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Conveying apparatus

  • US 9,300,181 B2
  • Filed: 12/19/2013
  • Issued: 03/29/2016
  • Est. Priority Date: 12/27/2012
  • Status: Active Grant
First Claim
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1. A conveying apparatus comprising:

  • a housing with a larger dimension in a longitudinal direction than in a width direction, the housing being provided with a wall and capable of maintaining its inside in a vacuum environment or a reduced pressure environment;

    a movable member located inside the housing, the movable member being movable along the longitudinal direction of the housing;

    a linear motor provided with a primary magnetic pole located on the housing side and a secondary magnetic pole located on the movable member side, the secondary magnetic pole being arranged facing the primary magnetic pole, the linear motor being capable of moving the movable member; and

    a cover capable of accommodating the primary magnetic pole, whereinthe primary magnetic pole and the secondary magnetic pole each have a facing surface that faces the other and that is a plane along the longitudinal direction of the housing,the cover has a mounting member for being mounted on the wall,the cover allows the primary magnetic pole to be located in an atmospheric environment and the secondary magnetic pole to be located in a vacuum environment or a reduced pressure environment by separating the secondary magnetic pole and the primary magnetic pole accommodated in the cover from each other when being mounted on the wall, andthe primary magnetic pole and the secondary magnetic pole face each other so that a direction of a magnetic attraction force generated by the primary magnetic pole and the secondary magnetic pole and acting on the facing surfaces is different from directions of forces acting, due to an atmospheric pressure outside the housing, on the wall on which the mounting member is mounted.

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