Altering capacitance of MIM capacitor having reactive layer therein
First Claim
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1. A metal-insulator-metal (MIM) capacitor comprising:
- a first electrode;
a second electrode disposed proximate the first electrode;
an insulator layer between the first and second electrodes; and
a reactive layer positioned proximate the insulator layer between the first and second electrodes and configured to allow altering of the reactive layer to change a capacitive value of the MIM capacitor, the reactive layer including a reactive conductor wherein the reactive layer includes silicon dioxide (SiO2) in contact with the reactive conductor.
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Abstract
Embodiments include a metal-insulator-metal (MIM) capacitor having: a first electrode; a second electrode disposed proximate the first electrode; an insulator layer between the first and second electrodes; and a reactive layer positioned proximate the insulator layer and configured to allow altering of the reactive layer to change a capacitive value of the MIM capacitor, the reactive layer including a reactive conductor.
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Citations
8 Claims
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1. A metal-insulator-metal (MIM) capacitor comprising:
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a first electrode; a second electrode disposed proximate the first electrode; an insulator layer between the first and second electrodes; and a reactive layer positioned proximate the insulator layer between the first and second electrodes and configured to allow altering of the reactive layer to change a capacitive value of the MIM capacitor, the reactive layer including a reactive conductor wherein the reactive layer includes silicon dioxide (SiO2) in contact with the reactive conductor. - View Dependent Claims (2, 3, 4)
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5. A metal-insulator-metal (MIM) capacitor comprising:
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a first electrode; a second electrode disposed proximate the first electrode; an insulator layer between the first and second electrodes; and a reactive layer positioned proximate the insulator layer between the first and second electrodes and configured to allow altering of the first reactive layer to change a capacitive value of the MIM capacitor, the reactive layer including a conductor material of one of;
the first electrode and the second electrode wherein the reactive layer includes silicon dioxide (SiO2) in contact with the reactive conductor. - View Dependent Claims (6, 7, 8)
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Specification