplified microwave signals into the radial waveguide; and

a signal controller that;

receives analog signals from the at least two monitoring antennas;

determines the digital correction signal based at least on the analog signals from the at least two monitoring antennas; and

transmits the digital correction signal to the signal generator; and

wherein the first electronics set includes;

a tuner that matches the impedance of the first amplified microwave signal to the impedance presented by the radial waveguide,

a dummy load, and

a circulator that shunts power reflected back from the radial waveguide toward the first electronics set, into the dummy load; and

the signal generator adjusts the phase offset, and the tuner matches the impedance, concurrently with one another.

8. The system for plasma processing of a workpiece as recited in claim 7, wherein the radial waveguide comprises a radial line slot antenna for transmitting the microwaves into the process chamber.

9. The system for plasma processing of a workpiece as recited in claim 8, wherein adjacent to the radial line slot antenna of the radial waveguide, the process chamber is bounded by a ceramic plate that supports a pressure difference between the radial waveguide and the process chamber, while allowing the microwaves to propagate from the radial waveguide into the process chamber.

10. A method for controlling a plasma within a process chamber, comprising:

generating, with a signal generator, a first microwave signal and a second microwave signal, the first and second microwave signals having a common frequency, and a phase offset therebetween that is determined at least in part by the signal generator responding to a digital correction signal;

amplifying the first and second microwave signals to provide respective first and second amplified microwave signals;

transmitting the first and second amplified microwave signals into a radial waveguide proximate the process chamber such that microwaves propagate from the radial waveguide into the process chamber to provide energy for the plasma;

generating analog signals with at least two monitoring antennas disposed at least 30 degrees about a circumference of the radial waveguide from locations at which the first and second electronics sets transmit the respective first and second amplified microwave signals into the radial waveguide;

determining the digital correction signal based at least on the analog signals from the at least two monitoring antennas; and

transmitting the digital correction signal to the signal generator.

11. The method for controlling a plasma within a process chamber as recited in claim 10, wherein determining the digital correction signal comprises performing in-phase and quadrature-phase demodulation on each of the analog signals.

12. The method for controlling a plasma within a process chamber as recited in claim 11, wherein performing in-phase and quadrature-phase demodulation comprises:

mixing a reference high frequency signal with one of the analog signals to generate an intermediate frequency, and

generating digital in-phase and quadrature-phase signals from the intermediate frequency.

13. The method for controlling a plasma within a process chamber as recited in claim 12, further comprising:

utilizing a microprocessor to generate the digital correction signal based on the digital in-phase and quadrature-phase signals;

and wherein generating the first microwave signal comprises;

generating an analog output at the intermediate frequency, utilizing the digital correction signal, and

mixing the analog output with the reference high frequency signal to form the first microwave signal.

14. The method for controlling a plasma within a process chamber as recited in claim 10, further comprising:

receiving a target parameter from a target input device;

and wherein determining the digital correction signal further comprises adjusting the digital correction signal according to the target parameter.

15. The method for controlling a plasma within a process chamber as recited in claim 14, wherein the target parameter is a phase difference, and adjusting the digital correction signal comprises adjusting the phase offset according to the phase difference.